Analysis of Contact Resonance Frequency Characteristics for Cantilever of Ultrasonic-AFM Using Finite Element Method (유한요소 해석을 이용한 초음파원자현미경 캔틸레버의 접촉 공진주파수 특성 분석)
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- Journal of the Korean Society of Manufacturing Technology Engineers
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- v.23 no.5
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- pp.478-484
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- 2014