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http://dx.doi.org/10.3795/KSME-B.2015.39.3.253

Zoning Method to Predict Contaminant Sources in Turbulent-Type Cleanroom  

Kim, D.K. (Dept. of Mechanical Engineering, Sungkyunkwan Univ.)
Sung, H.G. (Dept. of Mechanical Engineering, Sungkyunkwan Univ.)
Han, S.M. (Korea Marine Equipment Research Institute)
Hwang, Y.K. (Dept. of Mechanical Engineering, Sungkyunkwan Univ.)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.39, no.3, 2015 , pp. 253-260 More about this Journal
Abstract
Particle contamination in a cleanroom is very complex with a complicated process and several pieces of spreading equipment. Detailed information on the locations of the contamination sources and the path of the contamination is needed for economical and efficient control of the contaminant particles in such a cleanroom. An allocation method was developed to quantitatively predict the contamination generated from the pollution sources. In this paper, we propose a zoning method to accelerate the computation time for estimating the contributions. Our results showed that we can quantitatively estimate the amount of contamination generated from pollution sources.
Keywords
Cleanroom; Contamination Source; Control of Cleanness Level; Weighting Factor; Allocation Method; Zoning Method;
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