Numerical Analysis on Energy Reduction of an Exhaust-Air-Heat-Recovery Type Air Washer System for Semiconductor Manufacturing Clean Rooms
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Song, Gen-Soo
(Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH))
Kim, Hyung-Tae (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) Yoo, Kyung-Hoon (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) Son, Seung-Woo (Sunglim PS Co.) Shin, Dae-Kun (Daehan PNC Co.) Kim, Young-Il (School of Architecture, Seoul National University of Technology) |
1 | Song, G. S., Yoo, K. H., Kang, S. Y. and Son, S. W., 2009, An experimental study on energy reduction of an exhaust air heat recovery type outdoor air conditioning system for semiconductor manufacturing clean rooms, Korean Journal of Air-Conditioning and Refrigeration Engineering, Vol. 21, No. 5, pp. 273-281. 과학기술학회마을 |
2 | Japan Air Cleaning Association Energy saving technical committee, 2007, The energy conversion factors for a semiconductor factory, Journal of Japan Air Cleaning Association,Vol. 46, No. 6, pp. 16-28 (in Japanese). |
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4 | Song, G. H., Yoo K. H. and Son, S. W., 2008, A study on ammonia removal performance improvement of an air washer for semiconductor manufacturing clean rooms, Journal of Korean Society for Indoor Environment, Vol. 5, No. 2, pp. 151-157. |
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6 | Yamamoto H., Katsuki, T., Fujisawa, S., Yosa, K., Nishiwaki, S., Nabeshima, Y. and Oda, H., 2003, Removal of gaseous chemical contaminants as well as heat recovery by air washer (Part 3), Proc. of the 21st Annual Technical Meeting on Air Cleaning and Contamination Control, pp. 151-154 (in Japanese). |
7 | Hu, S. C., Wu, J. S., Chan, D. Y. L., Hsu, R. T. C. and Lee, J. C. C., 2008, Power consumption benchmark for a semiconductor cleanroom facility system, Energy and Buildings, Vol. 40, pp. 1765-1770. DOI ScienceOn |
8 | Yamamoto, H., Katsuki, T., Fujisawa, S., Moriya, M., Nabeshima, Y. and Oda, H., 2002, Removal of gaseous contaminants by air washer and development of a heat recovery system, Technical Report, Seiken Company, Osaka, Japan, Vol. 2 pp. 19-30 (in Japanese). |
9 | Tsao, J. M., Hu, S. C., Chan, D. Y. L., Hsu, R. T. C. and Lee, J. C. C., 2008, Saving energy in the make-up air unit(MAU) for semiconductor clean rooms in subtropical areas, Energy and Buildings, Vol. 40, pp. 1387-1393. DOI ScienceOn |
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