A Study on the Dielectric and Annealing Properties in Au/$Ta_2$ $O_5$ /Pt MIM Capacitor
(Au/$Ta_2$ $O_5$ /Pt MIM Capacitor의 annealing과 유전 특성)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.14 no.12
- /
- pp.1016-1022
- /
- 2001