Study of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy |
Lee, Hyo-Sang
(Department of Chemical Engineering, University of Arizona)
Philipossian Ara (Department of Chemical Engineering, University of Arizona) Babu Suryadevara V. (Center for Advanced Materials Processing, Clarkson University) Patri Udaya B. (Center for Advanced Materials Processing, Clarkson University) Hong, Young-Ki (Center for Advanced Materials Processing, Clarkson University) Economikos Laertis (IBM Corporation) Goldstein Michael (Intel Corporation) |
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