• 제목/요약/키워드: Ceramic deposition

검색결과 735건 처리시간 0.029초

MgO 완충층을 이용한 Si 기판상 강유전체 $BaTiO_3$ 박막의 제조 (Preparation of Ferroelectric $BaTiO_3$ Thin Films on MgO-Buffered Si Substrates)

  • 김상섭
    • 한국세라믹학회지
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    • 제34권4호
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    • pp.373-379
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    • 1997
  • A study on the deposition and characterization of BaTiO3 thin films on MgO-buffered Si(100) substrates by sputtering was conducted. The MgO buffer layers were investigated as a function of deposition temperature. At lower substrate temperature, the MgO layers were not fully crystalline, but a crystallized MgO layer with (001) preferred orientation was obtained at the substrate temperature of $700^{\circ}C$. Partially (00ι) or (h00) textured BaTiO3 films were obtained on Si(100) with the MgO buffer layer grown at 700ι. While, randomly oriented BaTiO3 films with large-scale cracks on the surface were made without the MgO layer. The crystallographic orientation, morphology and electrical properties between the BaTiO3 films on Si with and without the MgO layer were compared using the BaTiO3 film on MgO(100) single crystal substrate as a reference system. Also the favorable role of the MgO layer as a buffer for growing of oriented BaTiO3 films on Si substrates was confirmed.

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Ti-6Al-7Nb and Ti-6Al-4V 합금의 생체활성에 미치는 콜라겐 처리의 영향 (Effect of Collagen Treatment on Bioactivity of Ti-6Al- 7Nb and Ti-6Al-4V Alloys)

  • 김태호;이갑호;홍순익
    • 한국세라믹학회지
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    • 제45권10호
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    • pp.638-643
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    • 2008
  • Biomimetic apatite formation and deposition behaviors of Ti-6Al-7Nb and Ti-6Al-4V plates in simulated body fluids(SBF) under various conditions were examined. In case of regular samples without collagen treatments the weight gain due to apatite precipitation on the surface in Ti-6Al-4V was found to be higher than in Ti-6Al-7Nb. In case of collagen-coated samples, the weight gain in Ti-6Al-4V continued to be higher than in Ti-6Al-7Nb, but the difference between the two became smaller. Both Ti-6Al-7Nb and Ti-6Al-4V samples with collagen coating exhibited an appreciable increase of weight gain, which may be caused by the interaction between collagen and $Ca^{+2}$ ions. The weight gain was found to be not much affected by the addition of collagen to SBF. The ill-defined granular structure in the presence of collagen can be associated with the increasing volume fraction of amorphous calcium phosphate.

액상소결 시의 β-SiC의 입자성장 방지 (Prevention of Grain Growth during the Liquid-Phase Assisted Sintering of β-SiC)

  • 길건영;노비얀토 알피안;한영환;윤당혁
    • 한국세라믹학회지
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    • 제47권6호
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    • pp.485-490
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    • 2010
  • In our previous studies, continuous SiC fiber-reinforced SiC-matrix composites ($SiC_f$/SiC) had been fabricated by two different slurry infiltration methods: vacuum infiltration and electrophoretic deposition (EPD). 12 wt% of $Al_2O_3-Y_2O_3$-MgO with respect to SiC powder was used as additives for liquid-phase assisted sintering. After hot pressing at $1750^{\circ}C$ under 20 MPa for 2 h in Ar atmosphere, a high composite density could be achieved for both cases, whereas the problems such as large grain size and non-uniform distribution of liquid phase were observed, which was resulted in the relatively poor mechanical properties of composites. Therefore, efforts have been made to reduce the grain growth during the sintering, including the optimization for hot pressing condition and utilization of spark plasma sintering using a SiC monolith. Based on the results, spark plasma sintering was found to be effective method in decreasing the amount of sintering additive, time and grain growth, which will be explained in comparison to the results of hot pressing in this paper.

Preparation and Characterization of $BaTiO_3-CuFe_2O_4$ Bi-Layer Thin Films Prepared By Pulsed Laser Deposition

  • ;;;이희영
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.209-209
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    • 2010
  • Multiferroic properties of $BaTiO_3-CuFe_2O_4$ thin films grown on highly-textured Pt(111)/$TiO_2/SiO_2$/Si(100) substrates were studied. $CuFe_2O_4$ ceramic target was synthesized by mixing oxide powders of CuO, $Fe_2O_03$, $BaTiO_3$ ceramic target was also prepared separately. The film structure was of bi-layer type, where $BaTiO_3$ layer lies underneath of $CuFe_2O_4$ layer, where both layers were grown by pulsed laser deposition technique. We will report the ferroelectric and magnetic properties of $BaTiO_3-CuFe_2O_4$ bi-layer films in some detail.

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세라믹에 대한 수중 레이저 드릴링의 열영향 모델링 및 해석 (Modeling and Analysis of Thermal Effects of Underwater Laser Drilling for Ceramics)

  • 김택구;김주한
    • 한국정밀공학회지
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    • 제30권12호
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    • pp.1265-1271
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    • 2013
  • In this work, modeling and analysis of thermal effects laser drilling under water for ceramics were presented. Laser is a unique tool for machining ceramics due to the characteristic of non-contact material removal. However, ablation by a laser often induces a thermal effect on the material and an increased heat-affected-zone or deposition of debris can be observed on the machined parts. The underwater surrounding improved a heat transfer rate to cooling down the machined part and could prevent any deposition of debris near the machined surfaces and edges. The heat modeling was applied to obtain the temperature distributions as well as temperature gradients between the material and surroundings. The cooling effect of the underwater laser drilling was improved and a more stable temperature distribution was calculated. The actual laser drilling results of ceramic laser drilling were presented to verify the effects of underwater laser drilling.

MTS의 열분해를 이용한 $\beta$-SiC의 화학증착 및 Excess C 공급원의 영향 (Chemical Vapor Deposition of $\beta$-SiC by Pyrolysis of MTS and Effect of Excess C Sources)

  • 최병진;박병옥;김대룡
    • 한국세라믹학회지
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    • 제30권1호
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    • pp.46-54
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    • 1993
  • $\beta$-SiC was chemically vapor deposited by pyrolysis of MTS+H2 gas mixture. The experiments were conducted in the temperature range of 1100~150$0^{\circ}C$ with a r.f. induction furnace under atmospheric pressure. The IR, XRD, EDS and AES analysis revealed that the free Si was always codeposited with SiC below 140$0^{\circ}C$, regardless of the total flow rate and MTS concentration, whereas $\beta$-SiC single phase was deposited at 150$0^{\circ}C$. C3H8 or CH2Cl2 as an excess C sources, was supplied with MTS in order to obtain stoichiometric SiC at low temperature. With the addition of C3H8 or CH2Cl2, the deposition rate was increased and $\beta$-SiC single phase could be deposited even at temperature as low as 110$0^{\circ}C$. In the absence of C3H8 or CH2Cl2, the microhardness of the layer was quite low (

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펄스 도금법에 의한 메탄연료 직접 사용을 위한 Cu-Ni-YSZ SOFC 연료극 제조 및 특성평가 (Fabrication and Characterization of Cu-Ni- YSZ SOFC Anodes for Direct Utilization of Methane via Cu pulse plating)

  • 박언우;문환;이종진;현상훈
    • 한국세라믹학회지
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    • 제45권12호
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    • pp.807-814
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    • 2008
  • The Cu-Ni-YSZ cermet anodes for direct use of methane in solid oxide fuel cells have been fabricated by electroplating Cu into the porous Ni-YSZ cermet anode. The uniform distribution of Cu in the Ni-YSZ anode could be obtained via pulse electroplating in the aqueous solution mixture of $CuSO_4{\cdot}5H_{2}O$ and ${H_2}{SO_4}$ for 30 min with 0.05 A of average applied current. The power density ($0.17\;Wcm^{-2}$) of a single cell with a Cu-Ni-YSZ anode was shown to be slightly lower in methane at $700^{\circ}C$, compared with the power density ($0.28\;Wcm^{-2}$) of a single cell with a Ni-YSZ anode. However, the performance of the Ni-YSZ anode-supported single cell was abruptly degraded over 21 h because of carbon deposition, whereas the Cu-Ni-YSZ anode-supported single cell showed the enhanced durability upto 52 h.

열화학기상증착법에 의한 탄소나노소재의 합성 및 수소저장 특성 (Preparation of Carbon Nanomaterials by Thermal CVD and their Hydrogen Storage Properties)

  • 유형균;최원경;류호진;이병일
    • 한국세라믹학회지
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    • 제38권10호
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    • pp.867-870
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    • 2001
  • 지지촉매로 Ni-graphite를 사용하고 ${C_2}{H_2}$를 이용한 열화학기상증착법에 의하여 탄소나노소재를 합성하였다. 합성된 시편은 SEM, TEM, 라만 분광법으로 분석하였으며, 수소저장특성은 전기화학적인 방법에 의하여 평가하였다. 탄소나노소재 합성시 메카노케미컬 처리과정을 거친 시편이 거치지 않은 시편에 비하여 탄소나노튜브의 순도가 우수하였다. 한편, 탄소나노소재를 정제함에 따라 수소저장특성이 크게 향상되었다.

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ReMnO3(Re:Ho, Er) 박막의 강유전성에 미치는 열처리 공정의 영향 (Effects of Thermal Heat Treatment Process on the Ferroelectric Properties of ReMnO3 (Re:Ho, Er) Thin Films)

  • 김응수;채정훈
    • 한국세라믹학회지
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    • 제42권11호
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    • pp.763-769
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    • 2005
  • Ferroelectric $ReMnO_3$(Re:Ho, Er) thin films were deposited on Si(100) substrate by Metal-Organic Chemical Vapor Deposition (MOCVD). Crystallinity and electric properties of $ReMnO_3$(Re:Ho, Er) thin films were investigated as a function of thermal heat treatment process, CHP (Conventional Heat-treatment Process) and RTP (Rapid Thermal Process). $ReMnO_3$(Re:Ho, Er) thin films prepared by RTP showed higher c-axis preferred orientation and homogeneous surface roughness than those prepared by CHP. The remnant polarization of ferroelectric hysteresis loop of $ReMnO_3$(Re:Ho, Er) thin films was strongly dependent on the c­axis preferred orientation of hexagonal single phase, and the leakage current characteristics of thin films were dependent on the homogeneity of grain size as well as surface roughness of thin films.

탄소나노튜브 합성 및 전기적 특성에 미치는 촉매의 메카노케미컬 처리효과 (The Effect of Mechanochemical Treatment of the Catalyst in the Preparation of Carbon Nanotubes and their Electrical Properties)

  • 유형균;류호진;;이병일
    • 한국세라믹학회지
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    • 제38권12호
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    • pp.1110-1114
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    • 2001
  • 열화학기상증착법으로 탄소나노튜브를 합성할 때, 촉배전구체로 사용하는 Fe(NO$_3$)$_3$.9$H_2O$-Al(OH)$_3$혼합물을 믹서밀을 이용하여 혼합분쇄한 후, 이 혼합물을 사용하영 합성에 미치는 메카노케미컬 효과를 조사하였다. SEM과 TEM 관찰 결과, 분쇄된 촉매 위에서 합성된 탄소생성물이 미분쇄 촉매위에서 성장한 생성물에 비해 훨씬 균일했으며, 대부분의 생성물이 탄소나노튜브로서 존재하였다. 또한, 전류-전압 측정을 통해서, 분쇄 촉매에서의 생성물의 전계 방출 특성이 미분쇄 촉매에서보다 우수함을 확인하였다.

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