• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2003.09a
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• pp.99-101
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• 2003

Unsaturated hydraulic conductivity models have been widely used for the numerical modeling of water flow and contaminant transport in soils. In this study, a simple hydraulic conductivity model is developed by using information of particle-size distribution from the lognormal distribution model and its results are compared with those from the Kosugi-Mualem (KM) model. The accuracy of the proposed model is verified for observed data chosen from the international UNSODA database. Results showed that the proposed model produces adequate predictions of hydraulic conductivities. Performance of this model is generally better than the KM function.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.34-42
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• 2021

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.3
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• pp.51-55
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• 2005

This study addresses the contamination sensitivity test of a typical fuel pump for an automotive vehicle. The objective of the study is to find the contamination sensitivity coefficient of a fuel pump on specific contaminant particle sizes so that an optimal fuel filter could be selected. To achieve the objective, the degradation of discharge flow rate of the fuel pump is measured under the experiments of various contaminants size ranges of ISO test dust up to $80\;{\mu}m$. The fundamental theory of contamination sensitivity is introduced and the contamination sensitivity coefficients are estimated using the experimental data. Maximum contamination sensitivity coefficient of $5\chi\;10^{-6}\;L/min{\cdot}Ea$ is found in the contaminant size range of $40\;{\mu}m\~50\;{\mu}m$. The magnified picture of the surface of vane disc reveals that the abrasive wear is the principal cause of discharge flow rate degradation. Hence, this study reveals that a high efficiency filter for contaminant particles especially in the size range of $30\;{\mu}m\~70\;{\mu}m$ especially should be used to maintain the service life of the fuel filter.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.05a
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• pp.145-149
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• 2006

As the minimum feature size decreases, it is more difficult to control critical contaminant particles. For 16GB flash memory introduced by Samsung a few months ago, 50nm process was used and in this case, contaminant particles as small as 25nm should be control led. The particle beam mass spectrometer (PBMS) was developed to directly sample particles at pressures down to 100 mtorr. This instrument is sensitive to small particles (>5nm) produced in low concentrations ($>20cm^{-3}$). The PBMS has proved to be effect ive in measuring particles generated during semi-conductor fabrication processes, such as low-pressure chemical vapor deposition (LPCVD) of thin films. The operating principle of the PBMS and some measurement results are reviewed in this paper.

• Journal of the Semiconductor & Display Technology
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• v.7 no.4
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• pp.29-33
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• 2008

Rapid increase of integrity for recent semiconductor industry highly demands the development of removal technology of contaminated particles in the scale of a few microns or even smaller. It is known that the surface cleaning technology using $CO_2$ snow has its own merits of high efficiency. However, the detailed removal mechanism of particles using this technology is not yet fully understood due to the lack of sophisticated research endeavors. The detachment mechanism of particles from the substrates is known to be belonged in four types; rebounding, sliding, rolling and lifting. In this study, a modeling effort is performed to explain the detachment mechanism of a contaminant particle due to the rebounding caused by the vertical collision of the $CO_2$ snow. The Hertz and Johnson-Kendall-Roberts(JKR) theories are employed to describe the contact, adhesion and deformation mechanisms of the particles on a substrate. Numerical simulations are followed for several representative cases, which provide the perspective views on the dynamic characteristics of the particles as functions of the material properties and the initial inter-particle collision velocity.

• Journal of the Korean Vacuum Society
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• v.20 no.2
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• pp.86-92
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• 2011

The diagnosis studies of the process of chemical vapor deposition were carried out by using in-situ particle monitor (ISPM) and self-plasma optical emission spectroscopy (SPOES). We used the two kinds of equipments such as the silicon plasma enhanced chemical vapor deposition system with silane gas and the borophosphosilicate glass depositon system for monitoring. Using two sensors, we tried to verify the diagnostic and in-situ sensing ability of by-product gases and contaminant particles at the deposition and cleaning steps. The processes were controlled as a function of precess temperature, operating pressure, plasma power, etc. and two sensors were installed at the exhaust line and contiguous with each other. the correlation of data (by-product species and particles) measured by sensors were also investigated.

• Particle and aerosol research
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• v.6 no.3
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• pp.139-145
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• 2010

In this study, we investigated the particle formation during the deposition of borophosphosilicate glass (BPSG) and phosphosilicate glass (PSG) films in thermal chemical vapor deposition reactor using in-situ particle monitor (ISPM) and particle beam mass spectrometer (PBMS) which installed in the reactor exhaust line. The particle current and number count are monitored at set-up, stabilize, deposition, purge and pumping process step in real-time. The particle number distribution at stabilize step was measured using PBMS and compared with SEM image data. The PBMS and SEM analysis data shows the 110 nm and 80 nm of mode diameter for BPSG and PSG process, respectively.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.1
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• pp.25-31
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• 2003

Airborne contaminant particles are intruded into optical disk drives(ODD) due to the flow caused by disk rotation and can be adhered to lens or disk surfaces, which causes decrease of laser power and increase of read/write errors. Such a phenomenon can be more serious as the space between the disk and the lens is reduced fur high-density storage devices. The purpose of this paper is to understand design parameters to reduce the particle intrusion into an ODD. Suggestions are made to prevent the particle intrusion that can decrease the stability of an ODD and also prevent the potential heat build-up problem. The sealing effect of drive and the forced injection of clean air (using HEPA filter) into the drive minimizes intrusion of the outside air and dusts in an ODD remarkably. Moreover it is proved by experiments that the installation of a heatproof pad to isolate heat generation part (PCB) from information read/write sections and the forced injection of dust-free air reduce the gas temperature inside the drive as well as the amount of particles intruded.

• Journal of Korean Society of Water and Wastewater
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• v.27 no.3
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• pp.299-312
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• 2013

This study investigated the contaminant loading and characteristics of particle size distributions(PSDs) in the rainfall runoff from two different sources, the pavement road and the ancillary parking lot, and then evaluated four different types of filter media(i.e., EPP, EPS, Zeolite, and Perlite) to treat runoff water. The results showed that runoff from the pavement road contains 5.6 and 20 times higher SS and Pb concentrations, respectively, than that from the parking lot. The particles smaller than $100{\mu}m$ occupied 89.8 % of runoff from the pavement road and 81.4 % of that from the parking lot by volume. The effect of the hydraulic loading, at 950 m/day filtering linar velocity and 40 cm head loss, was largest for Zeolite, followed by Perlite, EPS, and EPP. The return period of tested media calculated by the regression equation for head loss indicated that EPP has the longest life time. The average SS removal rate was similar for all media at between 84.9 % and 89 %, while the effect of various filter column heights was different, showing minimal for EPP and maximum for EPS. All filter media tested demonstrated over 95 % of SS treatment efficiency for the particles bigger than $100{\mu}m$, while for the ones smaller than $100{\mu}m$ the efficiency was in order of EPP(82.4%) > Perlite(76.1 %) > EPS(66.2 %) > Zeolite(65.2 %). The results in conclusion implies that EPP is most effective filter media for the highly contaminated fine particles from road runoff.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.39 no.3
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• pp.253-260
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• 2015

Particle contamination in a cleanroom is very complex with a complicated process and several pieces of spreading equipment. Detailed information on the locations of the contamination sources and the path of the contamination is needed for economical and efficient control of the contaminant particles in such a cleanroom. An allocation method was developed to quantitatively predict the contamination generated from the pollution sources. In this paper, we propose a zoning method to accelerate the computation time for estimating the contributions. Our results showed that we can quantitatively estimate the amount of contamination generated from pollution sources.