• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.33-33
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• 2000

일반적으로 GaN-based light emitting diodes(LEDs)는 Top layer위에 금속박막으로 contact을 형성하고 있으며 광소자 구성에 있어 빛은 이러한 금속 contact을 통과할 수 없다. 그러나 만약 이러한 contact이 투명전도막으로 구성될 수 있다면 보다 효율적인 광소자의 구성이 기대되어진다. 특히 GaN photodetector, GaN-based LEDs, GaN vertical cavity surface emitting lasers(VCSELs)등의 소자형성에 있어 투명전도막 contact은 매우 중요하며 그 응용에 앞서 기본적인 구조적, 전기적, 광학적 특성에 대한 연구가 반드시 선행되어져야 한다. 따라서 본 실험에서는 이러한 투명전도막으로써 Indium Tin Oxide(ITO)를 사용하였으며 박막형태의 contact으로 제조하여 n-GaN, p-GaN와 corning glass위에 e-beam evaporation법로써 제조하였다. 또한 각 n-, p-type과 corning glass위에 증착된 ITO박막의 구조적 특성을 분석하기 위하여 x-ray diffractometry(XRD)와 Auger electron spectroscopy(AES)등을 사용하였으며 전기적 특성을 측정하기 위하여 four point probe를 사용하였고 그들의 I-V 곡선을 측정하였다. 또한 UV spectrometry를 사용하여 그들의 광학적 특성을 측정하고자 하였다. ITO 박막의 제조에 있어 기판은 초음파 유기세정 후 HCl과 H2O2(1:1)의 혼합용액을 사용하여 GaO2를 제거하고자 하였으며 이후 초순수로 세척하여 사용하였다. 초기 진공도는 3$\times$10-5 Torr이하였으며 기판온도 50$0^{\circ}C$에서 0.6 /s의 증착속도로 약 2000 증착하였다. 이렇게 제조된 ITO 박막은 5$\times$10-5 Torr이하의 진공분위기에서 $600^{\circ}C$로 열처리를 실시하였으며 열처리 시간의 변화에 따른 그들의 전기적, 구조적, 광학적 특성을 측정하였다. 열처리 과정을 통한 ITO박막은 투과도는 420nm의 영역에서 80%이상을 나타내었으며 이때의 면저항은 약 50ohm/ 이었다. 또한 I-V 곡선 측정에 의한 contact특성의 측정결과 열처리 전의 ITO contact은 n-GaN와 n-GaN에 대해 각각 ohmic과 schottky contact의 일반적인 contact 특성을 나타내었다. 그러나 이러한 contact 특성은 열처리 시간의 변화에 따라 변화하는 것을 확인할 수 있었다.

• 한국재료학회지
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• 제1권1호
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• pp.17-22
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• 1991

불순물이 주입된 실리콘 기판에 500 두께의 탄탈륨 박막을 증착한 후 실리사이드를 형성시키기 위해 아르곤 분위기에서 급속열처리(RTA)률 하였다. 형성된 $TaSi_2$와 불순물의 거동은 XRD, SEM, 4-point probe, HP4145와 SIMS로 조사하였다. 불순물의 종류에 관계없이 $TaSi_2$는 RTA 온도가 $800^{\circ}C$일때 형성되기 시작하였으며 $1000^{\circ}C$이상에서 증착된 Ta가 전부 $TaSi_2$로 상 전이가 일어났다. 또한 $TaSi_2/P^+$영역에 대한 접촉저항간은 contact size가 $0.9{\times}0.9({\mu}{m^2}$)일때 $22{\Omega}$ 낮은값을 가졌으며 이온 주입된 불순물은 RTA처리시 형성된 $TaSi_2$층으로 out-diffusion이 일어났다.

• Tribology and Lubricants
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• 제35권5호
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• pp.286-293
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• 2019

In friction and wear tests that use friction force microscopy (FFM), the wear debris transfer to the tip apex that changes tip radius is a crucial issue that influences the friction and wear performances of films and coatings with nanoscale thicknesses. In this study, FFM tests are performed for bilayer $MoS_2$ film to obtain a better understanding of how geometrical and chemical changes of tip apex influence the friction and wear properties of nanoscale molecular layers. The critical load can be estimated from the test results based on the clear distinction of the failure area. Scanning electron microscopy and energy-dispersive spectroscopy are employed to measure and observe the geometrical and chemical changes of the tip apex. Under normal loads lower than 1000 nN, the reuse of tips enhances the friction and wear performance at the tip-sample interface as the contact pair changes with the increase of tip radius. Therefore, the reduction of contact pressure due to the increase of tip radius by the transfer of $MoS_2$ or Mo-dominant wear debris and the change of contact pairs from diamond/$MoS_2$ to partial $MoS_2$ or Mo/$MoS_2$ can explain the critical load increase that results from tip reuse. We suggest that the wear debris transfer to the tip apex should be considered when used tips are repeatedly employed to identify the tribological properties of ultra-thin films using FFM.

• 한국재료학회지
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• 제13권9호
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• pp.606-612
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• 2003

Surface and mechanical properties of thin films with submicron thickness was characterized by nanoindentation with Berkovich and Vickers tips, and scanning probe microscopy. Nanoindention was made in a depth range of 15 to 200 nm from the surface by applying tiny force in a range from 150 to $9,000 \mu$N. Stiffness, contact area, hardness, and elastic modulus were determined from the force-displacement curve obtained. Reliability was first tested by using fused quartz, a standard sample. Elastic modulus and hardness values of fused quartz measured were the same as those reported in the literature within two percent of error. Mechanical properties of ITO thin film were characterized in a depth range of 15∼200nm. As indentation depth increased, elastic modulus and hardness decreased by substrate effect. Ion beam deposited DLC thin films were indented in a depth range of 40∼50 nm. The results showed that the DLC thin film using benzene and bias voltage 0∼-50 V has elastic modulus and hardness value of 132 and 18 GPa respectively. Pure DLC thin films showed roughnesses lower than 0.25 nm, but silicon-added DLC thin films showed much higher roughness values, and the wavy surface morphology.

• Journal of the korean society of oceanography
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• 제36권1호
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• pp.1-8
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• 2001

An in-situ four-electrode contact resistivity probe system was designed, and field-tested in submarine sediments. Seismic survey was also performed to support and compare the results of electric survey. The probe was designed to be driven to selected depths below the seafloor using a Vibracore system. The four insulated electrodes were, spaced equidistant across the wedge, were extended beyond the probe tip to minimize effects of sediment disturbance by the wedge insertion. In-situ measurements of resistivity were recorded on board by precision electronic equipment consisting of signal generators and processors, and by temperature-monitoring systems. Overall limits of Uncertainty at respective depths below the seafloor are up to ${\pm}$10 of the measured values. Best estimates of conductivity are considered to be ${\pm}$3 percent of the reported values. Resistivity measurements were made at six sites in carbonate sediments to a maximum depth of penetration of about 5 m. Average values of conductivity range between 0.88 and 1.21 mho/m. The results show the seabed is composed of alternating layers of relatively high-conductivity material (0.8 to 1.4 mho/m) in thicknesses of more or less one meter and layers about 30 cm thick having relatively low conductivities (0.4 to 0.8 mho/m).

• 마이크로전자및패키징학회지
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• 제24권4호
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• pp.73-77
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• 2017

최근 정보 보호가 이슈화됨에 따라 지문인식센서의 활용이 점차 증가하고 있으며, 센서 인식률 오차를 최소화 할 수 있는 품질평가를 요구한다. 지문인식센서 전극과 검사부 프로브 팁이 접촉 시 발생하는 저항 값의 변화에 의해 센서의 품질이 평가되며, 품질평가의 재현성을 확보하기 위해서는 센서 전극의 변형 유발을 최소화할 수 있는 프로브 소재의 적합성과 구조 최적화 연구가 필요하다. 프로브 팁의 적합성 평가를 위한 소재로 니켈(Ni), 스틸(SK4), 베릴륨동(Beryllium copper), 인청동(Phosphor bronze)을 비교하였으며, 프로브 팁 접촉 후 전극의 압흔 크기와 접촉저항을 고려할 때 베릴륨동이 프로브 소재로 적합하다. 검사부 프로브는 지문인식센서 전극의 물리적 손상 방지와 다수의 지문인식센서 동시 검사가 가능한 구조를 위해 일체형 프로브 방식으로 제작하였다. 검사부의 재현성은 특정 전류 값을 인가하여 지문인식센서의 전압 변화로 판단하였으며, 베릴륨동 프로브 소재와 일체형 구조를 통해 센서 전극에 프로브가 300회 접촉하는 동안 센서의 전압 변화는 ${\pm}0.003V$ 이내의 우수한 재현성을 확인하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계학술대회 논문집 초전도 자성체
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• pp.25-28
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• 2002

Contact type Ic measurement system is needed to measure Ic continuously for long Bi-2223 tapes. Voltage and current terminals were designed several shapes for 4-probe method Ic measurement. Voltage terminals were made with brass and current terminals were made with Cu. We used 2 kinds of Bi-2223 tapes with different strength. When we measured Ic of Bi-2223 tape with Ag-Mg sheath, The proper weight was 0.3 kg and sharp pin type was better. according to voltage terminal shape and load. In case of Bi-2223 tape with Ag-Mn sheath, the proper terminal weight was 4 kg and sharp pin type was bad. It was possible to make continuous contact type Ic measurement system because We could get proper data - terminal shapes and loads - through these experiments.

• ETRI Journal
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• 제26권3호
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• pp.189-194
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• 2004

We demonstrate a high-speed recording based on field-induced manipulation in combination with an optical reading of recorded bits on Au cluster films using the atomic force microscope (AFM) and the near-field scanning optical microscope (NSOM). We reproduced 50 nm-sized mounds by applying short electrical pulses to conducting tips in a non-contact mode as a writing process. The recorded marks were then optically read using bent fiber probes in a transmission mode. A strong enhancement of light transmission is attributed to the local surface plasmon excitation on the protruded dots.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.369-372
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• 2004

Photo-induced surface alignment is charming as a non-contact photo-patternable alignment technology which can be used in the next generation of displays, such as large area, multi-domain. For decades, many polymer film have been investigated and developed to be used in the photo alignment. Among these photoreactive materials, recently developed polyimide, Chloromethylated Polyimide(CMPI) now became the focus of interests in this area because of its high photosensitivity and superior thermal stability. In this report, we present micro patterning method to form the nanoscale structure by Mask-Less laser patterning using this CMPI film and NSOM probe.

• 한국정밀공학회지
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• 제12권3호
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• pp.23-31
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• 1995

The sending characteristics of the non-contact type displacement transducers can affect the performances of the magnetic bearing systems when they support the rotating shaft. The probe type displacement sensor detects not only the displacement of the rotor at the sensing position but also the surface irregularitis of the rotor such as surface roughnessand roundness errors. If there exist such measuring errors, the magnetic bearing can not apply proper force against the rotor displacements for the detected signal is the input to the magnetic bearing controllers. The cylindrical shape capacitive transducer can detect the rotor displacement by the integral sum of the charges which are formed between the sensor plates and rotor so that it can reduce the detecting errors induced by the surface irregularities of the rotor. By theore- tical analysis, we compared the sensing characteristics of the cylindrical shape capacitive transducers for the rotors that have some sinusoidal irregularities with that of the ideal probe type displacement transducers.