• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.72-75
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• 2023

Carbon neutrality has been emerged as important mission for all the manufacturing industry to reduce energy usage and carbon emission equivalent. Korean semiconductor and display manufacturing industries are also in huge interest by minimize the energy usage as well as to find a less global warming product gases in both etch and cleaning. In addition, Korean government is also investing long term research and development plan for the safe environment in various ways. In this paper, we revisit previous research activities on carbon emission equivalent and current research activities performed in semiconductor process diagnosis research center at Myongji University with respect to the reduction of NF3 usage for the PECVD chamber cleaning, and we present the analytical result of the exhaust gas with residual gas analysis in both 6 inches and 12 inches PECVD equipment. The presented result can be a reference study of the development of new substitution gas in near future to compare the cleaning rate of the silicon oxide deposition chamber.

• Spatial Information Research
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• v.19 no.1
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• pp.61-72
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• 2011

Greenhouses gas emission due to usage of fossil fuel has been known as one of the main causes of global warming. Fundamentally, greenhouse gas is a by-product of economic activity. Since majority of economic activity happens in an urban setting, a countermeasure in an urban setting is needed. Therefore, an analysis of relationship between carbon dioxide emission and urban form will be investigated for urban planning and management in the future. The purpose of this study is to analyze the relationship between carbon dioxide emission and urban spatial patterns, and suggesting an urban form with low carbon dioxide emission. In order to achieve this, first theoretical analysis was carried out on urban spatial patterns related to physical size, usage rate, and activity level. Secondly, Seoul's dam on electricity, natural gas, local heating, petroleum, and water usage and mapping a carbon dioxide emission map. Thirdly, relationship between carbon dioxide emission and urban spatial patterns are analyzed and urban spatial patterns that affects energy usage in urban setting was elucidated, and elicited implications on future directions on urban planning based on our analyses above.

• Journal of Korean Society of Water and Wastewater
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• v.23 no.4
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• pp.407-416
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• 2009

The objective of this study was to evaluate the variation of physical properties and adsorption capacity after regeneration of Granular Activated Carbon (GAC). It was found that the loss rate of regenerated carbon was related to the usage time of GAC. The correlations between iodide number and loss rate also determined. Effective size and uniformity coefficient for regenerated GAC were within a similar range compared to virgin GAC. This result indicated that the function as media is recovered. Although iodide number and specific surface area for regenerated GAC were not completely recovered compared to that of virgin GAC, cumulative pore volumes of regenerated GAC were increased. Removal efficiency of organic matter in regenerated GAC was resulted the same or slightly higher than that of virgin GAC. This result indicates that the number of mesopore responsible for removal of organic matter was increased after regeneration.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1343-1347
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• 2009

In order to comply with the global energy crisis and environment problem, it is necessary to research and develop the energy utilization technology with the reduction of the primary energy usage. Although the increasing rate of energy consumption started to attenuate, the entire consumption of energy as well as $CO_2$ emission rate tends to increase steadily along with an economic growth in Korea. The energy demand in Korea increases by annual 3.7% during the period from 2000 to 2006. And it is expected that we should take a charge of the greenhouse gas reduction obligation by the Climatic Change Convention(Kyoto Protocol) during the 2nd pledge period($2013{\sim}2017$). According to the IEA report in 2005, the emission amount of carbon dioxide is the 10th place in the world, and the increasing rate is 4.7% annually. Considering the economic scale of Korea, the degradation of energy usage is inevitable when the greenhouse gas reduction obligation come into effect. Therefore, effective energy usage is a very important issue to minimize baneful influence on industrial and economic activities.

• Journal of environmental and Sanitary engineering
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• v.11 no.1
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• pp.57-61
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• 1996

This study was to decompose carbon tetrachloride and CFC with pyrolytic incineration unit because of prohibition of their usage sooner or later. We have investigated heating value and temperature versus decomposing rate, removal of $Cl_2$ and dust in the flue gas, The results obtained were as follows; 1. In combustion condition to decompose $CCl_4$ heating value was 3,300Kcal/Kg, retention time was 2,0 sec. incinerator exit temperature was $950^{\circ}C$. 2.The removal of HCI and $Cl_2$ in flue gas used NaOH as reagent, then molar ratio o of $Na^+/Cl^-$ was 1.07. 3. NaCI of dust component was more than 90 %, 2 stage venturi scrubber was used to remove dust, then removal rate of dust was 99% over at L/G of $1.7Vm^3$

• Journal of Korean Society of Environmental Engineers
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• v.30 no.9
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• pp.925-932
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• 2008

Adsorption performance of tetracycline antibiotic compounds such as tetracycline(TC), oxytetracycline(OTC), chlortetracycline (CTC) and minocycline(MNC) on granular activated carbon(GAC) was evaluated in this study. The coal-based activated carbon was found to be more effective than other carbons in adsorption of tetracycline antibiotic compounds. The wood-based activated carbon was less effective than coconut- and coal-based carbon in adsorption nevertheless having larger pore volume and specific surface area than others carbons. The maximum adsorption capacities(X/M) of coal-based activated carbon for the four tetracycline species was 1.27$\sim$1.36 and 1.69$\sim$1.84 times larger than coconut- and wood-based activated carbon, respectively. Carbon usage rates(CUR) of coal-, coconut- and wood-based activated carbons for tetracycline(TC) were 2.96 g/day, 3.40 g/day and 4.53 g/day, respectively. Similar results were obtained in the adsorption of the rest three tetracycline species. It is concluded that coal-based activated carbon could removed the tetracycline antibiotic compounds better than other material-based activated carbons.

• Journal of Korean Society of Environmental Engineers
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• v.30 no.4
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• pp.401-408
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• 2008

Adsorption performance of sulfonamide antibiotic compounds such as sulfadimethoxine(SDM), sulfachloropyridazine(SCP), sulfamethazine(SMT), sulfathiazole(STZ) and sulfamethoxazole(SMX) on granular activated carbon(GAC) was evaluated in this study. The coal-based activated carbon was found to be more effective than other carbons in adsorption of sulfonamide antibiotic compounds. The wood-based activated carbon was less effective than coconut- and coal-based carbon in adsorption nevertheless having larger pore volume and specific surface area than others carbons. The maximum adsorption capacities(X/M) of coal-based activated carbon for the five sulfonamide species was 1.3$\sim$1.5 and 1.8$\sim$2.1 times larger than coconut- and wood-based activated carbon, respectively. Carbon usage rates (CUR) of coal-, coconut- and wood-based activated carbons for SCP were 3.55 g/day, 4.29 g/day and 6.47 g/day, respectively. Similar results were obtained in the adsorption of the rest four sulfonamide species. It is concluded that coal-based activated carbon could removed the sulfonamide antibiotic compounds better than other material-based activated carbons.

• Journal of Environmental Science International
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• v.24 no.1
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• pp.65-71
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• 2015

This study accessed the adsorption characteristics of the 9 trihalomethanes (THMs) on coal-based granular activated carbon (GAC). The breakthrough appeared first for $CHCl_3$ and sequentially for $CHBr_2Cl$, $CHBr_3$, $CHCl_2I$, CHBrClI, $CHBr_2I$, $CHClI_2$, $CHBrI_2$, and $CHI_3$. The maximum adsorption capacity (X/M) for the 9 THMs with apparent breakthrough points ranged from $1,175{\mu}g/g$ (for $CHCl_3$) to $11,087{\mu}g/g$ (for $CHI_3$). Carbon usage rate (CUR) for $CHCl_3$ was 0.149 g/day, 5.5 times higher than for $CHCl_3$ (0.027 g/day).

• Journal of Korean Society of Environmental Engineers
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• v.34 no.10
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• pp.709-714
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• 2012

This study accessed the adsorption characteristics of the nine nitrosamine species on coal-based granular activated carbon (GAC). The breakthrough appeared first for NDMA and sequentially for NMOR, NPYR, NMEA, NDPA, NDEA, and NPIP. On the other hand, NDBA and NDPHA were not detected in the treated effluent for the operation period. The maximum adsorption capacity (X/M) for the seven nitrosamine species with apparent breakthrough points ranged from $27.5{\mu}g/g$ (for NDMA) to $671.0{\mu}g/g$ (for NPIP). Carbon usage rate (CUR) for NDMA was 1.07 g/day, 13.4 times higher than that for NPIP (0.08 g/day). The X/M values for the seven nitrosamine species were fitted well with a linear regression ($r^2$ = 0.94) by their octanol-water partitioning coefficient ($K_{ow}$).

• Applied Chemistry for Engineering
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• v.26 no.2
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• pp.205-209
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• 2015

CCU (Carbon Capture & Utilization) has a potential technology for the reduction and usage of carbon dioxide which is greenhouse gas emitting from a fossil fuel buring. To decompose the carbon dioxide, a three phase gliding arc plasma-catalytic reactor was designed and manufactured. Experiments of carbon dioxide reduction was performed by varying the gas flow rate with feeding the $CO_2$ only as well as the input power, the catalyst type and steam supply with respect to the injection of the mixture of $CO_2$ and $CH_4$. The $CO_2$ decomposition rate was 7.9% and the energy efficiency was $0.0013L/min{\cdot}W$ at a $CO_2$ flow rate of 12 L/min only. Carbon monoxide and oxygen was generated in accordance with the destruction of carbon dioxide. When the injection ratio of $CH_4/CO_2$ reached 1.29, the $CO_2$ destruction and $CH_4$ conversion rates were 37.8% and 56.6% respectively at a power supply of 0.76 kW. During the installation of $NiO/Al_2O_3$ catalyst bed, the $CO_2$ destruction and $CH_4$ conversion rates were 11.5% and 9.9% respectively. The steam supply parameter do not have any significant effects on the carbon dioxide decomposition.