Real-time Contaminant Particle Monitoring for Chemical Vapor Deposition of Borophosphosilicate and Phosphosilicate Glass Film by using In-situ Particle Monitor and Particle Beam Mass Spectrometer |
Na, Jeong Gil
(School of Mechanical Engineering, Sungkyunkwan University)
Choi, Jae Boong (School of Mechanical Engineering, Sungkyunkwan University) Moon, Ji Hoon (Sungkyunkwan Advanced Institute of Nano Technology, Sungkyunkwan University) Lim, Sung Kyu (National Nanofab Center) Park, Sang Hyun (National Nanofab Center) Yi, Hun Jung (Manufacturing Technology Team, Semiconductor Business, Samsung Electronics) Chae, Seung Ki (Manufacturing Technology Team, Semiconductor Business, Samsung Electronics) Yun, Ju Young (Vacuum Center, Korea Research Institute of Standards and Science) Kang, Sang Woo (Vacuum Center, Korea Research Institute of Standards and Science) Kim, Tae Sung (School of Mechanical Engineering, Sungkyunkwan University) |
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