• Title/Summary/Keyword: CMOS X-ray 검출기

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A Design of Digital CMOS X-ray Image Sensor with $32{\times}32$ Pixel Array Using Photon Counting Type (포톤 계수 방식의 $32{\times}32$ 픽셀 어레이를 갖는 디지털 CMOS X-ray 이미지 센서 설계)

  • Sung, Kwan-Young;Kim, Tae-Ho;Hwang, Yoon-Geum;Jeon, Sung-Chae;Jin, Seung-Oh;Huh, Young;Ha, Pan-Bong;Park, Mu-Hun;Kim, Young-Hee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.12 no.7
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    • pp.1235-1242
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    • 2008
  • In this paper, x-ray image sensor of photon counting type having a $32{\times}32$ pixel array is designed with $0.18{\mu}m$ triple-well CMOS process. Each pixel of the designed image sensor has an area of loot $100{\times}100\;{\mu}m2$ and is composed of about 400 transistors. It has an open pad of an area of $50{\times}50{\mu}m2$ of CSA(charge Sensitive Amplifier) with x-ray detector through a bump bonding. To reduce layout size, self-biased folded cascode CMOS OP amp is used instead of folded cascode OP amp with voltage bias circuit at each single-pixel CSA, and 15-bit LFSR(Linear Feedback Shift Register) counter clock generator is proposed to remove short pulse which occurs from the clock before and after it enters the counting mode. And it is designed that sensor data can be read out of the sensor column by column using a column address decoder to reduce the maximum current of the CMOS x-ray image sensor in the readout mode.

A Study on the Characteristics of Smartphone Camera as a Medical Radiation Detector (의료 방사선 검출기로써 스마트폰 카메라의 특성에 관한 연구)

  • Kang, Han Gyu;Kim, Ho Chul
    • Journal of the Institute of Electronics and Information Engineers
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    • v.53 no.5
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    • pp.143-151
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    • 2016
  • The aim of this study is to investigate the optimal algorithm to extract medical radiation induced pixel signal from complementary metal-oxide semiconductor (CMOS) sensors of smartphones camera. The pixel intensity and pixel number of smartphone camera were measured as the X-ray dose was increased. The front camera of the smartphone camera has low noise property and excellent dose response as compared to the back camera of the smartphone. The indirect method which uses scintillation crystal in front of the smartphone camera, couldn't improve the X-ray detection efficiency as compared to the direct method which does not use any scintillator in front of the smartphone camera. When we used the algorithm which employing threshold level on the pixel intensity and pixel number, the dose linearity was more higher for the pixel intensity rather for the pixel number. The use of pixel intensity of Y color component which represents the grey scale, would be efficient in terms of the radiation detection efficiency and reducing the complexity of the image processing. We expect that the radiation dose monitoring can be managed effectively and systematically by using the proposed radiation detection algorithm, thus eventually will contribute to the public healthcare.

A Charge Pump Circuit in a Phase Locked Loop for a CMOS X-Ray Detector (CMOS X-Ray 검출기를 위한 위상 고정 루프의 전하 펌프 회로)

  • Hwang, Jun-Sub;Lee, Yong-Man;Cheon, Ji-Min
    • The Journal of Korea Institute of Information, Electronics, and Communication Technology
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    • v.13 no.5
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    • pp.359-369
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    • 2020
  • In this paper, we proposed a charge pump (CP) circuit that has a wide operating range while reducing the current mismatch for the PLL that generates the main clock of the CMOS X-Ray detector. The operating range and current mismatch of the CP circuit are determined by the characteristics of the current source circuit for the CP circuit. The proposed CP circuit is implemented with a wide operating current mirror bias circuit to secure a wide operating range and a cascode structure with a large output resistance to reduce current mismatch. The proposed wide operating range cascode CP circuit was fabricated as a chip using a 350nm CMOS process, and current matching characteristics were measured using a source measurement unit. At this time, the power supply voltage was 3.3 V and the CP circuit current ICP = 100 ㎂. The operating range of the proposed CP circuit is △VO_Swing=2.7V, and the maximum current mismatch is 5.15 % and the maximum current deviation is 2.64 %. The proposed CP circuit has low current mismatch characteristics and can cope with a wide frequency range, so it can be applied to systems requiring various clock speed.

Fabrication of Gd2O2S:Tb fine scintillator film and evaluation of image quality for resolution improvement of X-ray imaging based on CMOS (CMOS 기반 X선 영상의 해상력 향상을 위한 Gd2O2S:Tb 미세형광체 필름 제작 및 영상 질 평가)

  • Kang, Sang-Sik;Choi, Young-Zoon;Jung, Bong-Jae;No, Si-Cheul;Cho, Chan-Hoon;Yoon, In-Chan;Park, Ji-Koon
    • Journal of the Korean Society of Radiology
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    • v.5 no.5
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    • pp.283-287
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    • 2011
  • In this study, fine $Gd_2O_2S$:Tb powder was synthesized by using a low temperature solution-combustion method for a high-resolution digital x-ray imaging detector. From the fabricated phosphor power, the fine scintillator films was fabricated by particle sedimentation method and was investigated the luminescent property. From the experimental results of relative light output as a function of terbium concentration, the highest luminescent efficiency has at 5 wt% Tb concentration, and luminescent intensity decreased rapidly according to quenching effect about higher Tb concentration. Also, the relative light output of $270{\mu}m$-$Gd_2O_2S$:Tb film has 2945 pC/$cm^2$/mR. And light intensity was saturated at higher film thickness. Finally, to evaluate an image acquisition performance of fabricated phosphor, images were obtained by using commercial CMOS sensor and measured the MTF, NPS, and DQE. DQE(0 lp/mm) of fine phosphor film has 37%. But, DQE improvement of fine phosphor film is possible by resolving problem of film fabrication process and has a significant potential in the application of digital radiation imaging system later.

Introduction of Dental X-ray Imaging with New Concept - intra Oral x-ray Tube (신개념 치과용 X-선 영상장치 소개 - 강내형 X-선 튜브)

  • Cho, Sung-Ho;Kim, Dong-Young;Baek, Kwang-Woo;Lee, Re-Na
    • Journal of the Institute of Electronics Engineers of Korea SC
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    • v.48 no.4
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    • pp.94-101
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    • 2011
  • Various kinds of medical imaging devices have been studied to develop periapical radiography. However, there are some problems such as high x-ray exposure rate and pains for patients because of the problems caused by intra-oral sensor based radiography system. In this study, a new concept of periapical radiography, intra oral X-ray tube and detector system, is introduced to solve these problems. This system is made up of miniature X-ray tube based on subminiature thermal electron or cold electron, CMOS based detector, and a body including automatic position and system control devices. In order to confirm the possibility of proposed new concept to periapical radiography, miniature x-ray tube from XOFT corporation is used to develop new x-ray system, and the performance evaluation of this system is performed according to collimator. Also, dental images are compared after acquiring both images from existing system versus new concept of system. As a result, new concept of system showed excellent image. Thus, it is considered that new concept of system will have a significant effect on medical imaging technology.

Fabrication of Bendable Gd2O2S:Tb Intensifying Screen and Evaluation of Fatigue Properties (유연한 Gd2O2S:Tb 증감지 제작 및 피로누적에 대한 영향)

  • Park, Ji-Koon;Yang, Sung-Woo;Jeon, Je-Hoon;Kim, Joo-Hee;Heo, Ye-Ji;Kang, Sang-Sik;Kim, Kyo-Tae
    • Journal of the Korean Society of Radiology
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    • v.11 no.7
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    • pp.611-617
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    • 2017
  • In this study, it was expected that long-term stability against external mechanical external force could be secured if the phosphor layer had ductility. In this study, a bendable $Gd_2O_2S:Tb$ sensitized paper was fabricated by screen printing method and the image uniformity was evaluated through RMS analysis and histogram analysis to investigate the effect of fatigue accumulation due to long-term external force and repetitive external force. As a result, the dominant pixel area is maintained constant and the relative standard deviation is less than 10% for the long-term external force. However, for the repetitive external force, the dominant pixel area is divided into three areas and the image uniformity is adversely affected. Based on these results, it is suggested that the curved surface detector can be applied by securing the mechanical stability against the existing radiation sensitized paper. However, further studies are needed to apply it to the flexible detector. As a result, flexible radiation sensitizers can be applied to various curved surfaces, and it is expected to be applicable to various fields such as nuclear medicine, medical treatment, and industrial fields in the future.

RF Magnetron Sputtering 및 Evaporation을 이용하여 증착한 CdTe 박막의 물성평가

  • Kim, Min-Je;Jo, Sang-Hyeon;Song, Pung-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.345-345
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    • 2012
  • 최근 의료산업에서는 고해상도 및 동영상 구현이 가능한 직접 방식의 X-선 검측센서에서 X-ray 흡수효율이 좋은 반도체 센서(CdTe, CdZnTe 등)와 성숙된 기술, 집적효율이 뛰어난 CMOS 공정을 이용한 제품을 출시하여 대면적화 및 고집적화가 가능하게 되어 응용분야가 점차 확대되고 있는 추세이다. 하지만 이 역시 고 성능의 X-선 동영상 구현을 위해서는 고 해상도 문제, 검출효율 문제, 대면적화의 어려움이 있다. 기존의 X-선 광 도전층의 증착은 증착 속도와 박막 품질에서 우수한 Evaporation 법이 사용되고 있다. 한편, 대면적에 균일한 박막형성이 가능하기 때문에 양산성에서 우월성을 가지는 sputtering법의 경우, 밀도가 높은 소결체 타겟의 제조가 힘들뿐만 아니라 증착 속도가 낮아 장시간 증착 시 낮은 소결밀도로 인한 타겟 Particle 영향으로 인해서 대 면적에 고품질의 박막을 형성하기가 어렵다. 하지만 최근 소결체 타겟 제조기술 발달과 함께, 대면적화와 장시간 증착에 대한 어려움이 해결되고 있어 sputtering 법을 이용한 고품질 박막 제조 기술의 연구가 시급한 실정이다. 본 연구에서는 $50{\times}50$ mm 크기의 non-alkali 유리기판(Corning E2000) 위에 Evaporation과 RF magnetron sputtering을 사용하여 다양한 기판온도 (RT, 100, 200, 300, $350^{\circ}C$)에서 $1{\mu}m$의 두께로 CdTe 박막을 증착하였다. RF magnetron sputtering의 경우 CdTe 단일 타겟(50:50 at%)을 사용하였으며 Base pressure는 약 $5{\times}10^{-6}$ Torr 이하까지 배기하였고, Working pressure는 약 $7.5{\times}10^{-3}$ Torr에서 증착하였다. 시편과 기판 사이의 거리는 70 mm이며 RF 파워는 150 W로 유지하였다. CdTe 박막의 미세구조는 X-ray diffraction (XRD, BRUKER GADDS) 및 Field Emission Scanning Electron Microscopy (FE-SEM, Hitachi)를 사용하여 측정하였다. 또한, 조건별 박막의 조성은 Energy Dispersive X-ray Spectroscopy (EDS, Horiba, 7395-H)을 사용하여 평가하였다. X-선 동영상 장치의 구현을 위해서는 CdTe 다결정 박막의 높은 흡수효율, 전하수집효율 및 SNR (Signal to Noise Ratio) 등의 물성이 요구된다. 이러한 물성을 나타내기 위해서는 CdTe 박막의 높은 결정성이 중요하다. Evaporation과 RF magnetron sputtering로 제작된 CdTe 박막은 공정 온도가 증가함에 따라 기판상에 도달하는 스퍼터 원자의 에너지 증가로 인해서 결정립이 성장한 것을 확인할 수 있었다. 따라서 CdTe 박막이 직접변환방식 고감도 X-ray 검출기 광도 전층 역할을 수행할 수 있을 것으로 기대된다.

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Simulation Study of a Large Area CMOS Image Sensor for X-ray DR Detector with Separate ROICs (센서-회로 분리형 엑스선 DR 검출기를 위한 대면적 CMOS 영상센서 모사 연구)

  • Kim, Myung Soo;Kim, Hyoungtak;Kang, Dong-uk;Yoo, Hyun Jun;Cho, Minsik;Lee, Dae Hee;Bae, Jun Hyung;Kim, Jongyul;Kim, Hyunduk;Cho, Gyuseong
    • Journal of Radiation Industry
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    • v.6 no.1
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    • pp.31-40
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    • 2012
  • There are two methods to fabricate the readout electronic to a large-area CMOS image sensor (LACIS). One is to design and manufacture the sensor part and signal processing electronics in a single chip and the other is to integrate both parts with bump bonding or wire bonding after manufacturing both parts separately. The latter method has an advantage of the high yield because the optimized and specialized fabrication process can be chosen in designing and manufacturing each part. In this paper, LACIS chip, that is optimized design for the latter method of fabrication, is presented. The LACIS chip consists of a 3-TR pixel photodiode array, row driver (or called as a gate driver) circuit, and bonding pads to the external readout ICs. Among 4 types of the photodiode structure available in a standard CMOS process, $N_{photo}/P_{epi}$ type photodiode showed the highest quantum efficiency in the simulation study, though it requires one additional mask to control the doping concentration of $N_{photo}$ layer. The optimized channel widths and lengths of 3 pixel transistors are also determined by simulation. The select transistor is not significantly affected by channel length and width. But source follower transistor is strongly influenced by length and width. In row driver, to reduce signal time delay by high capacitance at output node, three stage inverter drivers are used. And channel width of the inverter driver increases gradually in each step. The sensor has very long metal wire that is about 170 mm. The repeater consisted of inverters is applied proper amount of pixel rows. It can help to reduce the long metal-line delay.

Experimental Study for Phase-contrast X-ray Imaging Based on a Single Antiscatter Grid and a Polychromatic X-ray Source (단일 비산란 그리드 및 다색광 x-선원 기반 위상대조 x-선 영상화 실험 연구)

  • Park, Yeonok;Cho, Hyosung;Lim, Hyunwoo;Je, Uikyu;Park, Chulkyu;Cho, Heemoon;Kim, Kyuseok;Kim, Guna;Park, Soyoung
    • Progress in Medical Physics
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    • v.26 no.4
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    • pp.215-222
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    • 2015
  • In this work, we performed a proof-of-concept experiment for phase-contrast x-ray imaging (PCXI) based on a single antiscatter grid and a polychromatic x-ray source. We established a table-top setup which consists of a focused-linear grid having a strip density of 200 lines/inch, a microfocus x-ray tube having a focal-spot size of about $5{\mu}m$, and a CMOS-type flat-panel detector having a pixel size of $48{\mu}m$. By using our prototype PCXI system and the Fourier demodulation technique, we successfully obtained attenuation, scattering, and differential phase-contrast images of improved visibility from the raw images of several selected samples at x-ray tube conditions of $90kV_p$ and 0.1 mAs. Further, fusion image (e.g., the attenuation+the scattering) may have an advantage in displaying details of the sample's structures that are not clearly visible in the conventional attenuation image. Our experimental results indicate that single-grid-based approach seems a useful method for PCXI with great simplicity and minimal requirements on the setup alignment.

Compressed-sensing (CS)-based Image Deblurring Scheme with a Total Variation Regularization Penalty for Improving Image Characteristics in Digital Tomosynthesis (DTS) (디지털 단층합성 X-선 영상의 화질개선을 위한 TV-압축센싱 기반 영상복원기법 연구)

  • Je, Uikyu;Kim, Kyuseok;Cho, Hyosung;Kim, Guna;Park, Soyoung;Lim, Hyunwoo;Park, Chulkyu;Park, Yeonok
    • Progress in Medical Physics
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    • v.27 no.1
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    • pp.1-7
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    • 2016
  • In this work, we considered a compressed-sensing (CS)-based image deblurring scheme with a total-variation (TV) regularization penalty for improving image characteristics in digital tomosynthesis (DTS). We implemented the proposed image deblurring algorithm and performed a systematic simulation to demonstrate its viability. We also performed an experiment by using a table-top setup which consists of an x-ray tube operated at $90kV_p$, 6 mAs and a CMOS-type flat-panel detector having a $198-{\mu}m$ pixel resolution. In the both simulation and experiment, 51 projection images were taken with a tomographic angle range of ${\theta}=60^{\circ}$ and an angle step of ${\Delta}{\theta}=1.2^{\circ}$ and then deblurred by using the proposed deblurring algorithm before performing the common filtered-backprojection (FBP)-based DTS reconstruction. According to our results, the image sharpness of the recovered x-ray images and the reconstructed DTS images were significantly improved and the cross-plane spatial resolution in DTS was also improved by a factor of about 1.4. Thus the proposed deblurring scheme appears to be effective for the blurring problems in both conventional radiography and DTS and is applicable to improve the present image characteristics.