• 제목/요약/키워드: COF

검색결과 90건 처리시간 0.023초

Study of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy

  • Lee, Hyo-Sang;Philipossian Ara;Babu Suryadevara V.;Patri Udaya B.;Hong, Young-Ki;Economikos Laertis;Goldstein Michael
    • Transactions on Electrical and Electronic Materials
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    • 제8권1호
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    • pp.5-10
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    • 2007
  • Using a reference slurry, ammonium dodecyl sulfate (ADS), an anionic and environmentally friendly surfactant, was investigated as an alternative to BTA for its inhibition and lubrication characteristics. Results demonstrated that the inhibition efficiency of ADS was superior to that of BTA. Coefficient of friction (COF) was the lowest when the slurry contained ADS. This suggested that adsorbed ADS on the surface provided lubricating action thereby reducing the wear between the contacting surfaces. Temperature results were consistent with the COF and removal rate data. ADS showed the lowest temperature rise again confirming the softening effect of the adsorbed surfactant layer and less energy dissipation due to friction. Spectral analysis of shear force showed that increasing the pad-wafer sliding velocity at constant wafer pressure shifted the high frequency spectral peaks to lower frequencies while increasing the variance of the frictional force. Addition of ADS reduced the fluctuating component of the shear force and the extent of the pre-existing stick-slip phenomena caused by the kinematics of the process and collision event between pad asperities with the wafer. By contrast, in the case of BTA, there were no such observed benefits but instead undesirable effects were seen at some polishing conditions. This work underscored the importance of real-time force spectroscopy in elucidating the adsorption, lubrication and inhibition of additives in slurries in CMP.

약용식물 물 추출물의 항산화 활성 및 α-Glucosidase 저해효과 (Antioxidant Activities and α-Glucosidase Inhibitory Effect of Water Extracts from Medicinal Plants)

  • 김현숙;김태우;김대중;이재성;김경곤;최면
    • 한국약용작물학회지
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    • 제21권3호
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    • pp.197-203
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    • 2013
  • We studied the total polyphenol content, DPPH radical scavenging activity, hydroxyl radical scavenging activity and ${\alpha}$-glucosidase inhibition of water extracts from 17 medicinal plants. Total polyphenol contents ranged from 10.0 (Coix lachryma-jobi L, CL) ~ 279.7 (Perilla sikokiana, PS)mg/g. The water extract from medicinal plants were evaluated for its free radical scavenging activities and compared with a commercial antioxidant, ascorbic acid. DPPH radical scavenging activity of Pyrus pyrifolia (PP), Chamaecyparis obtusa L. (COL), Chamaecyparis obtusa F. (COF), and PS were higher than positive control. Higher hydroxyl radical scavenging activity were shown in Acanthopanax senticosus (AS) and Cordyceps militaris (CM) than the other plants. The highest anti-${\alpha}$-glucosidase activity was observed in Cornus officinalis (CO) and Paeonia suffruticosa Andrews (PSA) water extracts. PSA showed not only the higher DPPH radical scavenging activity but also the anti-${\alpha}$-glucosidase activity. The results of our study that PP, COL, COF, PS, AS, CM, CO and PSA could be potential candidates for natural antioxidants.

공유결합 트리아진 구조체 기반 분리막의 최근 발전 (Recent Advances in Covalent Triazine Framework based Separation Membranes)

  • 김에스더;라즈쿠마 파텔
    • 멤브레인
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    • 제31권3호
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    • pp.184-199
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    • 2021
  • 공유결합 유기 구조체(COF)의 한 가지로서, 공유결합 트리아진 구조체(CTF)는 이온 열 삼량 체화 반응을 통해 제조된 반복되는 육각형 트리아진 고리의 네트워크로 구성되어 본질적으로 다공성 구조를 가진다. 또한 일부 화학 물질에 대한 친화성을 높이고 다른 화학 물질을 배제하는 많은 질소 작용기를 포함한다. 조절 가능한 특성 때문에 많은 연구자들이 기체 및 액체 분리 공정을 위한 CTF의 소재를 합성하고 테스트했다. 새로운 CTF, 혼합 CTF 복합재 및 CTF 멤브레인에 대한 다양한 연구가 기체흡착, 기체분리(예 : CO2, C2H2, H2 등) 및 담수화에 대해 연구되었다. 일부 CTF 연구는 고급 컴퓨터 시뮬레이션을 통해 한계와 잠재력을 결정했으며 후속 실험에서는 광촉매 특성에 대한 CTF를 테스트하여 더 큰 지속 가능성을 위한 재활용 가능성을 제안했다. 이 총설에서는 공유결합 트리아진 구조체 기반 분리막에 대해 설명할 예정이다.

실리콘 오일 점도에 따른 ABS-like 레진의 트라이볼로지 특성 (Tribological Characteristics of ABS-like Resin According to Silicon Oil Viscosity)

  • 박성현;손준규;우성웅;류의진;이현섭
    • Tribology and Lubricants
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    • 제36권6호
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    • pp.365-370
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    • 2020
  • Recently, additive manufacturing (AM) technology has been applied to various industries such as automotive, aviation, medical, and electronics. Most prior studies are limited to the mechanical properties of printed materials, and few studies are being conducted on their tribological characteristics. However, the friction and wear characteristics of the material should be studied in order to utilize the components manufactured using AM technology as mechanical parts. In this study, the friction and wear characteristics of acrylonitrile-butadiene-styrene (ABS)-like resin printed with stereo lithography apparatus (SLA) 3D printing are evaluated according to the viscosity of silicon oil lubricant using a ball-on-disk experiment. Lubricants with a viscosity of 500, 1000, and 2000 cSt are prepared for the experiment. If silicon oil lubricants are used during the ball-on-disk test, the coefficient of friction (COF) and wear rates are significantly reduced, and the higher the viscosity of the lubricant, the lower will be the COF and wear rates. It is also verified that the temperature of the specimen owing to friction also decreases according to the viscosity of the lubricant. This is because of the silicon oil film thickness, and the higher the viscosity of the lubricant, the thicker will be the oil film. More studies on the tribological characteristics of 3D printing materials and suitable lubricants will be required to use 3D printed parts as mechanical elements.

컴프레서 부품의 DLC코팅 적용에 따른 트라이볼로지적 특성 연구 (Tribological Characteristics of DLC-Coated Part in Compressor)

  • 윤주용;서국진;한재호;전지환;송지영;고영덕;남자현;김선교;김대은
    • Tribology and Lubricants
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    • 제38권1호
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    • pp.8-14
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    • 2022
  • Amorphous carbon (a-C) has excellent wear resistance and, therefore is used as a coating to protect numerous mechanical components to prolong their lifetimes. Among the a-C coatings, diamond-like carbon (DLC) and DLC-containing silicon (Si-DLC) receive extensive attention owing to their enhanced wear resistance and low frictional characteristics. In this study, the friction and wear characteristics of DLC and Si-DLC coatings are analyzed. For comparative analysis, DLC-coated and Si-DLC-coated vanes are utilized with the counterpart of a roller for the friction tests. Since the lubricated mechanical components are generally vulnerable to wear when a lubricant film does not form properly, friction tests are conducted under boundary lubrication conditions to promote wear. A cylinder-on-cylinder type tribometer is used to perform the friction tests with various normal load conditions. After the friction test, a 3D laser confocal microscope is used for quantifying the wear volume to calculate the wear rate of each specimen. Consequently, the DLC-coated specimen shows a lower coefficient of friction (COF) and wear rate than the specimen without the coating, while the Si-DLC coating shows a higher COF than the bare specimen. The results of this study are expected to contribute to improving the efficiency and reliability of compressors.

미끄럼 저항 측정을 위한 로봇 시스템 개발 (The Development of Robot System for Assessing Slip Resistance)

  • 김정수
    • 한국안전학회지
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    • 제28권5호
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    • pp.1-4
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    • 2013
  • The main objective was to design and develop a prototype robot system for assessing slip resistance. The developed robot system will be able to be used for stochastic nature of friction in the whole workplace. The second objective was to evaluate its operating condition in the laboratory, using a dreg sled type slipmeter(BOT-3000) as reference device. It was found that COF(Coefficient of Friction) measured with robot system was similar to that of BOT-3000 when sliding velocity was reached at 0.2m/s. The robot system might be the more promising one than any traditional measurement devices. A further evolution of prototype devices, as well as the development of test methods for that's various applications, is to be started in forthcoming studies.

미세 피치를 갖는 bare-chip 공정 및 시스템 개발

  • 강희석;정훈;조영준;김완수;강신일;심형섭
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2005년도 춘계 학술대회
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    • pp.79-83
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    • 2005
  • IT 기술, 반도체 산업 등의 급격한 발전에 힘입어 최근의 첨단 전자, 통신제품은 초경량 초소형화와 동시에 고기능 복합화의 발전 추세를 보이고 있다. 이런 추세에 발맞추어 전자제품, 통신제품의 핵심적인 부품인 IC chip도 소형화되고 있다. IC chip 패키징 기술의 하나인 Filp Chip Package는 Module Substrate 위에 Chip Surface를 Bumping 시킴으로서 최단의 접속길이와 저열저항, 저유전율의 특성도 가지면서 초소형에 높은 수율의 저 원가생산성을 갖는 첨단의 패키징 기술이다. 이런 패키징 기술은 수요증가와 더불어 폭발적으로 늘어나고 있으나 까다로운 공정기술에 의해 아직 여러 회사에서 장비가 출시되고 있지 못한 상태이다. 이에 본 연구에서는 최근 수요가 증가하는 LCD Driver IC용 COF 장비를 위한 Flip chip Bonding 장비 및 시스템을 설계, 제작하였다.

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특집 : 레이저 기반 초정밀 초고속 가공시스템 - PCB pattern 미세화에 따른 UV laser driller의 개발

  • 박홍진;서종현
    • 기계와재료
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    • 제22권1호
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    • pp.22-29
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    • 2010
  • 최근 휴대폰 등 모방일 전자기기 산업에서 차세대 고부가 PCB(MLB, HDI, FPC, 등) 및 고기능 PCB(COF, MOF, SOF)의 급속한 적용 확대로 직경$20{\mu}m$급의 비아홀(viahole) 및 interconnection 홀 가공을 위한 초정밀/초고속 레이저 드릴링 공정 및 장비기술 개발에 대한 시장의 요구가 급증하고 있다. 이에 반해 기존의 CO2 레이저 드릴링은 기술적 한계에 도달하여 시장의 요구에 대응이 불가하며, 선진업체에서는 최근 UV 레이저 드릴링 장비에 대한 시장 점유율을 높여가고 있다. 특히 국내시장은 미국의 ESI사가 독점하고 있어 기술개발 투자를 통한 국산화가 절실한 상황이다. 이에 당사에서는 초고속/초정밀 UV laser 시스템을 이용한 FPC iva hole drilling을 연구과제로 개발을 진행하고 있으며 국산화를 넘어서 세계시장점유를 목표로 공정장비개발을 진행중이다.

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극박형 복합재료 필름의 표면 물성 분석에 대한 연구 (Analysis of Surface Characteristics for Clad Thin Film Materials)

  • 이준하
    • 반도체디스플레이기술학회지
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    • 제17권1호
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    • pp.62-65
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    • 2018
  • In the era of the 4th Industrial Revolution, IoT products of various and specialized fields are being developed and produced. Especially, the generation of the artificial intelligence, robotic technology Multilayer substrates and packaging technologies in the notebook, mobile device, display and semiconductor component industries are demanding the need for flexible materials along with miniaturization and thinning. To do this, this work use FCCL (Flexible Copper Clad Laminate), which is a flexible printed circuit board (PCB), to implement FPCB (Flexible PCB), COF (Chip on Film) Use is known to be essential. In this paper, I propose a transfer device which prevents the occurrence of scratches by analyzing the mechanism of wrinkle and scratch mechanism during the transfer process of thin film material in which the thickness increases while continuously moving in air or solution.

초경합금에 나노결정질 다이아몬드 코팅 시 금속 중간층의 효과 (Effect of Metal Interlayers on Nanocrystalline Diamond Coating over WC-Co Substrate)

  • 나봉권;강찬형
    • 한국표면공학회지
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    • 제46권2호
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    • pp.68-74
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    • 2013
  • For the coating of diamond films on WC-Co tools, a buffer interlayer is needed because Co catalyzes diamond into graphite. W and Ti were chosen as candidate interlayer materials to prevent the diffusion of Co during diamond deposition. W or Ti interlayer of $1{\mu}m$ thickness was deposited on WC-Co substrate under Ar in a DC magnetron sputter. After seeding treatment of the interlayer-deposited specimens in an ultrasonic bath containing nanometer diamond powders, $2{\mu}m$ thick nanocrystalline diamond (NCD) films were deposited at $600^{\circ}C$ over the metal layers in a 2.45 GHz microwave plasma CVD system. The cross-sectional morphology of films was observed by FESEM. X-ray diffraction and visual Raman spectroscopy were used to confirm the NCD crystal structure. Micro hardness was measured by nano-indenter. The coefficient of friction (COF) was measured by tribology test using ball on disk method. After tribology test, wear tracks were examined by optical microscope and alpha step profiler. Rockwell C indentation test was performed to characterize the adhesion between films and substrate. Ti and W were found good interlayer materials to act as Co diffusion barriers and diamond nucleation layers. The COFs on NCD films with W or Ti interlayer were measured as less than 0.1 whereas that on bare WC-Co was 0.6~1.0. However, W interlayer exhibited better results than Ti in terms of the adhesion to WC-Co substrate and to NCD film. This result is believed to be due to smaller difference in the coefficients of thermal expansion of the related films in the case of W interlayer than Ti one. By varying the thickness of W interlayer as 1, 2, and $4{\mu}m$ with a fixed $2{\mu}m$ thick NCD film, no difference in COF and wear behavior but a significant change in adhesion was observed. It was shown that the thicker the interlayer, the stronger the adhesion. It is suggested that thicker W interlayer is more effective in relieving the residual stress of NCD film during cooling after deposition and results in stronger adhesion.