• Korean Journal of Materials Research
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• v.18 no.7
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• pp.373-378
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• 2008

$Ba(Ti,Sn)O_3$ thin films, for use as dielectrics for MLCCs, were grown from Sn doped BaTiO3 sources by e-beam evaporation. The crystalline phase, microstructure, dielectric and electrical properties of films were investigated as a function of the (Ti＋Sn)/Ba ratio. When $BaTiO_3$ sources doped with $20{\sim}50\;mol%$ of Sn were evaporated, $BaSnO_3$films were grown due to the higher vapor pressure of Ba and Sn than of Ti. However, it was possible to grow the $Ba(Ti,Sn)O_3$ thin films with {\leq}\;15\;mol%$ of Sn by co-evaporation of BTS and Ti metal sources. The (Ti＋Sn)/Ba and Sn/Ti ratio affected the microstructure and surface roughness of films and the dielectric constant increased with increasing Sn content. The dielectric constant and dissipation factor of $Ba(Ti,Sn)O_3$ thin films with {\leq}\;15\;mol%$ of Sn showed the range of 120 to 160 and $2.5{\sim}5.5%$ at 1 KHz, respectively. The leakage current density of films was order of the $10^{-9}{\sim}10^{-8}A/cm^2$ at 300 KV/cm. The research results showed that it was feasible to grow the $Ba(Ti,Sn)O_3$ thin films as dielectrics for MLCCs by an e-beam evaporation technique.

• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.427-433
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• 2006

We have fabricated nanodot arrays by using phase separated (PS- b- PMMA) diblock copolymer film and anodic aluminum oxide (AAO) membrane as templates with hexagonal arrays of cylindrical microdomains perpendicular to the substrate. Pulsed laser deposition technique was used to deposit various kinds of materials including Ag, Ni, ZnO, Si:Er, and Co/Pt onto Si substrates. The size and separation of nanodots correspond to those of the templates used, The density of nanodots was estimated to be $6{\times}10^{11}/cm^2$ and $1{\times}10^{10}/cm^2$ when the diblock copolymer and AAO were used, respectively. In particular, the optical properties of ZnO and Si: Er nanodot arrays were investigated and the strong photoluminescence at 380 nm and $1.54{\mu}m$ was observed from ZnO and Si:Er nanodot arrays, respectively.

• Journal of the Korean Vacuum Society
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• v.21 no.1
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• pp.17-21
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• 2012

Ga-doped ZnO (GZO) thin films for application as transparent conducting oxide film were deposited on the glass substrate by using rf-magnetron sputtering system. The effects of working pressure on electrical and optical characteristics of GZO films were investigated. Regardless of the working pressure, all films were oriented along with the c-axis, perpendicular to the substrate. The electrical resistivity was about $8.68{\times}10^{-3}{\Omega}{\cdot}cm\sim2.18{\times}10^{-3}{\Omega}{\cdot}cm$ and the average transmittance of all films including substrates was over 90% in the visible range. The good transparents and conducting properties were obtained due to controle the working pressure. The obtained results have acceptable for application as transparent conductive electrodes in LCDs and solar cells.

• Tribology and Lubricants
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• v.36 no.2
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• pp.68-74
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• 2020

In this study, the effect of the shape error of a guideway on the movement of a stage that uses an air bearing is analyzed. The shape error of moving parts supported by the air bearing is known not to affect the vibrations of moving parts as much as the magnitude of the shape error. This is called the "averaging effect." In this study, the effect of shape error on a guideway, as well as the averaging effect of an air-bearing system, is analyzed theoretically using a dynamic-analysis program. The dynamic-analysis program applies a commercially available code in COMSOL and solves the Reynolds equation between the stage and the guideway, along with the equation of motion of the stage. The stage is modeled as a two-degree-of-freedom system. The shape error is applied to the film thickness function in the form of a sine wave. The stage movement is analyzed using the fast Fourier transform process. The eccentricity and tilting are found to be proportional to the amplitude of the shape error of the guideway. Stage vibrations are less than 10% of the amplitude of the shape error on the guideway. This means that the averaging effect of the air bearing is verified quantitatively. Moreover, if the air supply position matches the shape error in the guideway, there is a notable change in eccentricity and tilting.

• Korean Journal of Optics and Photonics
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• v.23 no.2
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• pp.55-63
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• 2012

We present results of optical design and fabrication of a light guiding plate (LGP) to be used as an illumination system for photobioreactors. Modeling of a light-emitting diode (LED) light source, a reflection film, and LGP patterns was performed. Especially, the LGP patterns were modeled as Lambertian scatterers. The modeling parameters (reflectance, scatterer width) were determined through matching simulations with the experimentally measured illuminance distribution for a test LGP. An LGP for an LED light source was designed with the extracted model parameters, and fabricated using a computerized numerical control machine. Optical characteristics including average illuminance and uniformity of illuminance distribution were measured for the fabricated LGP.

• Membrane Journal
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• v.26 no.1
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• pp.26-31
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• 2016

Polycaprolactone (PCL) has been fabricated into the membrane type scaffolds of 3 dimensional pore network for the tissue engineering applications by the blade method of salt (NaCl) leaching and solution casting. In this study, the experimental designs have each conditions of drying temperature, salt particle size, salt content. The modified dispensing pump connected up to homogenizing mixer system is used for mixing the $PCL/CHCl_3$ solution and NaCl particles. The membrane fabricated use by the film applicator to poured mixed solution on the glass plate. The great pore by NaCl particles and the small pore by the evaporated $CHCl_3$ in the frame wall of great pores are multiply formed in membrane scaffolds.

• Korean Journal of Materials Research
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• v.15 no.2
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• pp.134-138
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• 2005

This study was performed to investigate the surface properties of electrochemically oxidized pure niobium by anodic oxide and hydrothermal treatment technique. Niobium specimens of $10mm\times10mm\times1.0mm$ in dimension were polished sequentially from $\#600,\;\#800,\;\#1000$ emery paper. The surface of pure niobium sperimens was anodized in an electrolytic solution that was dissolved calcium and phosphate in water. The electrolytic voltage was set in the range of 250 V and the current density was $10mA/cm^2$. The specimen was hydrothermal treated in high-pressure steam at $300^{\circ}C$ for 2 hours using an autoclave. And all specimens were immersed in the in the Hanks' solution nth pH 7.4 at $37^{\circ}C$ for 30 days. The surface of specimen was characterized by surface roughness, scanning electron microscope(SEM), energy dispersion X-ray analysis(EDX), X-ray photoemission spectroscopy(XPS) test. The value of surface roughness was the highest in the anodized sample and $0.41{\pm}0.04\;{\mu}m$. The results of the SEM observation show that oxide layers of the multi porosity in the anodized sample were piled up on another, and hydroxyapatite crystal was precipitate from the surface of the hydrothermal treated sample. In the XPS analysis, O, Nb, C peak and small amounts of N peak were found in the polished specimens while Ca and P peak in addition to O, Nb, C and peak were observed in the hydrothermal treated sample.

• Korean Journal of Materials Research
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• v.15 no.3
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• pp.155-160
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• 2005

The electrolytic reduction of spent oxide fuel involves the liberation of oxygen in a molten LiCl electrolyte, which results in a chemically aggressive environment that is very corrosive fir typical structural materials. So, it is essential to choose the optimum material f3r the process equipment handling molten salt. In this study, the corrosion behavior of Al-Y coated Haynes 263 in a molten salt of $LiCl-Li_2O$ under oxidation atmosphere was investigated at $650^{\circ}C$ for $72\~168$ hours. The corrosion rate of Al-Y coated Haynes 263 was low while that of bare Haynes 263 was high in a molten salt of $LiCl-Li_2O$. Al-Y coated Haynes 263 improved the corrosion resistance better than bare Haynes 263 alloy. An Al oxide layer acts as a protective film which Prohibits Penetration of oxygen. Corrosion Products were formed $Li(Ni,Co)O_2$ and $LiTiO_2$ on bare Haynes 263, but $LiAlO_2,\;Li_5Fe_5O_8\;and\;LiTiO_2$ on Al-Y coated Haynes 263.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.139-144
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• 2005

A rigorous research is underway in our team, for the design and development of high figure of merits (ZT= 1.5${\sim}$2.0) micro-thermoelectric coolers. This paper discusses the fabrication process that we are using for developing the $Sb_2Te_3-Bi_2Te_3$ micro-thermoelectric cooling modules. It describes how to obtain the mechanical properties of the thin film TEC elements and reports the results of an equation-based multiphysics modeling of the micro-TEC modules. In this study the thermoelectric thin films were deposited on Si substrates using co-sputtering method. The physical mechanical properties of the prepared films were measured by nanoindentation testing method while the thermal and electrical properties required for modeling were obtained from existing literature. A finite element model was developed using an equation-based multiphysics modeling by the commercial finite element code FEMLAB. The model was solved for different operating conditions. The temperature and the stress distributions in the P and N elements of the TEC as well as in the metal connector were obtained. The temperature distributions of the system obtained from simulation results showed good agreement with the analytical results existing in literature. In addition, it was found that the maximum stress in the system occurs at the bonding part of the TEC i.e. between the metal connectors and TE elements of the module.

• Journal of the Korean Institute of Telematics and Electronics
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• v.26 no.7
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• pp.50-57
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• 1989

Tapered etching of polysilicon films has been achieved by implanting phosphorus ions into the polysilicon film and using plasma etch in either $CF_4-O_2\;or\;SF_6$. A two-step plasma etching method is also proposed to control the taper angle of the etched edge without changing the implantion conditions. The taper angle is determined by the ratio of the etch rate of the undamaged region to that of the damaged top region of the polysilicon layer. The ratio is found to be dependent on the implantion dose, the implantion energy and the anisotropy of etching. The minimum angle in our experiments is about $10^{\circ}$. When the two-step etching method is employed, the taper angles can be controlled from the minimum angle up to about $55^{\circ}$.