Evaluation of low vacuum gauge using deadweight piston gauge
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Woo, Sam-Yong
(Division of Physical Metrology, Korea Research Institute of Standards and Science)
Choi, In-Mook (Division of Physical Metrology, Korea Research Institute of Standards and Science) Song, Han-Wook (Division of Physical Metrology, Korea Research Institute of Standards and Science) Kim, Boo-Shik (Division of Physical Metrology, Korea Research Institute of Standards and Science) |
1 | C. R. Tilford, Metrologia 30, 545 (1993) DOI ScienceOn |
2 | C. M. Sutton, M. P. Fitzgerald, D. G. Jack, Metrologia 36, 517 (1999) DOI ScienceOn |
3 | C.Ehrlich, Metrologia 30, 585 (1993) DOI ScienceOn |
4 | S.Y.Woo et al, J. Vac. Sci. Technol. A 22(4), 1816 (2004) DOI ScienceOn |
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