• Journal of Institute of Control, Robotics and Systems
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• v.21 no.9
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• pp.875-880
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• 2015

Traditional semiconductor process control has been performed through statistical process control techniques in a constant process-recipe conditions. However, the complexity of the interior of the etching apparatus plasma physics, quantitative modeling of process conditions due to the many difficult features constraints apply simple SISO control scheme. The introduction of the Advanced Process Control (APC) as a way to overcome the limits has been using the APC process control methodology run-to-run, wafer-to-wafer, or the yield of the semiconductor manufacturing process to the real-time process control, performance, it is possible to improve production. In addition, it is possible to establish a hierarchical structure of the process control made by the process control unit and associated algorithms and etching apparatus, the process unit, the overall process. In this study, the research focused on the methodology and monitoring improvements in performance needed to consider the process management of future developments in the semiconductor manufacturing process in accordance with the age of the APC analysis in real applications of the semiconductor manufacturing process and process fault diagnosis and control techniques in progress.

• International Journal of Control, Automation, and Systems
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• v.5 no.5
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• pp.508-514
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• 2007

Properties and potential applications of the block pulse response circulant matrix (PRCM) and its singular value decomposition (SVD) are investigated in relation to MIMO control and identification. The SVD of the PRCM is found to provide complete directional as well as frequency decomposition of a MIMO system in a real matrix form. Three examples were considered: design of MIMO FIR controller, design of robust reduced-order model predictive controller, and input design for MIMO identification. The examples manifested the effectiveness and usefulness of the PRCM in the design of MIMO control and identification. irculant matrix, SVD, MIMO control, identification.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.945-949
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• 2004

These days there are so many scheduling systems or softwares. But only few scheduling systems have succeeded in the market. In spite of powerful engine and functions, those systems have difficulties to be applied in real processes. In real processes, there are various constraints caused by physical or systematical environments of plants. Those constraints are too many to be handled in the system. This problem makes it difficult for the system to represent the details of processes. In order to resolve this problem, we have developed a specialized scheduling system for a target process. The system could be developed by the experts for target process and researchers for scheduling. In this study, a scheduling system for PVC process has been developed as an MILP (Mixed integer linear programming) model and coded in $Fortran^{TM}$. The scheduling system has been applied to two processes, which have different characteristics. Simulation results indicate that the profit of the target process can be increased by about 5% by implementing the scheduling system.

• Proceedings of the Korean Society of Plant Pathology Conference
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• 2003.10a
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• pp.15-18
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• 2003

Contemporary biological control system includes the use of fungi to control weeds in agricultural ecosystems and forests. Fungal pathogens of weeds that are highly virulent and specific to target weeds, and able to be produced massively by artificial culture could be applied like chemical herbicides over the weeds.(중략)

• Current Research on Agriculture and Life Sciences
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• v.9
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• pp.11-20
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• 1991

This study was performed to avoid the chemical spraying environment condition during spraying operation for operator's safety through the development of a remote controlled speed sprayer. The summerized results of this study are as followings. 1. The developed VHF electric wave remote controlling system which could operate sixteen type of operation conditions with the circuit channels of 234 was highly adaptable to speed sprayer for the remote control. 2. The commerical wireless telephones adapted the DTMF type electric wave remote control system need not the tranceiver. 3. The wireless electric wave remote control system combined with one-chip microcomputer, which are low cost with compact in size, could be adaptable to the remote control of the speed sprayer for the wheel steering and speed control system, and to the remote control chemical application system.

• 제어로봇시스템학회:학술대회논문집
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• 1998.10a
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• pp.461-467
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• 1998

In spite of significant nonlinearities even in the simplest model, some types of steady-state and dynamic behavior common for nonlinear systems have never been associated with distillation columns. In recent years, multiplicity of steady states has been a subject of much research and is now widely accepted. Subsequently, stability of steady states has been explored. Another phenomenon that. although widely observed in chemical reactors, has not been associated with models of distillation columns is the existence of periodic oscillations. In this article we study the steady-state and dynamic behavior of the azeotropic distillation of the ternary homogeneous system methanol-methyl butyrate-toluene. Our simulations reveal nonlinear behavior not reported in earlier studies. Under certain conditions, the open-loop distillation system shows a sustained oscillation associated with branching to periodic solutions. The limit cycles are accompanied by traveling waves inside the column. Significant underdamped oscillations are also observed over a wide range of product rates.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.15 no.5
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• pp.198-201
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• 2005

Carbon nanofibers were formed on silicon substrate which was applied by negative direct current (DC) bias voltage using microwave plasma-enhanced chemical vapor deposition method. Formation of carbon nanofibers were varied according to the variation of the applied bias voltage. At -250 V, we found that the growth direction of carbon nanofibers followed the applied direction of the bias voltage. Based on these results, we suggest one of the possible techniques to control the growth direction of the carbon nanofibers.

• Korean Chemical Engineering Research
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• v.50 no.4
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• pp.733-737
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• 2012

This study reports the microfluidic preparation of monodisperse multiple emulsions using hydrodynamic control. To generate multiple emulsions, we fabricate a microfluidic capillary device based on co-flowing stream without any surface modification of microchannels. Based on the system, we can successfully generate multiple emulsions (W/O/W) using water containing 0.5 wt% Tween 20, n-hexadecane with 5 wt% Span 80, and 10 wt% poly (vinyl alcohol) (PVA) aqueous solution, respectively. Furthermore, we control the number of inner droplets by modulation of flow rate of inner fluid at fixed flow rate of middle and outer fluid. The multiple emulsions having precisely controlled inner droplets' size and number can be applicable for multiple chemical reactions as an isolated microreactor.

• Journal of Biosystems Engineering
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• v.22 no.2
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• pp.151-162
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• 1997

Chemical application is one of the most important field operation in rice production. Rolling of a boom due to local unevenness and softness in fields causes a local under/over-application of spray. In this study, the vertical movement of boom tips due to unevenness of ground in paddy fields was investigated, and an active pendulum suspension control system was designed and tested for compensating the movement and balancing the boom to the ground. The results for testing the performance of the control system showed that the system could balance the boom both in flat and inclined fields. The active pendulum control system developed in this study could be properly used for improving spraying performance of a boom sprayer.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 1996.10a
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• pp.111-114
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• 1996

Hydroponics is to grow plants, not in soil but in water which the quantity of necessary chemical food can be controlled. In this paper, this is designed in the automatic system. The closed culture reduces cost of production and produces a many kinds of agricultural products in a confined place. An adaptive fuzzy control in the best method to solve and to overcome parametric uncertainties and non-linearity of the controlled system. A hydroponics automation system which is able to overcome these control problems. It is used in implementation of the hydroponics automation system. The performance is analyzed through an experiment in which the new adaptive fuzzy control method is applied to the automatic control of tomato hydroponics.