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A Study of Minute Particles' Adhesion on a Rough Surface for a Cryogenic $CO_2$ Cleaning Process  

Seok, Jong-Won (School of Mechanical Engineering, Chung-Ang University)
Lee, Seong-Hoon (Graduate School of Mechanical Engineering, Chung-Ang University)
Kim, Pil-Kee (Graduate School of Mechanical Engineering, Chung-Ang University)
Publication Information
Journal of the Semiconductor & Display Technology / v.9, no.1, 2010 , pp. 5-10 More about this Journal
Abstract
Among a variety of cleaning processes, the cryogenic carbon dioxide ($CO_2$) cleaning has merits because it is highly efficient in removing very fine particles, innoxious to humans and does not produce residuals after the cleaning, which enables us to extend its area of coverage in the semi-conductor fabrication society. However, the cryogenic carbon dioxide cleaning method has some technical research issues in aspect to particles' adhesion and removal. To resolve these issues, performing an analysis for the identification of particle adhesion mechanism is needed. In this study, a research was performed by a theoretical approach. To this end, we extended the G-T (Greenwood-Tripp) model by applying the JKR (Johnson-Kendall-Roberts) and Lennard-Jones potential theories and the statistical characteristics of rough surface to investigate and identify the contact, adhesion and deformation mechanisms of soft or hard particles on the rough substrate. The statistical characteristics of the rough surface were taken into account through the employment of the normal probability distribution function of the asperity peaks on the substrate surface. The effects of surface roughness on the pull-off force for these particles were examined and discussed.
Keywords
Cryogenic carbon dioxide cleaning; Contact mechanism; Particle adhesion mechanism; Adhesion modeling; Rough surface; G-T model; JKR model; Lennard-Jones potential;
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1 U. C. Sung, C. N. Yoon, S. G. Kim, "Surface cleaning by ice-particle jet(II): preparation of contaminated surface and its cleaning," Korean J. of Chem. Eng, Vol. 14, No. 1, pp. 15-22. 1997.   DOI   ScienceOn
2 V. M. Muller, Y. S. Yushchenko, B. V. Derjaguin, "On the influence of molecular forces on the deformation of an elastic sphere and its sticking to a rigid plane," J. Colloid Interface Sci. Vol. 77, No. 1, pp. 91-101, 1980.   DOI   ScienceOn
3 Y. I. Rabinovich, J. J. Adler, A. Ata, R. K. Singh, B.M. Moudgil, "Adhesion between Nanoscale Rough Surfaces - II. Measurement and Comparison with Theory," J. Colloid Interface Sci., Vol. 232, No. 1, pp. 17-24, 2000.   DOI   ScienceOn
4 R. S. Bradley, "The cohesive force between solid surfaces and the surface energy of solids," Philosophical Magazine, Vol. 13, pp. 853-862, 1932.
5 S. Banerjee, C.C. Lin, S. Su, H. F. Chung, W. Brandt and K. Tang, "Cryogenic aerosol cleaning of photomasks," Proc. SPIE, Vol. 5853, No. 1, pp. 90-99, 2005.
6 Mathworks, MatlabTM version 6.5, Mathworks Inc., 2002.
7 MapleTM Manual Release 5, Waterloo Maple Inc., 1997.
8 T. Hattori, "Contamination control: Problems and prospects," Solid State Technol., Vol. 33, No. 7, pp. 1-8, 1990.   DOI
9 T. Hattori and S. Koyate, "An automated particle detection and identification system in VLSI wafer processing," Solid State Technol., Vol. 34, No. 9, pp. 1-6, 1991.   DOI
10 D.R. Linger, "$CO_2$ (dry-ice) particle blasting as a mainstream cleaning alternative," Particles on Surfaces 5&6: Detection, Adhesion and Removal, pp. 203-220, 1999.
11 R. Kohli, "Precision cleaning and processing in industrial applications," Particles and Surfaces 5&6: Detection, Adhesion and Removal, pp. 117-134, 1999.
12 석종원, 이성훈, 김필기, 이주홍, "극저온 $CO_2$ 세정과 정 시 미세오염물의 탈착 메커니즘 연구," 반도체및 디스플레이장비학회지, 제7권, 제4호, pp. 29-33, 2008.   과학기술학회마을
13 K. L. Johnson, Contact Mechanics, Cambridge Univ. Press, N.Y., 1985.
14 J. A. Greenwood, J. B. P. Williamson, "Contact of nominally flat surfaces," Proc. R. Soc. London, Ser. A, Vol. 295, No. 1442, pp. 300-319, 1966.   DOI
15 J. A. Greenwood, J. H. Tripp, "The elastic contact of rough spheres," ASME J. Appl. Mech., Vol. 34, pp. 153-159, 1967.   DOI
16 K. L. Johnson, K. Kendall, A. D. Roberts, "Surface energy and the contact of elastic solids," Proc. R. Soc. London, Ser A, Vol. 324, No. 1558, pp. 301-313, 1971.   DOI
17 B. V. Derjaguin, V. M. Muller, Y. P. Toporov, "Effect of contact deformations on the adhesion of particles," J. Collid Interface Sci. Vol. 53, No. 2, pp. 314-326, 1975.   DOI   ScienceOn
18 D. Tabor, "Surface forces and surface interactions," Colloid Interface Sci. Vol. 58, No. 1, pp. 2-13, 1977.   DOI   ScienceOn
19 K. L. Johnson, J. A. Greenwood, "An adhesion map for the contact of elastic spheres," J. Colloid Interface Sci. Vol. 192, No. 2, pp. 326-333, 1997.   DOI   ScienceOn
20 D. Maugis, "Adhesion of spheres: The JKR-DMT transition using a dugdale model," J. Colloid Interface Sci. Vol. 150, No. 1, pp. 243-269, 1992.   DOI   ScienceOn
21 Y. Zhao, L. Chang, "A model of asperity interactions in elastic-plastic contact of rough Surfaces," J. Tribol., Vol. 123, No. 4, pp. 857-864, 2001.   DOI   ScienceOn
22 P. Sahoo, A. Banerjee, "Asperity interaction in adhesive contact of metallic rough surfaces," J. Phys. D: Appl. Phys., Vol. 38, No. 22, 4096-4103, 2005.   DOI   ScienceOn
23 Y. I. Rabinovich, J. J. Adler, A. Ata, R. K. Singh, B.M. Moudgil, "Adhesion between nanoscale rough surfaces - I. Role of asperity geometry," J. Colloid Interface Sci., Vol. 232, No. 1, pp. 10-16, 2000.   DOI   ScienceOn
24 W. Cheng, P. F. Dunn, R. M. Brach, "Surface roughness effects on microparticle adhesion," J. Adhesion, Vol. 78, No. 11, pp. 929-965, 2002.   DOI   ScienceOn
25 J. A. Greenwood, "Adhesion of Elastic Spheres," Proc. R. Soc. Lond. A, Vol. 453, No. 1961, pp. 1277-1297, 1997.   DOI   ScienceOn
26 N. Lyer, N. Saka, J. H. Chun, "Contamination of silicon surface due to contact with solid polymers," IEEE. Trans. Semi. Manufacturing, Vol. 14, No. 3, pp. 85-96, 2001.   DOI
27 Q. Li, V. Rudolph, W. Peukert, "London-van der Waals adhesiveness of rough particles," Powder Technol., Vol. 161, No. 3, pp. 248-255, 2006.   DOI   ScienceOn