• Journal of the Korean Vacuum Society
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• v.5 no.3
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• pp.181-187
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• 1996

The Ultrasonic Interferometer Manometer(UIM) which can calibrae from1 Pa to $10^5$Pa has been developed, and its uncertainty is evaluated less than $\pm$(30ppm of pressure+12mPa). We can calibrate Capacitance Diaphragm Gauge(DCG) used as a transfer standard gauge in the low vacuum field. TheUIM enables to maintain the measurement traceability for industries. In order to improve the UIM's accracy, we will perform the international intercomparison withother national standards laboratories.

• Journal of the Korean Vacuum Society
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• v.12 no.3
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• pp.151-156
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• 2003

Two capacitance diaphragm gauges(CDG) and two resonance silicon gauges(RSG) were calibrated using an ultrasonic interferometer as a national low vacuum standard in KRISS. The CDG has superior pressure resolution and is rugged as well as resistant to over-pressure because of all-metal inner components. Meanwhile, the RSG is a new type of MEMS sensor that has excellent calibration stability and is resistant to mechanical shocks. The calibration uncertainties were analyzed according to the ISO procedures. Results showed that the maximum difference of the expanded uncertainties was $9\times10^{-3}$Pa at the generated pressure of 100 Pa for the two different types. It is remarkable that the RSG can be used as a transfer standard at low vacuum since their accuracies were found to be within 0.5 %.

• Journal of the Korean Vacuum Society
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• v.14 no.2
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• pp.59-68
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• 2005

We developed a national medium vacuum standard by static expansion method. A 133 Pa capacitance diaphragm gauge was calibrated and analysed according to the document of 'Guide to the Expression of Uncertainty in Measurement' of ISO. The results showed that the expanded uncertainty of $2.628\times10^{-3}$ Pa at $95\%$ confidence level and coverage factor of k=2.

• Journal of the Korean Vacuum Society
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• v.10 no.2
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• pp.173-181
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• 2001

We calibrated a capacitance diaphragm gauge(CDG) of 1,333 Pa range by using ultrasonic interferometer manometer (UIM) that was a national low vacuum standards system. And its uncertainties were evaluated according to International Organization for Standardization(ISO), they were named to A type uncertainty, B type uncertainty, combined standard uncertainty, and expanded uncertainty, We obtained that the combined standard uncertainties were $1.38 \times10^{-2}\; Pa\sim3.03 \times10^{-1} $Pa and the relative uncertainties(combined standard uncertainty/standard pressure) were $2.3 \times 10^{-4}\;Pa\sim7.9 X\times10^{-3} $Pa for this 1,333 Pa CDG.

• Journal of the Korean Vacuum Society
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• v.14 no.3
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• pp.103-109
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• 2005

A new medium vacuum primary standard using the static expansion method was developed in KRISS. In order to evaluate the performance of the equipment, we compared the medium vacuum standard with an ultrasonic interferometer manometer using two capacitance diaphragm gauges, the measuring ranges of which were 133 Pa and 1,333 Pa respectively. The result, Error normalized values, showed that the two standards are coincident each other within the range of combined uncertainty at calibrated pressure of $3pa\;\sim\;100pa$.

• Journal of the Korean Vacuum Society
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• v.6 no.4
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• pp.308-313
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• 1997

TDS (Thermal Lkso~ption Spectroscopy)system, for diagnosis of CRT manufacturing process, was designed and constructed. Outgassings and themla1 desorptions from the part or materials of CRT can be measured and analysed with this system at various temperatures. The system is consisted of 3 pirrts. vacuum chamher and pumping system with variable conductance, sample heating stages & their controller, and outgassing measurement devices, like as ion gauge or quadrupole mass spectrometer. The ultimate pressure of the system was under $1\times10^{-7}$ Pa. With the variable conductance system, the effective pumping speed of the chamber could he controlled from sub 11s to 100 11s. The effective pumping speed values were determined by dynamic flow measurement principle. The temperatures and ramp rate of sample were controlled by tungsten heater and PID controller up to $600^{\circ}C$ within t $\pm 1^{\circ}C$$difference to setting value. Ion gauge & QMS were calibrated for quantitative measurements. Some examples of TDS measurement data ;ind application on the CRT process analysis were shown.

• Journal of the Korean Vacuum Society
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• v.12 no.4
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• pp.207-213
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• 2003

We have developed the hardware and software for automation of the national medium vacuum standard. The automation is necessary to control and monitor the complex system consists of several vacuum chambers, pumping systems, vacuum gauges, thermometers, and valves. By using the automation program, we have measured volume ratios of the system and performed calibration of a capacitance diaphragm gauge in order to evaluate the system.

• Journal of the Korean Vacuum Society
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• v.16 no.4
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• pp.244-249
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• 2007

Deadweight piston gauge have been widely used as a fundamental instrument of precise pressure measurement because they are robust, accurate, potable, convenient to use and are able to realize the definition of pressure as farce per unit area. Basically, a deadweight piston gauge consists of a piston mounted vertically in a close-fitting cylinder filled with a gas and weights of known mass values. The pressure to be measured is applied to the base of the piston generating an upward vertical force, and is balanced by the downward gravitational force generated by weights. These instruments can be used to measure pressures above 10 kPa because of tare weights including piston. However, using a variable bell-jar pressure method and a newly developed weight loading device we can extend the application range of deadweight piston gauge to lower pressures. In this paper, we present the practical calibration results for two CDGs(Capacitance diaphragm gauge, MKS) with full-scale ranges of 1.33 kPa and 13.3 kPa, respectively.

• Progress in Medical Physics
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• v.33 no.1
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• pp.1-9
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• 2022

Purpose: To evaluate the effective volume of the Korea Research Institute of Standards and Science free air chamber (KRISS FAC) L1 used for the primary standard device of the low-energy X-ray air kerma. Methods: The mechanical dimensions were measured using a 3-dimensional coordinate measuring machine (3-d CMM, Model UMM 500, Carl Zeiss). The diameter of the diaphragm was measured by a ring gauge calibrator (Model KRISS-DM1, KRISS). The elongation of the collector length due to electric field distortion was determined from the capacitance measurement of the KRISS FAC considering the result of the finite element method (FEM) analysis using the code QuickField v6.4. Results: The measured length of the collector was 15.8003±0.0014 mm with a 68% confidence level (k=1). The aperture diameter of the diaphragm was 10.0021±0.0002 mm (k=1). The mechanical measurement volume of the KRISS FAC L1 was 1.2415±0.0006 cm³ (k=1). The elongated length of the collector due to the electric field distortion was 0.170±0.021 mm. Considering the elongated length, the effective measurement volume of the KRISS FAC L1 was 1.2548±0.0019 cm³(k=1). Conclusions: The effective volume of the KRISS FAC L1 was determined from the mechanically measured value by adding the elongated volume due to the electric field distortion in the FAC. The effective volume will replace the existing mechanically determined volume in establishing and maintaining the primary standard of the low-energy X-ray.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.101.2-101.2
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• 2015

급속한 산업화로 인하여 에너지 부족 문제가 대두되고 있는 가운데 에너지 저감 기술의 개발이 요구되고 있다. 국내 반도체 공정의 배기계통에서 소비되는 에너지는 전체 공정에 소비되는 에너지중 상당량에 달하며 10%의 에너지 절감은 연간 1000억원 이상의 비용절감 효과를 기대할 수 있다. 반도체 공정 배기계통은 진공펌프의 특성, 챔버의 부피, 도관의 구조(직경, 길이, 형상), 진공재료의 기체방출 등 여러 가지 요소의 복합적인 영향으로 그 상태가 달라지므로 보다 효과적인 공정의 운용과 에너지 절감을 위해 반도체 공정의 복합 상태 진단기술 개발이 요구되고 있으며 그중 큰 비중을 차지하는 드라이펌프의 실시간 모니터링 기술의 개발이 시급하다. 본 연구에서는 반도체 공정의 복합 상태 진단기술 개발에 대한 기초 연구로서 반도체 공정 배기계통의 conductance 및 유량 변화에 대한 드라이펌프의 특성을 이론적 계산으로 얻어진 결과와 실험을 통하여 얻어진 결과를 비교, 분석하였다. 진공펌프의 기본 특성은 한국표준과학연구원에서 국제규격에 따라 도달진공도, 배기속도, 소비전력, gas load, 소음, 진동 등을 분석하였고, 나노종합기술원의 PECVD 장비(chamber A: amorphous silicon 및 loadlock chamber)에 챔버의 부피, 도관의 구조, 공정가스의 유량 등을 측정하여 simulation 하였으며, 실제 측정값은 LabVIEW 프로그래밍으로 자동화 된 MFC를 이용하여 실제 공정 상태를 모사하였다. 실험은 PECVD의 특성을 고려하여 질소분위기에서 CDG (Capacitance Diaphragm Gauge)를 사용하였다.