• 설비공학논문집
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• 제22권10호
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• pp.697-703
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• 2010

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants from the outdoor air introduced into a clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is useful for reducing the outdoor air conditioning load required to maintain a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to cool or heat the outdoor air. In the present study, numerical analysis was conducted to evaluate the recovered heat of an exhaust air heat recovery type air washer system, which is the key part of an energy saving outdoor air conditioning system for semiconductor clean rooms. The present numerical results showed relatively good agreement with the available experimental data.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2008년도 하계학술발표대회 논문집
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• pp.844-849
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• 2008

In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. From the energy saving point of view, heat recovery is useful for the reduction of air conditioning energy consumption for clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. However, so far there have not been sufficient studies of analyzing the comparison of the amounts of energy consumption and saving. In the present study, an experiment was conducted to investigate the energy consumption and heat recovery of a fin-coil type air washer system for semiconductor manufacturing clean rooms.

• 청정기술
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• 제19권1호
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• pp.38-43
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• 2013

저등급 석탄의 건조 후 안정화하기 위한 방법으로 탄화수소의 기상흡착에 대한 연구를 수행하였다. 밀폐된 5 L의 데시케이터 용기에 건조 석탄과 안정화제를 넣고 주어진 온도에서 일정 시간 동안 유지시킨 후 석탄의 표면 특성과 자연발화 경향을 살펴보았다. 기상흡착 후 건조 석탄의 표면적은 미세기공을 중심으로 감소하였다. 흡착시간과 온도가 증가할수록 안정화 석탄의 자연발화 경향은 감소하는 것으로 나타났다. 안정화제의 종류에 따른 자연발화 경향은 큰 차이를 보이지 않았다. 분석 결과에 의하면 석탄의 0.5 wt% 이하인 소량 흡착으로 안정화 효과를 나타내는 것이 확인되었으며, 저온에서 기상흡착에 의한 안정화 현상은 저분자량의 탄화수소 흡착에 의한 것으로 나타났다.

• 한국방재학회:학술대회논문집
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• 한국방재학회 2007년도 정기총회 및 학술발표대회
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• pp.513-517
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• 2007

This study is to establish the appliance model for the automatic fire alarm system in clean room within the framework of the performance based design. Because of the environmental and dimensional characters of clean room, this space is exposed to fire and toxic damage, so it is very important to notify the occupants of these dangerous situations.

• 한국전기화학회:학술대회논문집
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• 한국전기화학회 2005년도 수소연료전지공동심포지움 2005논문집
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• pp.301-306
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• 2005

• 대한수학회보
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• 제48권4호
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• pp.759-767
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• 2011

An element of a ring is called strongly nil clean provided that it can be written as the sum of an idempotent and a nilpotent element that commute. A ring is strongly nil clean in case each of its elements is strongly nil clean. We investigate, in this article, the strongly nil cleanness of 2${\times}$2 matrices over local rings. For commutative local rings, we characterize strongly nil cleanness in terms of solvability of quadratic equations. The strongly nil cleanness of a single triangular matrix is studied as well.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.249-249
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• 2000

This paper introduces a clean mobile robot fur 4th generation LCD cassette, which is guided by optical sensor and position compensation using vision module. The mobile robot for LCD cassette transfer might be controlled by AGV controller which has powerful algorithms. It offers optimum routes to the destination of clean mobile robot by using dynamic dispatch algorithm and MAP data. This clean mobile robot is equipped with 4 axes fork type manipulator providing repeatability accuracy of $\pm$ 0.05mm.

• 청정기술
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• 제2권2호
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• pp.192-200
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• 1996

기계산업분야에 청정기술을 도입하여 적용시키기 위해서는 이를 위한 기본적인 전략이 수립되어야 한다. 이를 위해서 기계산업분야에서 배출되는 폐기물 및 오염물질을 그 발생방법에 따라 분류하는 한편 제품의 기획단계에서 부터 폐기되는 각 제품생산단계에서의 역할의 중요성을 반영하였다.

• 한국건축시공학회지
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• 제3권2호
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• pp.103-110
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• 2003

In the early 1990's the clean room system was a new trend of the operating room. This is the concept using in seminconductor plants. That is what the space around the operating table so clean as it remove contaminations with circulation of interior air. These articles describe the standard of interior construction and drawing details.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 B
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• pp.1171-1173
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• 2005

This paper presents a clean lifter design using a magnetic levitation system. Electromagnets are used as a levitation magnet attached to the clean lifter. The lateral forces are generated by the magnets so that non-contacting bearings are implemented. The clean lifter design specifications are suggested and the overall system is described.