• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1818-1820
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• 1999

This paper presents direct ${\mu}c$-Si:H thin film growth on the glass substrates using RPCVD system (remote plasma chemical vapor deposition) in low temperature. Hydrogenated micro-crystalline silicon deposited by RPCVD system in low temperature is very useful material for photovoltaic devices, sensor applications, and TFTs (thin film transistors). Varying the deposition conditions such as substrate temperature, gas flow rate, reactive gas ratio $(SiH_4/H_2)$, total chamber pressure, and rf power, we deposited ${\mu}c$-Si:H thin films on the glass substrates (Corning glass 1737). And then we measured the structural and electrical properties of the films.

• Transactions on Electrical and Electronic Materials
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• v.16 no.2
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• pp.78-81
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• 2015

Pure ZnO and ZnO nanowires doped with 3 wt.% Ga (‘3GZO’) were grown by pulsed laser deposition in a furnace system. The doping of Ga in ZnO nanowires was analyzed by observing the optical and chemical properties of the doped nanowires. The diameter and length of nanowires were under 200 nm and several ${\mu}m$, respectively. Changes of significant resistance were observed and the sensitivities of ZnO and 3GZO nanowires were compared. The sensitivities of ZnO and 3GZO nanowire sensors measured at 300℃ for 1 ppm of ethanol gas were 97% and 48%, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.05a
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• pp.166-169
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• 1996

It is well known that the metallo-phthalocyanines (MPcs) are sensitive to toxic gaseous molecules such as NO$_2$ and also chemically and thermally stable and it is recently reported that SnO$_2$ thin films have a selective sensitivity to NO$_2$ and SO$_2$ gas. Therefore, it is interesting to prepare phthalo-cyanine Langmuir-Boldgett(LB) films containing tin as a chemical sensor for NO$_2$ and SO$_2$ gas and test the selectivity with these tin containing LB films. First, in this study, ultra thin films of Octa (2-ethylhexyloxy) tin-phthalocyanine were prepared on various substrates by LB method. $\pi$-A isotherm and transfer characteristics of these films were investigated. The formation of these films was determined by ellipsometry. Intrinsic current-voltage(I-V) characteristics of these films were also measured.

• Korean Chemical Engineering Research
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• v.47 no.3
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• pp.321-326
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• 2009

A simple measuring device is proposed, and its performance is examined in an adsorption process separating a gas mixture. The sensor is made of a quartz crystal resonator and solid adsorbent to detect the target component. Micro-particle carbon cryogel(MCC) is utilized as the adsorbent, and the gas mixture of air and i-butane are separated in a column containing bamboo activated carbon. Two devices are placed at the inlet and outlet of the column. The measurements are compared with those of GC outcome to prove the measurements are effective. The experimentally proved system is simple and capable to be implemented in an in-line system with on-line measurement.

• Bulletin of the Korean Chemical Society
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• v.33 no.10
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• pp.3368-3372
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• 2012

The $Bi_2O_3$ nanowires are highly sensitive to low concentrations of $NO_2$ in ambient air and are almost insensitive to most other common gases. However, it still remains a challenge to enhance their sensing performance and detection limit. This study examined the influence of the encapsulation of ${\beta}-Bi_2O_3$ nanorods with $In_2O_3$ on the $NO_2$ gas sensing properties. ${\beta}-Bi_2O_3-core/In_2O_3-shell$ nanorods were fabricated by a two-step process comprising the thermal evaporation of $Bi_2O_3$ powders and sputter-deposition of $In_2O_3$. Multiple networked ${\beta}-Bi_2O_3-core/In_2O_3-shell$ nanorod sensors showed the responses of 12-156% at 1-5 ppm $NO_2$ at $300^{\circ}C$. These response values were 1.3-2.7 times larger than those of bare ${\beta}-Bi_2O_3$ nanorod sensors at 1-5 ppm $NO_2$. The enhancement in the response of ${\beta}-Bi_2O_3$ nanorods to $NO_2$ gas by the encapsulation by $In_2O_3$ can be accounted for based on the space-charge model.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.16.1-16.1
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• 2011

$TiO_2$ is a promising material for gas sensors. To achieve high sensitivities, the material should exhibit a large surface-to-volume ratio and possess the high accessibility of the gas molecules to the surface. Accordingly, a wide variety of porous $TiO_2$ nanomaterials synthesized by wet-chemical methods have been reported for gas sensor applications. Nonetheless, achieving the large-area uniformity and comparability with well-established semiconductor production processes of the methods is still challenging. An alternative method is soft-templating which utilizes nanostructured inorganic or organic materials as sacrificial templates for the preparation of porous materials. Fabrication of macroporous $TiO_2$ films and hollow $TiO_2$ tubes by soft-templating and their gas sensing applications have been reported recently. In these porous materials composed of assemblies of individual micro/nanostructures, the form of links or necks between individual micro/nanostructures is a critical factor to determine gas sensing properties of the material. However, a systematic study to clarify the role of links between individual micro/nanostructures in gas sensing properties of a porous metal oxide matrix is thoroughly lacking. In this work, we have demonstrated a fabrication method to prepare highly-ordered, embossed $TiO_2$ films composed of anatase $TiO_2$ hollow hemispheres via soft-templating using polystyrene beads. The form of links between hollow hemispheres could be controlled by $O_2$ plasma etching on the bead templates. This approach reveals the strong correlation of gas sensitivity with the form of the links. Our experimental results highlight that not only the surface-to-volume ratio of an ensemble material composed of individual micro/nanostructures but also the links between individual micro/nanostructures play a critical role in evaluating the sensing properties of the material. In addition to this general finding, the facileness, large-scale productivity, and compatability with semiconductor production process of the proposed fabrication method promise applications of the embossed $TiO_2$ films to high-quality sensors.

• Journal of the Korean institute of surface engineering
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• v.50 no.4
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• pp.289-295
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• 2017

Detection of $CO_2$ gas in both indoor and outdoor atmospheres is now becoming an important issue because of greenhouse effect and climate crisis. In this study, gas sensors based on $SnO_2-Cr_2O_3$ composite nanofibers were fabricated by the electrospinning method to detect $CO_2$ gas. The gas sensors showed a response to ppm level of $CO_2$ gas from room temperature to $200^{\circ}C$ while the highest response was observed at $150^{\circ}C$. The gas response is enhanced by the catalytic property of $Cr_2O_3$. Selective $CO_2$ detection is obtained through the chemical reaction of $Cr_2O_3$ to chromium carbonate. All the results suggest the $SnO_2-Cr_2O_3$ composite material is promising for the use of $CO_2$ gas sensors.

• Korean Journal of Hazardous Materials
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• v.3 no.1
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• pp.28-36
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• 2015

In early 2011, the Fukushima nuclear power plant had greater damage due to earthquake in Japan, and the awareness of safety has increased. In particular, special response systems should be required to handle disaster situations in plant sites which are likely to occur for large disasters. In this study, a program is designed to set up optimum escape routes, by a smart phone application, when a disaster situation occurs. This program could get information of the cumulative damage from sensors and display the escape route of the smallest damage in real-time on the screen. Utilizing our application in real-time evacuation has advantage in reducing cumulative damage. The optimal evacuation route, focusing on horizontal path, is calculated based on getting the data of fire, detected radioactivity and hazardous gas. Thus, using our application provides information of optimal evacuation to people who even can not hear sensor alarms or do not know geography, without requiring additional costs except fixed sensors or server network deployment cost. As a result, being informed of real-time escape route, the user could behave rapidly with suitable response to individual situation resulting in improved evacuation than simply reacting to existing warning alarms.

• Journal of the Korean Institute of Gas
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• v.25 no.3
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• pp.27-38
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• 2021

We devised the system to automatically shutdown the boiler and to fundamentally block the harmful gases, including carbon monoxide, into the indoor when the exhaust system swerves: (1) The discharge pressure of the exhaust gas decreases when the exhaust pipe is disconnected. The monitoring system of the exhaust pipe is implemented by measuring the output voltage of APS(Air Pressure Sensor) installed to control the amount of combustion air. (2) The operating software was modified so that when the system recognizes the fault condition of a flue pipe, the boiler control unit displays the fault status on the indoor regulator while shutting down the boiler. In accordance with the ventilation facility standards in the "Rules for Building Equipment Standards" by the Ministry of Land, Infrastructure and Transport, experiments were conducted to ventilate indoor air. When carbon monoxide leaked in worst-case scenario, it was possible to prevent poisoning accidents. However, since 2013, the number of indoor air exchange times has been mitigated from 0.7 to 0.5 times per hour. We observed the concentration exceeding TWA 30 ppm occasionally and thus recommend to reinforce this criterion. In conclusion, if the flue pipe fault detection and the indoor air ventilation system are introduced, carbon monoxide poisoning accidents are expected to decrease significantly. Also when the manufacturing and inspection steps, the correct installation and repair are supplemented with the user's attention in missing flue, it will be served to prevent human casualties from carbon monoxide poisoning.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.5
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• pp.335-340
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• 2013

In this study, the plasma etching of the TaN thin film with $CH_4/BCl_3/Ar$ gas chemistries was investigated. The etch rate of the TaN thin film and the etch selectivity of TaN to $SiO_2$ was studied as a function of the process parameters, including the amount of $CH_4$. X-ray photoelectron spectroscopy (XPS) and Field-emission scanning electron microscopy (FE-SEM) was used to investigate the chemical states of the surface of the TaN thin film.