• Journal of the Optical Society of Korea
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• v.16 no.3
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• pp.221-227
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• 2012

We propose optical proximity corrections (OPCs) for digital micromirror device (DMD)-based maskless lithography. A pattern writing scheme is analyzed and a theoretical model for obtaining the dose distribution profile and resulting structure is derived. By using simulation based on this model we were able to reduce the edge placement error (EPE) between the design width and the critical dimension (CD) of a fabricated photoresist, which enables improvement of the CD. Moreover, by experiments carried out with the parameter derived from the writing scheme, we minimized the corner-rounding effect by controlling light transmission to the corners of a feature by modulating a DMD.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.47 no.3
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• pp.1-6
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• 2010

A comparative analysis of quantum-mechanical and classical simulation regarding corner effect in a Saddle MOSFET has been carried out using a 3-D numerical simulator. The comparison has shown that quantum simulation gives correct description of device by providing accurate peak E-density position and magnitude at the Si-fin cross-section, hence accurate analysis of corner effect and its impact on device threshold voltage (Vth) characteristics is carried out. Moreover, rounding the Si-fin comers or lowering the body doping have been shown as two possible techniques to suppress the undesirable corner effect.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.2
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• pp.285-299
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• 1993

The objective of the present study is to analyze material flow in the metal forming processes by using computer simulation and experiment with model material, plasticine. A UBET program is developed to analyze the bulk flow behaviour of various metal forming problems. The elemental strain-hardening effect is considered in an incremental manner and the element system is automatically regenerated at every deforming step in the program. The material flow behavior in closed-die forging process with rib-web type cavity are analyzed by UBET and elastic-plastic finite element method, and verified by experiments with plasticine. There were good agreements between simulation and experiment. The effect of corner rounding on material flow behavior is investigated in the analysis of backward extrusion with square die. Flat punch indentation process is simulated by UBET, and the results are compared with that of elastic-plastic finite element method.

• Journal of the Korean Vacuum Society
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• v.13 no.3
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• pp.120-126
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• 2004

A damage-reduced trench was investigated in view of the defect distribution along trench sidewall and bottom using high resolution transmission electron microscopy, which was formed by HBr plasma and additive gases in magnetically enhanced reactive ion etching system. Adding $O_2$ and other additive gases into HBr plasma makes it possible to eliminate sidewall undercut and lower surface roughness by forming the passivation layer of lateral etching. To reduce the RIE induced damage and obtain the fine shape trench corner rounding, we investigated the hydrogen annealing effect after trench formation. Silicon atomic migration on trench surfaces using high temperature hydrogen annealing was observed with atomic scale view. Migrated atoms on crystal surfaces formed specific crystal planes such as (111), (113) low index planes, instead of fully rounded comers to reduce the overall surface energy. We could observe the buildup of migrated atoms against the oxide mask, which originated from the surface migration of silicon atoms. Using this hydrogen annealing, more uniform thermal oxide could be grown on trench surfaces, suitable for the improvement of oxide breakdown.

• Wind and Structures
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• v.34 no.1
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• pp.43-58
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• 2022

The BARC flow is studied via Direct Numerical Simulation at a relatively low turbulent Reynolds number, with focus on the geometrical representation of the leading-edge (LE) corners. The study contributes to further our understanding of the discrepancies between existing numerical and experimental BARC data. In a first part, rounded LE corners with small curvature radii are considered. Results show that a small amount of rounding does not lead to abrupt changes of the mean fields, but that the effects increase with the curvature radius. The shear layer separates from the rounded LE at a lower angle, which reduces the size of the main recirculating region over the cylinder side. In contrast, the longitudinal size of the recirculating region behind the trailing edge (TE) increases, as the TE shear layer is accelerated. The effect of the curvature radii on the turbulent kinetic energy and on its production, dissipation and transport are addressed. The present results should be contrasted with the recent work of Rocchio et al. (2020), who found via implicit Large-Eddy Simulations at larger Reynolds numbers that even a small curvature radius leads to significant changes of the mean flow. In a second part, the LE corners are fully sharp and the exact analytical solution of the Stokes problem in the neighbourhood of the corners is used to locally restore the solution accuracy degraded by the singularity. Changes in the mean flow reveal that the analytical correction leads to streamlines that better follow the corners. The flow separates from the LE with a lower angle, resulting in a slightly smaller recirculating region. The corner-correction approach is valuable in general, and is expected to help developing high-quality numerical simulations at the high Reynolds numbers typical of the experiments with reasonable meshing requirements.

• Journal of the Korea institute for structural maintenance and inspection
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• v.21 no.2
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• pp.13-23
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• 2017

This study deals with the strengthening effect and behavioral characteristics of square concrete column wrapped with carbon FRP sheet. The increase in axial compression capacity comes from the confinement effect of wrapped CFRP sheet. Because of the shape of square concrete column, the confinement effect is smaller than that in circular column. For the experimental program, four parameters including the number of sheet, the size of column specimen, the aspect ratio, the corner rounding, and the transformation in shape from square to circular were selected to examine the strengthening effect and behavioral characteristics for each parameter. Experimental program comprised fifty five square concrete column specimens for different eleven types. The compression test results confirmed that the strengthening effect can be increased by the confinement of wrapped and bonded CFRP sheet. However, the confining effect was decreased with the increase of square column size. The other hand, the ductility in square concrete column greatly increased due to caging effect of CFRP sheet. The transformation in shape from square to circular considerably increased both the compressive strength and the ductility of the concrete column wrapped with CFRP sheet. In addition, using test results and existing studies, accuracy and reliability of the existing strength models for CFRP-confined square concrete are verified.