• 제목/요약/키워드: Ceramic deposition

검색결과 735건 처리시간 0.022초

Simultaneous growth of graphene and vertically aligned single-walled carbon nanotubes at low temperature by chemical vapor deposition

  • Hong, Suck Won;Kim, Kwang Ho;Jung, Hyun Kyung;Kim, Daesuk;Lee, Hyung Woo
    • Journal of Ceramic Processing Research
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    • 제13권spc1호
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    • pp.154-157
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    • 2012
  • We present the simultaneous growth of single-walled carbon nanotubes and graphene with the optimal conditions of the synthesizing parameters. The dense and vertically aligned SWNTs having the length of over 100 ㎛ was grown by 2 nm-thick Fe catalytic layer. From 650 ℃, the vertically well-grown SWNTs were obtained by increasing the temperature. The severallayered graphene was synthesized with the gas mixing ratio of 15 : 1(H2 : C2H2) at 650 ℃ and higher temperatures. With these optimal conditions, the vertically well-grown SWNTs and the several-layered graphene were synthesized simultaneously. The presence of SWNTs and the layer of graphene were verified by field emission scanning electron microscopy and high resolution transmission electron microscopy. From the result of this simultaneous synthesizing approach, the possibility of one step growth process of CNTs and grapheme could be verified.

Failure Mechanisms for Zirconia Based Thermal Barrier Coatings

  • Lee, Eui Y.;Kim, Jong H.
    • The Korean Journal of Ceramics
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    • 제4권4호
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    • pp.340-344
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    • 1998
  • Failure mechanisms were investigated for the two layer thermal barrier coatings consisting of NiCrAlY bond coat and $ZrO_2$-8wt.% $Y_2O_3$ ceramic coating during cyclic oxidation. $Al_2O_3$ developed at the ceramic coating/bond coat interface first, followed by the Cr/Ni rich oxides such as $NiCr_2O_4$ and $Ni(Al, Cr)_2O_4$ during cyclic oxidation. It was observed that the spalling of ceramic coatings took place primarily within the NiCrAlY bond coat oxidation products or at the interface between the bond coat oxidation products and zirconia based ceramic coating or the bond coat. It was also observed that the fracture within these oxidation products occurred with the formation of $Ni(Cr, Al)_2O_4$ spinel or Cr/Ni rich oxides. It was therefore concluded that the formation of these oxides was a life-limiting event for the thermal barrier coatings.

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알루미늄 합금표면에 코팅된 세라믹재의 마찰마멸 특성 (Friction and Wear at Ceramic Coated Surfaces of Aluminum Alloy)

  • 공호성;권오관;김형선
    • 대한기계학회논문집
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    • 제17권12호
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    • pp.3083-3093
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    • 1993
  • Friction and wear at ceramic coated surfaces of aluminum alloy were experimentally studied using a Ring-on-Block wear test machine. Ceramic materials coated on aluminum alloy surfaces were WC, CrC, $Al_{2}O_{3}$ by a plasma spray; and $Al_{2}O_{3}$,$Al_{2}SiO_{5}$, $Na_{2}B_{4}O_{7}$,$Na_{4}P_{2}O_{7}$, and $Al_{2}O_{3}-ZrO_{2}$ composite coating by an Anodic Spark Depositon. They were tested under the sliding wet contact and compared with aluminum alloys and steels. Test results showed that ceramic coated surfaces, in general, have better anti-wear property than those of aluminum alloys due to increase in the surface hardness ; however, they also showed higher coefficients of friction and changes in wear mechanisms, resulting in brittle fractures.

EB-PVD법으로 코팅된 Y2O3의 내플라즈마 특성 (Plasma Resistances of Yttria Deposited by EB-PVD Method)

  • 김대민;윤소영;김경범;김희식;오윤석;이성민
    • 한국세라믹학회지
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    • 제45권11호
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    • pp.707-712
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    • 2008
  • Plasma resistant nanocrystalline $Y_2O_3$ films were deposited on alumina substrates through the electron-beam PVD technique. Increasing substrate temperature to $600^{\circ}C$ resulted in the textured microstructures with significantly enhanced adhesion force of the coating to the substrate. During the exposure to fluorine plasma, erosion rate of the coated specimen was higher than that of a sintered yttria specimen, but significantly lower than that of a single crystalline alumina. Considering the adhesion and erosion behaviors observed in the coated specimen prepared at $600^{\circ}C$, the deposition technique appears effective in reducing contamination particles generated from the ceramic parts in the plasma environment.

Effects of Oxygen Pressure on the Crystallization Behavior and Electrical Properties of YMnO3 Thin Films

  • Cheon, Chae-Il;Yun, Kwi-Young;Kim, Jeong-Seog;Kim, Jin-Hyeok
    • 한국세라믹학회지
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    • 제40권4호
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    • pp.398-400
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    • 2003
  • The YMnO$_3$ thin films were prepared on platinized-silicon substrates by chemical solution deposition and annealed at 750 to 85$0^{\circ}C$ for 1 h under various oxygen pressures, from 2 mTorr to 760 Torr. Effects of annealing oxygen pressures on the crystallization behavior and electrical properties of YMnO$_3$ thin films were investigated. Crystallinity and c-axis preferred orientation of YMnO$_3$ thin film were improved by decreasing the oxygen pressure but were deteriorated at extremely low oxygen pressure, 2 mTorr. Leakage current density of the YMn03 thin film decreased as the oxygen pressure decreased. The film annealed at 80$0^{\circ}C$ under 2 Torr, which had the best crystallinity and the highest c-axis preferred orientation. showed the best-developed ferroelectric C-V hysteresis.

공기운반분무기용 세라믹 노즐의 미립화 성능 (The Atomization Performance of Ceramic Nozzles in Air Carrier Sprayer)

  • 박석호;노수영
    • Journal of Biosystems Engineering
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    • 제20권3호
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    • pp.236-244
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    • 1995
  • Droplet size is one of the important factors in the deposition and drift of agrichemical application. In this study, droplet size and its distribution of the three different sizes of ceramic hollow cone nozzles being used in the air carrier sprayer for apple production were investigated at the various nozzle pressures and the three air velocities. The Malvern particle size analyzer were used for the measurement of droplet size and its distribution. The important results emerged from th is study can be summarized as follows. 1. Discharged rate was increase with the increase of the nozzle diameter and pressure, amount of the difference was remarkable between the nozzle diameter of 1.0, 1.2 and 1.5 mm, but no difference were found between the diameter of 1.0 and 1.2 mm in the same nozzle pressure. 2. Mass median diameter were varied as 40~160 ${mu}m$ at the air velocity of 0 m/s, 70~140 ${mu}m$ of 15 m/s and 100~160 ${mu}m$ of 20 m/s 3. It appeared that the air velocity range of 15~20 m/s was desirable for both drift and deposition control in the given experimental conditions.

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유동층 화학기상증착법으로 제조된 TRISO 피복입자의 ZrC 층 미세구조와 경도에 미치는 증착온도의 영향 (Effect of Deposition Temperature on Microstructure and Hardness of ZrC Coating Layers of TRISO-Coated Particles Fabricated by the FBCVD Method)

  • 고명진;김대종;김원주;조문성;윤순길;박지연
    • 한국세라믹학회지
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    • 제50권1호
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    • pp.37-42
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    • 2013
  • Tristructural-isotropic (TRISO)-coated particles were fabricated by a fluidized-bed chemical vapor deposition (FBCVD) method for use in a very high temperature gas-cooled reactor (VHTR). ZrC as a constituent layer of TRISO coating layers was deposited by a chloride process using $ZrCl_4$ and $CH_4$ source gases in a temperature range of $1400^{\circ}C$ and $1550^{\circ}C$. The change in the microstructure of ZrC depending on the deposition temperature and its effect on the hardness were evaluated. As the deposition temperature increased to $1500^{\circ}C$, the grain size of the ZrC increased and the hardness of the ZrC decreased according to the Hall-Petch relationship. However, at $1550^{\circ}C$, the ZrC layer was highly non-stoichiometric and carbon-rich and did not obey the Hall-Petch relationship in spite of the decrease of the grain size. A considerable amount of pyrolytic carbon at the grain boundaries of the ZrC as well as coarse granular pyrolytic carbon were locally distributed in the ZrC layer deposited at $1550^{\circ}C$. Therefore, the hardness decreased largely due to the formation of a large amount of pyrolytic carbon in the ZrC layer.

Influence of Deposition Method on Refractive Index of SiO2 and TiO2 Thin Films for Anti-reflective Multilayers

  • Song, Myung-Keun;Yang, Woo-Seok;Kwon, Soon-Woo;Song, Yo-Seung;Cho, Nam-Ihn;Lee, Deuk-Yong
    • 한국세라믹학회지
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    • 제45권9호
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    • pp.524-530
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    • 2008
  • Anti-Reflective (AR) thin film coatings of $SiO_2$ (n= 1.48) and $TiO_2$ (n=2.17) were deposited by ion-beam assisted deposition (IBAD) with End-Hall ion source and conventional electron beam (e-beam) evaporation to investigate the effect of deposition method on the refractive indicies (n) of the fIlms. Green-light generation using a GaAs laser diode was achieved via excitation of the second harmonic. The latter resulted from the transmission of the fundamental guided-mode wave of 1064 nm through periodically poled $LiNbO_3$. Large differences in the refractive indicies of each of the layers in the multilayer coating may improve AR performance. IBAD of $SiO_2$ reduced its refractive index from 1.45 to 1.34 at 1064 nm. Conversely, e-beam evaporation of $TiO_2$ increased its refractive index from 1.80 to 2.11. In addition, no fluctuations in absorption at the wavelength of 1064 nm were found. The results suggest that films prepared by different deposition methods can increase the effectiveness of multilayer AR coatings.

금속유기 화학증착법으로 증착시킨 $RuO_2$박막의 성장에 미치는 증착온도와 산소의 영향 (Effect of Deposition Temperature and Oxygen on the Growth of $RuO_2$ Thin Films Deposited by Metalorganic Chemical Vapor Deposition)

  • 신웅철;윤순길
    • 한국세라믹학회지
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    • 제34권3호
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    • pp.241-248
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    • 1997
  • RuO2 박막은 SiO2(1000$\AA$)Si와 MgO(100) 단결정 위에 낮은 증착온도에서 hot-wall MOCVD법으로 증착시켰다. 그리고 박막의 특성에 미치는 공정변수의 영향을 고찰하였다. 25$0^{\circ}C$의 비교적 낮은 온도에서부터 RuO2의 단일상을 얻었으며 SiO2(1000$\AA$)Si위에 증착된 RuO2박막은 무질서한 배향을 보이는 반면 MgO(100)단결정 위에 증착시킨 RuO2박막의 경우에는 (hk0) 배향성을 보이는 것을 관찰하였다. 증착온도가 증가함에 따라 RuO2박막의 결정성은 증가하였고 전기적 비저항은 감소하였다. O2유량이 감소함에 따라 RuO2박막의 비저항은 감소하였으며, 증착온도 35$0^{\circ}C$, O2 유량 50sccm에서 증착된 두께 2600$\AA$-RuO2박막의 비저항은 52.7$\mu$$\Omega$-cm이었으며 이는 고 유전물질의 하부전극으로 이용하기에 적합하다.

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입력기체비를 이용한 미세구조 변화로부터 화학증착 탄화규소의 복층구조 제작 (Fabrication of CVD SiC Double Layer Structure from the Microstructural Change Through Input Gas Ratio)

  • 오정환;왕채현;최두진;송휴섭
    • 한국세라믹학회지
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    • 제36권9호
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    • pp.937-945
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    • 1999
  • 반응결합 탄화규소(RBSC) 반응관을 보호하기 위하여, 반응결합 탄화규소 기판 위에 탄화규소를 1~10 범위의 입력기체비(${\alpha}=P_{H2}/P_{MTS}=Q_{H2}/Q_{MTS}$)와 1050~1300$^{\circ}C$범위의 증착온도에서 methyltrichlorosilane(MTS)로부터 수소분위기에서 저압화학기상법으로 증착하였다. 1250$^{\circ}C$의 증착온도에서 입력기체비가 감소함에 따라 증착속도는 증가하다가 감소하였다 입력기체비가 높을 때에는 (111) 우선배향성을 나타내고 과립형의 미세구조를 보이며, 입력기체비가 작을 경우에는 (220) 우선배향성을 가지는 마면주상의 미세구조가 관찰되었다. 증착온도가 증가함에 따라 입력기체비와 비슷하게 미세구조의 변화하는결과를 얻었으며, 이러한 결과는 증착기구의 변화와 밀접한 관련이 있다. 일정한 증착온도에서 입력기체비의 조정를 통하여 얻었으며, 이러한 결과는 증착기구의 변화와 밀접한 관련이 있다. 일정한 증착온도에서 입력기체비의 조절을 통하여 과립형과 미면주상의 미세구조를 함께 가지는 복층구조를 연속공정을 통하여 성공적으로 제조하였다.

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