• 한국기계가공학회지
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• 제2권3호
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• pp.56-61
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• 2003

This paper described about on-machine profile measurement of aspheric surfaces using contact probing technique in ultra precision machine. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime using a circle leaf spring mechanism and a capacitive-type sensor. The contact probe which is installed on the z-axis is In touch with the aspheric objects which is fixed on the spindle of the diamond turning machine(DTM) during the measuring procedure. The x, z-axis motions of the machine are monitored by a set of two orthogonal plane mirror type laser interferometers. As a results, the developed contact probe on-machine measurement system showed 10 nanometers repeatability with a ${\pm}2{\sigma}$ and uncertainty of 200 nmPv.

• 센서학회지
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• 제24권5호
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• pp.287-290
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• 2015

Liquid crystal polymer (LCP) is a thermoplastic polymer with superior mechanical and thermal properties. In addition, its characteristics include very low water absorption rate and possibility to apply bonding process under low temperature. In this study, LCP is utilized as a packaging material for a microelectronic system (MEMS) based safety device with suggestion of a low temperature packaging process. Highly sensitive and stable capacitive type humidity sensor is fabricated to investigate hermeticity of the packaged MEMS device.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1994년도 Proceedings of the Korea Automatic Control Conference, 9th (KACC) ; Taejeon, Korea; 17-20 Oct. 1994
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• pp.611-615
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• 1994

In this paper, the sensitivity, linearity and temperature drift characteristics of various capacitive force sensors are evaluated and compared using new experimental methods. In particular, two designs were employed to reduce temperature drift. Both types of sensor use high-sensitivity Al coated PET film, and their externals are miniaturized. The first has a layered design consisting of two dielectric substances with different temperature characteristics. The prototype of this design had a temperature drift of only 0.1% of the sensor's capacity in the 20-80.deg. C range. The second type uses both a dummy sensor ind an active sensor with the same characteristics. The temperature drift of the prototype was one-fifth the temperature drift of a single sensor.

• 폴리머
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• 제30권3호
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• pp.207-209
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• 2006

ITO 코팅 글라스를 기판으로 사용하고 폴리(페닐렌에테르설폰)(PES)을 감습막으로 하여 정전용량형 습도센서를 제작하였다. 감습막은 PES를 m-cresol에 용해한 후 스핀코팅으로 제조하였고 그 상부에 다공성 Au막을 스퍼터링으로 증착하였다. 상대습도 $20\sim90%$의 범위에서 센서의 용량은 감습막두께에 반비례하였고 1% 미만의 비선형 특성을 나타내었다. 또한 $1.4{\mu}m$ 두께의 샘플에서는 20 kHz에서 1.3%의 히스테리시스와 1.14의 우수한 감도를 얻을 수 있었다.

• 센서학회지
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• 제23권6호
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• pp.409-415
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• 2014

We had presented an inductive type intraocular pressure sensor (L-sensor) in previous work. The distance between a micro coil and a ferrite on the membrane was modulated by pressure, and as a result the inductance and resonant frequency were changed. However, L-sensor has some problems to implant in eyes. First problem is low sensitivity. When L-sensor was implanted in rabbit's eyes, resonant frequency of L-sensor was very hard to detect. Second problem is biocompatibility. Size of L-sensor is $6{\times}7{\times}1.2mm$. When L-sensor was implanted in the eyes, it caused the inflammation. Therefore, this study suggests an inductive and capacitive type IOP sensor (LCsensor). The sensitivity of the LC-sensor 27.3 kHz/mmHg under 60mmHg. It is much larger than 14 kHz/mmHg of the L-sensor. And the size of LC-sensor is 47% smaller than L-sensor. After 2 weeks from the implantation of LC-sensor into rabbit eyes, we measured the changes of resonant frequency of LC-sensor according to increased IOP by Balanced Salt Solution (BSS) injection. As a result, the sensitivity of LC-sensor in in vivo test is 25 kHz/mmHg. That is similar to the sensitivity of in vitro test.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2009년도 제33회 추계학술대회논문집
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• pp.54-57
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• 2009

차기 한국형 발사체의 추진제 수위 측정시스템은 적용하는 추진제의 극저온 환경 및 유량제어 특성을 고려하여 연속적인 정전용량 값 출력이 가능한 정전용량형이 채택될 예정이다. 현재 정전용량형 신호 감지방식은 2전극과 3전극 방식이 있으나 본 연구에서는 측정 정확도를 고려하여 모든 유체에 적용 가능한 3전극 방식을 채택하였다. 본 논문에는 3전극 방식의 감지원리에 대한 고찰 결과 및 감지부의 형상 변화가 정전용량값에 미치는 영향에 대한 분석 결과, 추진제 탱크 상단의 감지부 설치 위치에 따른 신호감지 영향을 확인하기 위하여 시뮬레이션 프로그램을 활용한 결과가 정리되어 있다. 본 연구에서 얻어진 자료는 실제 탱크 내의 추진제 수위 측정시스템 감지부 설계 및 제작에 활용 가능하다.

• JSTS:Journal of Semiconductor Technology and Science
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• 제4권2호
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• pp.128-132
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• 2004

This paper presents the design, fabrication sequence and measurement results of a highly sensitive capacitive-type humidity sensor using a polyimide film without hydrophobic elements. The structure of the humidity sensor is MIM (metalinsulator-metal). For a high sensitivity, a modified aromatic polyimides as a moisture absorbing layer has been synthesized instead of using general polyimides containing hydrophobic elements. The polyimide film was obtained by synthesizing and thermally polymerizing polyamic acid composed of m-pyromellitic dianhydride, phenelenediamine and dimethylacetamide. Characteristics of fabricated sensors which include sensitivity, hysteresis and stability have been measured. The measurement result shows the percent normalized capacitance change of 0.37/%RH over a range from 10 to 90%RH, hysteresis of 0.77% over the same %RH range and maximum drift of 0.25% at 50%RH. The result shows that the developed humidity sensor can be applied to evaluate a hermeticity of various sensors and actuator systems as well as micro packages.

• 센서학회지
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• 제13권4호
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• pp.287-291
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• 2004

A capacitive type humidity sensor has been fabricated using a polyimide film without hydrophobic elements and its characteristics has been evaluated for hermeticity measurement of micro packages. For a highly sensitive humidity sensor, a polyimide film without hydrophobic elements has been synthesized and used instead of using a commercial one in which 7 group elements such as fluorine or chlorine are included. Sensitivity, stability and hysteresis has been performed to characterize the fabricated sensors. The sensitivity defined as normalized percent capacitance change was 0.3751%RH and hysteresis was 0.77% in the range of 10%RH to 90%RH. Maximum deviation from the average capacitance measured for 120 minutes at 50%RH was 0.25%. The proposed humidity sensor can be used for hermeticity measurement of micro packages.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2005년도 춘계학술대회
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• pp.335-338
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• 2005

Starting with the development of environmentally friendly electric controlled engine, sensors have played an increasing role in automotive technology. Electric power steering (EPS) systems are more and more replacing hydraulic systems. To improve fuel economy, the power assistance is provided by an electric drive. In this paper, development of a unique torque sensor for EPS is introduced. A capacitive type torque sensor is concluded to be suitable for EPS because its output is accurate, linear and robust against the variance of temperature, and patents have not applied so much.

• 센서학회지
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• 제25권5호
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• pp.310-319
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• 2016

Three types of gap sensors, a capacitive gap sensor, an eddy current gap sensor, and a Hall effect gap sensor are described and evaluated through experiments for the purpose of precise gap sensing for micrometer scale movement, and a novel type of differential hall effect gap sensor is proposed. Each gap sensor is analyzed in terms of resolution and environment dependency including temperature dependency. Furthermore, a transport system for AMOLED deposition is introduced as a typical application of gap sensors, which are recently receiving considerable attention. Based on the analyses, the proposed differential Hall effect gap sensor is found to be the most suitable gap sensor for precise gap sensing, especially for application to a transport system for AMOLED deposition. The sensor shows resolution of $0.63mV/{\mu}m$ for the overall range of the gap from 0 mm to 2.5 mm, temperature dependency of $3{\mu}m/^{\circ}C$ from $20^{\circ}C$ to $30^{\circ}C$, and a monotonic characteristic for the gap between the sensor and the target.