A Study on the Surface of the Dry Etched TaN Thin Film by Adding The CH4 Gas in BCl3/Ar Inductively Coupled Plasma |
Woo, Jong-Chang
(Nano Convergence Sensor Research Section, Electronics and Telecommunications Research Institute)
Choi, Chang-Auck (Nano Convergence Sensor Research Section, Electronics and Telecommunications Research Institute) Yang, Woo-Seok (Nano Convergence Sensor Research Section, Electronics and Telecommunications Research Institute) Joo, Young-Hee (School of Electrical and Electronics Engineering, Chung-Ang University) Kang, Pil-Seung (School of Electrical and Electronics Engineering, Chung-Ang University) Chun, Yoon-Soo (School of Electrical and Electronics Engineering, Chung-Ang University) Kim, Chang-Il (School of Electrical and Electronics Engineering, Chung-Ang University) |
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