• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 1993.10a
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• pp.779-790
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• 1993

A prototype of the feeding-milking robot was developed in the Hungarian Institute of Agricultural Engineering in 1988-89. Before starting with the operation tests the cleaning system had to be elaborated . The cleaning system has two parts. Those are the complete cleaning of the system, producing a practically sterile state, as well as flushing through the milking device between milking of two cows. Separate electronic sensor development was necessary for both system which can connect to the control system of the robot. To clean the system pneumatic air input was applied. As an effect of the local adjustment of the electronic control system optimal flow conditions can be formed what is more favourable comparing to the earlier solutions of cleaning due to the mechanical effect. In the flushing through overpressure air is applied. The air and the cleaning liquid input duration can be adjusted to the local conditions. The electronic control unit can be connected to the electric ircuits of robot.

• Korean Journal of Materials Research
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• v.16 no.2
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• pp.75-79
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• 2006

The effect of ozone and/or ultrasound treatments on the efficiency of slurry removal in post sliced cleaning (PSC) of silicon ingot was studied. Efficiency of slurry removal was evaluated as functions of time, temperature and surfactant with DOE (Design of Experiment) method. Residual slurries were observed on the wafer surface in case of cleaning by ozone or ultrasound separately. However, a clean wafer surface was appeared when cleaned with ozone and ultrasound simultaneously. It has found that cleaning time was the main effect among temperature, time and surfactant. Elevated temperature, addition of surfactant and high ozone concentration helped to accelerate efficient removal of slurry. The improvement of removal efficiency seems to be related to the formation of more active OH radicals. The highly cleaned surface was achieved at 10 wt% ozone, 1 min and 10 vol% surfactant with ultrasound. Application of ozone and ultrasound might be a useful method for PSC process in wafer cleaning.

• Tribology and Lubricants
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• v.31 no.6
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• pp.239-244
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• 2015

Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.556-559
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• 1997

This paper describes the development process of mosquito trap with the effect of air cleaning by using the substance-field analysis and evolution pattern of systems in the theory of inventive problem solving (TRIZ). By the concept of standard solution about introducing S3 substance, modification of S1 (human) and S2 (mosquito) between first substance SI and second substance S2 with harmful effect, we got the concept of the mosquito trap with mosquito attractants instead of mosquito reluctants such as mosquito stick coil and skin medicine w~th bad and toxic smell. The number of mosquitos traped by one trap near cattle shed per one n~ght in summer, was over 10 thousands with some effects of air cleaning.

• Textile Coloration and Finishing
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• v.3 no.2
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• pp.10-15
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• 1991

This study was to examine the anti-bacteria effect and the changes of chemical properties of chrome-tanned garment leathers on the preservative treatment. Various test methods, such as investigation of preservative treatment process, resistance test and chemical analysis by cleaning, antbbacterial test by shake flask method are carried out in this study. The results can be obtained as follows: 1. Bacterial reduction percentage of chrome-tanned garment leathers on the preservative treatment was 28.6%. 2. In the antbbacterial effect by dry cleaning, preservative treated leathers has no resistance. 3. Fats content has been removed by dry cleaning using perchloroethylene, so garment leathers properties were altered. 4. PH value was changed by dry cleaning. But once after fats removing, it was changed the little by dry cleaning numbers.

• Journal of the Semiconductor & Display Technology
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• v.11 no.3
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• pp.7-11
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• 2012

Among various wet cleaning methods, megasonic and jet spray gained their popularity in single wafer cleaning process for the efficient removal of particulate contaminants from the wafer surface. In the present study, we evaluated these two cleaning methods for particle removal efficiency (PRE) and pattern damage on the aluminum layered wafer surface. Also the effect of $CO_2$ dissolved water in jet spray cleaning is assessed by measuring PRE. It is observed that the jet spray cleaning process is more effective in terms of PRE and pattern damage compared to megasonic cleaning and the mixing of $CO_2$ in the water during jet sprays further increases the PRE. We believe that the outcome of the present study is useful for the semiconductor cleaning process engineers and researchers.

• Membrane and Water Treatment
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• v.8 no.2
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• pp.149-160
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• 2017

This study investigated effects of NaOH cleaning on the intrinsic permeability of polyvinylidene fluoride (PVDF) membranes and flux recoveries and membrane resistances under various conditions encountered during ultrafiltration in water treatment plants. The NaOH cleaning using 10,000 mg/L NaOH led to discoloration of PVDF membranes and had little effect on water flux. The NaOH cleaning was efficient in removing the fouling layer caused by humic water. However, long filtration induced a fouling layer that was not removed easily by NaOH cleaning. The lower temperature during filtration yielded rapid increases in transmembrane pressure and decreases in NaOH cleaning efficiency. The alkaline cleaning of PVDF changed the membrane properties such as the hydrophobicity and morphology. Foulant properties, operational conditions such as temperature, and chemical agents should be considered for cleaning strategies for PVDF applied in water treatment.

• Journal of Conservation Science
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• v.19
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• pp.19-30
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• 2006

Alteration of physical and chemical characteristics and the effect of removal of mineral substances in waterlogged archaeological woods by different cleaning processes were examined using oak wood(Quercus spp.) that was excavated from wetland near Gwangju, Korea. Cleaning methods employed in the present work were (1) tools, (2) deaeration, (3) EDTA and (4) ultrasonic cleaning, which are being currently applied in the field of preservation treatment. Cleaning process were performed independently or continuously. Composition of mineral substances in the waterlogged archaeological wood was almost same as the that of soil in which waterlogged archaeological woods were buried. In case of independent cleaning, tools cleaning efficiently removed the mineral substances on surface. Surface color become brighter after cleaning with EDTA. In contrast, deaeration and ultrasonic cleaning did not show any significant removal of mineral substances. In continuous cleaning process, tool cleaning as the first step treatment showed the same effect as shown in independent cleaning. Although deaeration as the second step cleaning did not remove the mineral substances, it could be assumed to contribute the infiltration of dimensional agents by homogenization of wood. EDTA treatment (the third step cleaning) removed the iron(Fe) and increased the whiteness of wood color. The ultrasonic treatment (the fourth step cleaning) removed the sodium(Na) remained after EDTA treatment and the fine mineral substances.

• Journal of Korean Society of Water and Wastewater
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• v.33 no.5
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• pp.353-366
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• 2019

This research proposes an optimal flushing operation technique in an effort to prevent secondary water pollutions and accidents in aged pipes, and to improve the cleaning effect of unidirectional flushing. Water flow directions were analyzed using EPANET 2.0, while flushing and air scouring experiments in forward and reverse directions were performed in the field. In 42 experiments, average residual chlorine concentration and turbidity were improved after cleaning compared to before cleaning. It was found that even when the same cleaning method was used, further improvement of cleaning effect was possible by applying air injection and reverse direction cleaning techniques. By means of one-way ANOVA(Analysis of variance), it was also possible to statistically verify the need of actively utilizing air injection and reverse direction cleaning. Based on correlation between turbidity and TSS, the total amount of suspended solids removal was estimated for 874 flushing operations and 194 air scouring operations. The result showed that air scouring used more discharge water than flushing by an average of $4.9m^3$ yet with larger amounts of suspended solids removal by an average of 145.9 g. The result of analysis on turbidity values from 887 flushing operations showed low cleaning effect of unidirectional flushing for the pipes with diameters over 300 mm. In addition, the turbidity values measured during cleaning showed an increasing tendency as pipe age increased. The methodology and results of this research are expected to contribute to the efficient maintenance and improvement of water quality in water distribution networks. Follow-up research involving the measurement of water quality at regular time intervals during cleaning would allow a more accurate comparison of discharge water quality characteristics and cleaning effects between different cleaning methods. To this end, it is considered necessary to develop a standardized manual that can be used in the field and to provide relevant trainings.

• Journal of Korean Society of Water and Wastewater
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• v.34 no.4
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• pp.267-276
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• 2020

In this study, air scouring cleaning was selected and applied among 5 small blocks (S1~S5) in domestic S cities to analyze the cleaning effect of particles causing discoloration. In order to identify the cleaning effect, 10 locations were selected as water quality investigation point, such as the stagnant or water mains ends. Removal of solids, variation of particle components, weight and concentration were analyzed. And the level of the cleanness of the surface inside water mains using endoscope was investigated. As a result of analysis, the solids discharged after cleaning were mainly sand and gravel, pieces related to pipe materials, and corrosion products. As a result of analyzing the concentrated particles of the filter before and after cleaning, it was found that the change in discoloration on the filter was large. In addition, as a result of comparing the weight and the concentration of the particles, it was found that the particles causing discoloration were significantly removed after cleaning. From the results of the endoscopy, it was confirmed that most of the precipitated and accumulated dark yellow discoloration matters inside water mains were removed through cleaning. Therefore, it seems that the particles causing discoloration in water decreased after cleaning. Therefore, it is expected that, if properly cleaning was applied, matters that cause discoloration can be removed from the water mains, and customer's complaints can also be reduced through water quality improvement.