• Title/Summary/Keyword: CMOS Process

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Fabrication of MFISFET Compatible with CMOS Process Using $SrBi_2Ta_2O_9$(SBT) Materials

  • You, In-Kyu;Lee, Won-Jae;Yang, Il-Suk;Yu, Byoung-Gon;Cho, Kyoung-Ik
    • Transactions on Electrical and Electronic Materials
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    • v.1 no.1
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    • pp.40-44
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    • 2000
  • Metal-ferroelectric-insulator-semoiconductor field effect transistor (MFISFETs) were fabricated using CMOS processes. The Pt/SBT/NO combined layers were etched for forming a conformal gate by using Ti/Cr metal masks and a two step etching method, By the method, we were able to fabricate a small-sized gate with the dimension of $16/4{\mu}textrm{m}$ in the width/length of gate. It has been chosen the non-self aligned source and drain implantation process, We have deposited inter-layer dielectrics(ILD) by low pressure chemical vapor deposition(LPCVD) at $380^{circ}C$ after etching the gate structure and the threshold voltage of p-channel MFISFETs were about 1.0 and -2.1V, respectively. It was also observed that the current difference between the $I_{ON}$(on current) and $I_{OFF}$(off current) that is very important in sensing margin, is more that 100 times in $I_{D}-V_{G}$ hysteresis curve.

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A Design of High-Speed Level-Shifter using Reduced Swing and Low-Vt High-Voltage Devices (Reduced Swing 방식과 Low-Vt 고전압 소자를 이용한 고속 레벨시프터 설계)

  • Seo, Hae-Jun;Kim, Young-Woon;Ryu, Gi-Ju;Ahn, Jong-Bok;Cho, Tae-Won
    • Proceedings of the IEEK Conference
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    • 2008.06a
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    • pp.525-526
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    • 2008
  • This paper proposes a new high-speed level shifter using a special high voltage device with low threshold voltage. Also, novel low voltage swing method is proposed. The high voltage device is a standard LDMOS(Laterally Diffused MOS) device in a $0.18{\mu}m$ CMOS process without adding extra mask or process step to realize it. A level shifter uses 5V LDMOSs as voltage clamps to protect 1.8V NMOS switches from high voltage stress the gate oxide. Also, level-up transition from 1.8V to 5V takes only 1.5ns in time. These circuits do not consume static DC power, therefore they are very suitable for low-power and high-speed interfaces in the deep sub-quarter-micron CMOS technologies.

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$Ta/TaN_x$ Metal Gate Electrodes for Advanced CMOS Devices

  • Lee, S. J.;D. L. Kwong
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.2 no.3
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    • pp.180-184
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    • 2002
  • In this paper, the electrical properties of PVD Ta and $TaN_x$ gate electrodes on $SiO_2$ and their thermal stabilities are investigated. The results show that the work functions of $TaN_x$ gate electrode are modified by the amount of N, which is controlled by the flow rate of $N_2$during reactive sputtering process. The thermal stability of Ta and $TaN_x$ with RTO-grown $SiO_2$ gate dielectrics is examined by changes in equivalent oxide thickness (EOT), flat-band voltage ($V_{FB}$), and leakage current after post-metallization anneal at high temperature in $N_2$ambient. For a Ta gate electrode, the observed decrease in EOT and leakage current is due to the formation of a Ta-incorporated high-K layer during the high temperature annealing. Less change in EOT and leakage current is observed for $TaN_x$ gate electrode. It is also shown that the frequency dispersion and hysteresis of high frequency CV curves are improved significantly by a post-metallization anneal.

A 0.12GHz-1.4GHz DLL-based Clock Generator with a Multiplied 4-phase Clock Using a 0.18um CMOS Process

  • Chi, Hyung-Joon;Lee, Jae-Seung;Sim, Jae-Yoon;Park, Hong-June
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.6 no.4
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    • pp.264-269
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    • 2006
  • A $0.12GHz{\sim}1.4GHz$ DLL-based clock generator with the capability of multiplied four phase clock generation was designed using a 0.18um CMOS process. An adaptive bandwidth DLL with a regulated supply delay line was used for a multiphase clock generation and a low jitter. An extra phase detector (PD) in a reference DLL solves the problem of the initial VCDL delay and achieves a fast lock time. Twice multiplied four phase clocks were generated at the outputs of four edge combiners, where the timing alignment was achieved using a coarse lock signal and the 10 multiphase clocks with T/8 time difference. Those four clocks were combined one more time using a static XOR circuit. Therefore the four times multiplication was achieved. With a 1.8V supply, the rms jitter of 2.1ps and the peak-to-peak jitter of 14.4ps were measured at 1.25GHz output. The operating range is $0.12GHz{\sim}1.4GHz$. It consumes 57mW and occupies 450*325um2 of die area.

Impacts of Process and Design Parameters on the Electrical Characteristics of High-Voltage DMOSFETs (공정 및 설계 변수가 고전압 LDMOSFET의 전기적 특성에 미치는 영향)

  • 박훈수;이영기
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.9
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    • pp.911-915
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    • 2004
  • In this study, the electrical characteristics of high-voltage LDMOSFET fabricated by the existing CMOS technology were investigated depending on its process and design parameter. In order to verify the experimental data, two-dimensional device simulation was carried out simultaneously. The off- state breakdown voltages of n-channel LDMOSFETs were increased nearly in proportional to the drift region length. For the case of decreasing n-well ion implant doses from $1.0\times{10}^{13}/cm^2$ to $1.0\times{10}^{12}/cm^2$, the off-state breakdown voltage was increased approximately two times. The on-resistance was also increased about 76 %. From 2-D simulation, the increase in the breakdown voltage was attributed to a reduction in the maximum electric field of LDMOS imolanted with low dose as well as to a shift toward n+ drain region. Moreover, the on- and off-state breakdown voltages were also linearly increased with increasing the channel to n-tub spacing due to the reduction of impact ionization at the drift region. The experimental and design data of these high-voltage LDMOS devices can widely applied to design smart power ICs with low-voltage CMOS control and high-voltage driving circuits on the same chip.

Bolometer-Type Uncooled Infrared Image Sensor Using Pixel Current Calibration Technique (화소 전류 보상 기법을 이용한 볼로미터 형의 비냉각형 적외선 이미지 센서)

  • Kim, Sang-Hwan;Choi, Byoung-Soo;Lee, Jimin;Oh, Chang-woo;Shin, Jang-Kyoo;Park, Jae-Hyoun;Lee, Kyoung-Il
    • Journal of Sensor Science and Technology
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    • v.25 no.5
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    • pp.349-353
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    • 2016
  • Recently, research on bolometer-type uncooled infrared image sensor which is made for industrial applications has been increasing. In general, it is difficult to calibrate fixed pattern noise (FPN) of bolometer array. In this paper, average-current calibration algorithm is presented for reducing bolometer resistance offset. A resistor which is produced by standard CMOS process, on the average, has a deviation. We compensate for deviation of each resistor using average-current calibration algorithm. The proposed algorithm has been implemented by a chip which is consisted of a bolometer pixel array, average current generators, current-to-voltage converters (IVCs), a digital-to-analog converter (DAC), and analog-to-digital converters (ADCs). These bolometer-resistor array and readout circuit were designed and manufactured by $0.35{\mu}m$ standard CMOS process.

A 4x Time-Domain Interpolation 6-bit 3.4 GS/s 12.6 mW Flash ADC in 65 nm CMOS

  • Liu, Jianwei;Chan, Chi-Hang;Sin, Sai-Weng;U, Seng-Pan;Martins, Rui Paulo
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.16 no.4
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    • pp.395-404
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    • 2016
  • A 6-bit 3.4 GS/s flash ADC in a 65 nm CMOS process is reported along with the proposed 4x time-domain interpolation technique which allows the reduction of the number of comparators from the conventional $2^N-1$ to $2^{N-2}$ in a N-bit flash ADC. The proposed scheme effectively achieves a 4x interpolation factor with simple SR-latches without extra clocking and calibration hardware overhead in the interpolated stage where only offset between the $2^{N-2}$ comparators needs to be calibrated. The offset in SR-latches is within ${\pm}0.5$ LSB in the reported ADC under a wide range of process, voltage supply, and temperature (PVT). The design considerations of the proposed technique are detailed in this paper. The prototype achieves 3.4 GS/s with 5.4-bit ENOB at Nyquist and consumes 12.6 mW power at 1 V supply, yielding a Walden FoM of 89 fJ/conversion-step.

Design and Reliability Analysis of Frequency Locked Loop Circuit with Symmetric Structure (대칭적 구조를 가진 주파수 고정 루프 회로의 설계 및 신뢰성 분석)

  • Choi, Jin-Ho
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.18 no.12
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    • pp.2933-2938
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    • 2014
  • In this paper, the FLL(Frequency Locked Loop) circuit using current conveyor circuit is designed by $0.35{\mu}m$ CMOS process. The FLL circuit is built in a frequency divider, a frequency-to-voltage converter, a voltage subtractor and a oscillator and the circuit blocks have a symmetric structure to improve a reliability characteristics with a process variation. From the simulation results, the variation rate of output frequency is about less than ${\pm}1%$ when the channel length, channel width, resistance and capacitance are varied ${\pm}5%$.

Design of Core of MPEG Decoder for Object-Oriented Video on Network (네트워크 기반 객체 지향형 영상 처리를 위한 MPEG 디코더 코어 설계)

  • 박주현;김영민
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.23 no.8
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    • pp.2120-2130
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    • 1998
  • This paper concerns a design of programmable MPEG decoder for video processing by object unit on network. The decoder can process video data effectively by a embedded controller with stack buffers for supporting OOP (Object-Oriented Programming). The controller offers extended instructions that process several data types including 32bit integer type. In addition to that, we have a vector processor, in this decoder that can execute advanced compensation and prediction by half pixel and SA(Shape Adaptive)-IDCT of MPEG-4. Absolutors and halfers in the vector processor make this architecture extensive to a encoder. We verified the decoder with $0.6\mu\textrm{m}$ 5-Volt CMOS COMPASS library.

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Averaging Current Adjustment Technique for Reducing Pixel Resistance Variation in a Bolometer-Type Uncooled Infrared Image Sensor

  • Kim, Sang-Hwan;Choi, Byoung-Soo;Lee, Jimin;Lee, Junwoo;Park, Jae-Hyoun;Lee, Kyoung-Il;Shin, Jang-Kyoo
    • Journal of Sensor Science and Technology
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    • v.27 no.6
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    • pp.357-361
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    • 2018
  • This paper presents an averaging current adjustment technique for reducing the pixel resistance variation in a bolometer-type uncooled infrared image sensor. Each unit pixel was composed of an active pixel, a reference pixel for the averaging current adjustment technique, and a calibration circuit. The reference pixel was integrated with a polysilicon resistor using a standard complementary metal-oxide-semiconductor (CMOS) process, and the active pixel was applied from outside of the chip. The averaging current adjustment technique was designed by using the reference pixel. The entire circuit was implemented on a chip that was composed of a reference pixel array for the averaging current adjustment technique, a calibration circuit, and readout circuits. The proposed reference pixel array for the averaging current adjustment technique, calibration circuit, and readout circuit were designed and fabricated by a $0.35-{\mu}m$ standard CMOS process.