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http://dx.doi.org/10.4191/KCERS.2008.45.9.524

Influence of Deposition Method on Refractive Index of SiO2 and TiO2 Thin Films for Anti-reflective Multilayers  

Song, Myung-Keun (Department of Materials Engineering, Korea Aerospace University)
Yang, Woo-Seok (Nano Bio-photonics Team, Korea Electronics Technology Institute)
Kwon, Soon-Woo (Department of Advanced Materials Engineering, Sungkyunkwan University)
Song, Yo-Seung (Department of Materials Engineering, Korea Aerospace University)
Cho, Nam-Ihn (Department of Electronic Engineering, Sun Moon University)
Lee, Deuk-Yong (Department of Materials Engineering, Daelim College of Technology)
Publication Information
Journal of the Korean Ceramic Society / v.45, no.9, 2008 , pp. 524-530 More about this Journal
Abstract
Anti-Reflective (AR) thin film coatings of $SiO_2$ (n= 1.48) and $TiO_2$ (n=2.17) were deposited by ion-beam assisted deposition (IBAD) with End-Hall ion source and conventional electron beam (e-beam) evaporation to investigate the effect of deposition method on the refractive indicies (n) of the fIlms. Green-light generation using a GaAs laser diode was achieved via excitation of the second harmonic. The latter resulted from the transmission of the fundamental guided-mode wave of 1064 nm through periodically poled $LiNbO_3$. Large differences in the refractive indicies of each of the layers in the multilayer coating may improve AR performance. IBAD of $SiO_2$ reduced its refractive index from 1.45 to 1.34 at 1064 nm. Conversely, e-beam evaporation of $TiO_2$ increased its refractive index from 1.80 to 2.11. In addition, no fluctuations in absorption at the wavelength of 1064 nm were found. The results suggest that films prepared by different deposition methods can increase the effectiveness of multilayer AR coatings.
Keywords
$SiO_2$$TiO_2$; Anti-reflective (AR) coatings; Refractive index (n); electron-beam evaporation; IBAD (Ion Beam Assisted Deposition);
Citations & Related Records

Times Cited By SCOPUS : 2
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