• Journal of the Korean institute of surface engineering
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• v.54 no.6
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• pp.365-370
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• 2021

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y₂O₃ coated parts used for semiconductor and display plasma process equipment. CF₄, O₂, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y₂O₃ was exposed to CF₄ plasma, the surface changed from Y₂O₃ to YF₃ and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF₃ layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

• Journal of the Korean Electrochemical Society
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• v.17 no.1
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• pp.57-64
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• 2014

Carbon electrodes for capacitive deionization were fabricated through mixing two different carbon powders (activated carbon powder, carbon black) with different particle sizes to investigate physical or electrochemical properties and finally desalination performances of the electrodes with various compositions of two carbon powders in weight and were compared with the electrode consisting of activated carbon. As a result, the electrode structure became more packed as increasing the amount of carbon black and resulted in 10% increase in mesopore fraction. The specific capacitance obtained from cyclic voltammograms of various electrodes showed that the electrode containing carbon black only had 107.4 F/g, while the specific capacitance of the electrode having more amount of carbon black increased and was higher than the one having no carbon black. The results of desalination runs in a capacitive deionization cell exhibited that the electrode having the highest amount of carbon black (1 wt%) in this study had the highest desalting efficiency, and no significant pH variation was observed during the runs. It was analyzed using accumulated charge that the fraction of non-Faraday current increased as the amount of carbon black increased in the electrodes. It can be concluded that the addition of carbon black changed the electrode structure resulting in an increase in the fraction of mesopore and finally enhanced the desalting efficiency by decreasing Faraday current.

• Journal of Korean Society for Atmospheric Environment
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• v.24 no.5
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• pp.594-603
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• 2008

A single particle analytical technique, named low-Z particle electron probe X-ray microanalysis, was applied to characterize four samples collected at an underground shopping area connected to Dongdeamun subway station, in January and May 2006. Based on the analysis of their chemical compositions of the samples, many distinctive particle types are identified and the major chemical species are observed to be soil-derived particles, iron-containing particles. sulfates. nitrates, and carbonaceous particles. which are encountered both in coarse and fine fractions. Carbonaceous particles exist in carbon-rich and organic. Soil derived particles such as aluminosilicates, AlSi/C, $CaCO_3\;and\;SiO_2$ are more frequently encountered in spring samples than winter samples. Nitrate- and sulfate-con taming particles are more frequently encountered in winter samples, and those nitrate- and sulfate-containing particles mostly exist in the chemical forms of $Ca(CO_3,\;NO_3),\;Ca(NO_3,\;SO_4),\;(Na,\;Mg)NO_3\;and\;(Mg,\;Na)(NO_3,\;SO_4)$. Fe-containing particles which came from nearby subway platform are in the range of about 10% relative abundances for all the samples. It is observed that nitrate- and sulfate-containing particles and carbonaceous particles are much more frequently encountered in indoor aerosol samples than in outdoor aerosols, implying that $NO_x,\;SO_x$, and VOCs at the underground shopping area were more partitioned into aerosol phase.

• Particle and aerosol research
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• v.8 no.4
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• pp.173-180
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• 2012

SiC particles, 8.3 ${\mu}m$ in volume average diameter, were chlorinated in an alumina tubular reactor, 2.4 cm in diameter and 32 cm in length, with reactor temperature varied from 100 to $1200^{\circ}C$. The flow rate of the gas admitted to the reactor was held constant at 300 cc/min, the mole fraction of chlorine in the gas at 0.1 and the reaction time at 4 h. The chlorination was negligibly small up to the temperature of $500^{\circ}C$. Thereafter, the degree of chlorination increased remarkably with increasing temperature until $900^{\circ}C$. As the temperature was increased further from 900 to $1200^{\circ}C$, the increments in chlorination degree were rather small. At $1200^{\circ}C$, the chlorination has nearly been completed. The surface area of the residual carbon varied with chlorination temperature in a manner similar to that with the variation of chlorination degree with temperature. The surface area at $1200^{\circ}C$ was 912 $m^{2}/g$. A simple model was developed to predict the conversion of a SiC under various conditions. A Langmuir-Hinshelwood type rate law with two rate constants was employed in the model. Assuming that the two rate constants, $k_{1}$ and $k_{2}$, can be expressed as $A_{1e}^{-E_{1}/RT}$ and $A_{2e}^{-E_{2}/RT}$, the four parameters, $A_{1}$, $E_{1}$, $A_{2}$, and $E_{2}$ were determined to be 32.0 m/min, 103,071 J/mol, 2.24 $m^{3}/mol$ and 39,526 J/mol, respectively, through regression to best fit experimental data.

• Journal of Energy Engineering
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• v.14 no.4 s.44
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• pp.268-276
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• 2005

Vacuum Residue (VR) combustion tests were carried out with a 20 kg/hr (fuel feed rate) small scale reactor. The nozzle used was a steam atomized, internal mixing type. Compared to heavy oil, vacuum residue used in this work is extremely high viscous and contains high percentages of sulfur, carbon residue and heavy metals. To ignite atomized VR particles, it was necessary to preheat the reactor, and it has been done with LP gas. The axial and radial gas temperature, major species concentrations and solid sample were analyzed when varying the fuel feed rate. The main reaction zone of atomized VR-air flame in a reactor was anticipated within about 1 m from the burner tip by considering the profiles oi gas temperature, species concentration and particle size measured along with the reactor. At downstream, the thermally, fully developed temperature distribution was obtained. SEM photographs revealed that VR carbon particles collected from the reactor are porous and have many blow-holes on the particle surface.

• Polymer(Korea)
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• v.34 no.6
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• pp.534-539
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• 2010

Polystyrene (PS)/multi-walled carbon nanotube (MWCNT) nanocomposites were prepared via latex technology and the effect of nanotube length on rheological properties were investigated. Monodisperse PS particle was synthesized by the emulsifier-free emulsion polymerization and two types of MWCNTs were used after surface modification to improve dispersion state and to remove impurities. Final nanocomposites were prepared by the freeze-drying process after dispersing the PS particles and the surface-modified MWCNTs in a ultrasonic bath. The effects of MWCNT content and nanotube length on rheological properties were evaluated by imposing the small-amplitude oscillatory shear flow. The PS/MWCNT nanocomposites showed that rheological properties were enhanced as the amount and length of MWCNT increased. It is speculated that the rheological characteristics of nanocomposites change from liquid-like to solid-like as the MWCNT amount increases, and the critical concentration to achieve network structure decreases as the nanotube length increases.

• Particle and aerosol research
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• v.9 no.3
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• pp.187-197
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• 2013

To understand the characteristics of organic aerosol(OA) at the background atmosphere of Korea, an observation of atmospheric PM10 was conducted at a Global Atmospheric Watch(GAW) station operated by the Korean Meteorological Administration at Anmyon Island during 2010. Various organic compounds were analyzed from 26 samples by using a gas chromatography-mass spectrometer. Water soluble organic carbon(WSOC) was also analyzed by using a total organic carbon(TOC) analyzer. Among 6 classes with 68 target compounds detected, the classes of n-alkanoic and alkenoic acids ($326.67{\pm}75.40ngm^{-3}$) and dicarboxylic acids ($323.74{\pm}361.89ngm^{-3}$) were found to be major compound classes in the atmosphere of Anmyon Island. Compared to the previous results reported for 2005 spring samples at Gosan site, the concentrations of organic compounds at Anmyon Island were 3-10 times higher than Gosan site due to the difference of location and sampling period. The concentrations of organic compounds were varied with the atmospheric conditions. Significant increase of the concentrations of dicarboxylic and carboxylic acids in the smog episode indicated that secondary oxidation of organic compounds was major factor to increase OA concentration during smog episode in the Anmyon Island. It was found that the compositions of the OA measured at Anmyon Island were dependent on the air parcel trajectories.

• Transactions of the Korean hydrogen and new energy society
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• v.14 no.1
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• pp.24-34
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• 2003

For gaseous fuel combustion with inherent $CO_2$ capture and low NOx emission, chemical-looping combustion may yield great advantages for the savings of energy to $CO_2$ separation and suppressing the effect on environment, In chemical-looping combustor, fuel is oxidized by metal oxide medium in a reduction reactor. Reduced particles are transported to oxidation reactor and oxidized by air and recycled to reduction reactor. The fuel and the air are never mixed, and the gases from reduction reactor, $CO_2$ and $H_2O$, leave the system as separate stream. The $H_2O$ can be easily separated by condensation and pure $CO_2$ is obtained without any loss of energy for separation. In this study, five oxygen carrier particles such as NiO/bentonite, NiO/YSZ, $(NiO+Fe_2O_3)VYSZ$, $NiO/NiAl_2O_4$, and $Co_{\chi}O_y/CoAl_2O_4$ were examined &om the viewpoints of reaction kinetics, oxygen transfer capacity, and carbon deposition characteristics. Among five oxygen particles, NiO/YSZ particle is superior in reaction rate, oxygen carrier capacity, and carbon deposition to other particles. However, at high temperature ($>900^{\circ}C$), NiO/bentonite particle also shows enough reactivity and oxygen carrier capacity to be applied in a practical system.

• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.5-10
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• 2010

Among a variety of cleaning processes, the cryogenic carbon dioxide ($CO_2$) cleaning has merits because it is highly efficient in removing very fine particles, innoxious to humans and does not produce residuals after the cleaning, which enables us to extend its area of coverage in the semi-conductor fabrication society. However, the cryogenic carbon dioxide cleaning method has some technical research issues in aspect to particles' adhesion and removal. To resolve these issues, performing an analysis for the identification of particle adhesion mechanism is needed. In this study, a research was performed by a theoretical approach. To this end, we extended the G-T (Greenwood-Tripp) model by applying the JKR (Johnson-Kendall-Roberts) and Lennard-Jones potential theories and the statistical characteristics of rough surface to investigate and identify the contact, adhesion and deformation mechanisms of soft or hard particles on the rough substrate. The statistical characteristics of the rough surface were taken into account through the employment of the normal probability distribution function of the asperity peaks on the substrate surface. The effects of surface roughness on the pull-off force for these particles were examined and discussed.

• Korean Chemical Engineering Research
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• v.47 no.3
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• pp.321-326
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• 2009

A simple measuring device is proposed, and its performance is examined in an adsorption process separating a gas mixture. The sensor is made of a quartz crystal resonator and solid adsorbent to detect the target component. Micro-particle carbon cryogel(MCC) is utilized as the adsorbent, and the gas mixture of air and i-butane are separated in a column containing bamboo activated carbon. Two devices are placed at the inlet and outlet of the column. The measurements are compared with those of GC outcome to prove the measurements are effective. The experimentally proved system is simple and capable to be implemented in an in-line system with on-line measurement.