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Inter-comparison between ultrasonic interferometer manometer and medium vacuum standards by static expansion method  

Hong S. S. (Vacuum Center, Korea Research Instituteof Standards and Science)
Lim I. T. (Vacuum Center, Korea Research Instituteof Standards and Science)
Shin Y. H. (Vacuum Center, Korea Research Instituteof Standards and Science)
Chung K. H. (Vacuum Center, Korea Research Instituteof Standards and Science)
Publication Information
Journal of the Korean Vacuum Society / v.14, no.3, 2005 , pp. 103-109 More about this Journal
Abstract
A new medium vacuum primary standard using the static expansion method was developed in KRISS. In order to evaluate the performance of the equipment, we compared the medium vacuum standard with an ultrasonic interferometer manometer using two capacitance diaphragm gauges, the measuring ranges of which were 133 Pa and 1,333 Pa respectively. The result, Error normalized values, showed that the two standards are coincident each other within the range of combined uncertainty at calibrated pressure of $3pa\;\sim\;100pa$.
Keywords
Capacitance diaphragm gauge; static expansion method; medium vacuum standard; Error nor malized value;
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