• Title/Summary/Keyword: COO

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Chemical Mechanical Polishing Characteristics of Mixed Abrasive Slurry by Adding of Alumina Abrasive in Diluted Silica Slurry (탈이온수로 희석된 실리카 슬러리에 알루미나 연마제가 첨가된 혼합 연마제 슬러리의 CMP 특성)

  • 서용진;박창준;최운식;김상용;박진성;이우선
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.6
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    • pp.465-470
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    • 2003
  • The chemical mechanical polishing (CMP) process has been widely used for the global planarization of multi-layer structures in semiconductor manufacturing. The CMP process can be optimized by several parameters such as equipment, consumables (pad, backing film and slurry), process variables and post-CMP cleaning. However, the COO(cost of ownership) is very high, because of high consumable cost. Especially, among the consumables, the slurry dominates more than 40 %. In this paper, we have studied the CMP characteristics of diluted silica slurry by adding of raw alumina abrasives and annealed alumina abrasives. As an experimental result, we obtained the comparable slurry characteristics compared with original silica slurry in the view-point of high removal rate and low non-uniformity. Therefore, we can reduce the cost of consumables(COC) of CMP process for ULSI applications.

A Study on the Recycling of Silica Slurry Abrasives by Filtering (필터링에 의한 실리카 슬러리 연마제의 재활용에 관한 연구)

  • Seo Yong-Jin;Park Sung-Woo;Lee Woo-Sun
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.53 no.11
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    • pp.551-555
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    • 2004
  • In this paper, in order to reduce the high COO (cost of ownership) and COC (cost of consumables), we have collected the silica abrasive powders by filtering method after subsequent CMP (chemical mechanical polishing) process for the purpose of abrasives recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size distribution and FE-SEM (field emission-scanning electron microscope) measurements of abrasive powders. It was annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable rate of removal and good planarity with commercial products. Consequently we can expect the saving of high cost slurry.

Anion Recognition by a Simple Colorimetric Benzthiazole-Based Receptor

  • Kang, Sung-Ok;Nguyen, Quynh Pham Bao;Kim, Taek-Hyeon
    • Bulletin of the Korean Chemical Society
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    • v.30 no.11
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    • pp.2735-2738
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    • 2009
  • A simple colorimetric anion chemosensor based on 2-amino-6-nitrobenzothiazole was synthesized. The addition of tetrabutylammonium (TBA) salts of $F^-,\;{CH_3COO}^-,\;and\;{H_2PO_4}^-$ to the solution of receptor 3 caused dramatic and clearly observable color changes from light to dark yellow due to the deprotonation process which is totally different from previously reported receptors based on the same motif. According to the basicity of the anions, the sensitivity of receptor 3 towards various anions decreased in the following order: ${CH_3COO}^-\;>\;F^-\;>\;{H_2PO_4}^-$.

The Effects of Country-Of-Online Retailer on Consumer's Purchase Decision-Making in a Foreign Internet Shopping Mall

  • Hong, Sungjun;Park, Jongchul;Jeon, Seungwon
    • Journal of Korea Trade
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    • v.25 no.6
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    • pp.20-33
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    • 2021
  • Purpose - The growth in consumers' online shopping has even been accelerated by the COVID-19 pandemic. While the purchase can be made from any countries online, the purpose is to examine the effect of the country of the online retailer (COOR) on consumers' perceived risk and purchase motivation, focusing on the retailer not on the brand. Design/methodology - Survey data from online shoppers are analized using the structural equation model. Findings - COOR, like COO of the brand manufacturer, positively affect consumer's purchase intension. First, the images and the perceived psychic distances of the COOR affects both perceived risk and purchase confidence. Secondly, this perceived risk and confidence they put on the transaction then affect the purchase intension of the consumer. Originality/value - We show that the quality of the signal comes not only from the manufacturer-branded product item itself with a certain COO, but also from the retailer who carries it.

탐방 - (주) 트랜스코스모스코리아 DM사업본부

  • Im, Nam-Suk
    • 프린팅코리아
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    • v.11 no.8
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    • pp.104-107
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    • 2012
  • (주)트랜스코스모스코리아(CEO 하헌식, COO 스베타카시)는 종업원 5800명, 2011년 매출액 1552억 원에 이르는 DM 전문 회사다. 성남시 중원구 상대원동에 위치한 DM사업본부를 찾았다.

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Natural Dyeing Characteristics of Korean Traditional Paper with Smoke Tree (Cotinus coggygria Scop) (안개나무 추출물을 이용한 한지의 천연염색 특성)

  • Lee, Sang-Hyun;Yoo, Seung-Il;Choi, Tae-Ho
    • Journal of Korea Technical Association of The Pulp and Paper Industry
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    • v.41 no.2
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    • pp.40-46
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    • 2009
  • The purpose of this study was to estimate natural dyeing properties of Korean traditional paper (Hanji). We dyed the Korean traditional paper with dyestuff which extracted from wood meal of Cotinus coggygria Scop (smoke tree) using hot-water, ethanol and $K_{2}CO_{3}$ solution. As mordants, 0.5% of $AlK(SO_4)_2$, $FeCl_2$, and $CuCH_3(COO)_2$ solution were used respectively. The color of dyed Hanji mainly depended on not the methods of extraction but the kinds of mordant. The dyed Hanji mordant with $AlK(SO_4)_2$ colored vivid yellow, $FeCl_2$ colored dark olive, and $CuCH_3(COO)_2$ colored brown and/or orange. The dyed Hanji with hot-water extractive had the highest K/S value and ethanol and $K_{2}CO_{3}$ solution extractives were followed. The K/S value of dyed Hanji mordant with $AlK(SO_4)_2$ was higher than that of $FeCl_2$ and $CuCH_3(COO)_2$. The dyeing effectiveness of after-mordanting method was superior to the others but sim-mordanting method was the worst.

Plant responses to nano and micro structured carbon allotropes: Water imbibition by maize seeds upon exposure to multiwalled carbon nanotubes and activated carbon

  • Dasgupta-Schubert, N.;Tiwari, D.K.;Francis, E. Reyes;Martinez Torres, P.;Villasenor Cendejas, L.M.;Lara Romero, J.;Villasenor Mora, C.
    • Advances in nano research
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    • v.5 no.3
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    • pp.245-251
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    • 2017
  • Multiwalled carbon-nanotubes (MWCNT) and micro-structured carbon, such as biochar or activated carbon (AC), have been seen to significantly increase the growth indices of certain plant species such as maize (Zea mays L.). Seed imbibition is the stage where environmental factors that affect water transport across the seed coat barrier, make a large impact. This work explores the effect on water imbibition by maize seeds when the aqueous environment surrounding the seed is diluted by small concentrations (10 and 20 mg/l) of pristine MWCNT (p-MWCNT), carboxylate functionalized MWCNT (COO-MWCNT) and AC. The degree of sensitivity of the process to (i) large structural changes is seen by utilizing the nano (the MWCNT) and the micro (the AC) allotropic forms of carbon; (ii) to small changes in the purity and morphology of the p-MWCNT by utilizing 95% pure and 99% pure p-MWCNTs of slightly differing morphologies; and (iii) to MWCNT functionalization by using highly pure (97%) COO-MWCNT. Water imbibition was monitored over a 15 hour period by Near Infrared Thermography (NIRT) and also by seed weighing. Seed surface topography was seen by SEM imaging. Analysis of the NIRT images suggests rapid seed surface topological changes with the quantity of water imbibed. While further work is necessary to arrive at a conclusive answer, this work shows that the imbibition phase of the maize seed is sensitive to the presence of MWCNT even to small differences in the purity of the p-MWCNT and to small differences in the physicochemical properties of the medium caused by the hydrophilic COO-MWCNT.

XPS Analysis of Acrylic Acid Films Polymerized by Remote Plasma-Enhanced Chemical Vapor Deposition (원격 플라즈마 화학기상증착법에 의해 중합된 아크릴산 필름의 XPS 분석)

  • Kim, Seonghoon;Seomoon, Kyu
    • Applied Chemistry for Engineering
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    • v.20 no.5
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    • pp.536-541
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    • 2009
  • Plasma-polymerized acrylic acid films were deposited on Si wafer and KBr pellet by remote plasma-enhanced chemical vapor deposition (PECVD). Effects of plasma power, reaction pressure, indirect plasma method on the growth rate, chemical structure, and chemical bonding state of the films were investigated. Chemical structure and chemical state of the films were characterized by Fourier transformed infrared (FT-IR) spectroscopy and X-ray photoelectron spectroscopy (XPS) analysis and curve fitting technique. Growth rate of the film increased to a saturation value with plasma power of 100 W, but showed the maximum with reaction pressure at 300 mtorr. Whenever W/FM factor (applied energy per gas molecule) increased by increasing plasma power or lowering pressure, the fragmentation of acrylic acid molecules was promoted. From the XPS curve fitting analyses, we found that the intensity of carboxyl COO bonding peak decreased with W/FM factor, and the tendency of intensity change of carboxylic COO peak was contrary to those of ether C-O and carbonyl C=O peaks.