Fabrication of SOI structures whit buried cavities by SDB and elelctrochemical etch-stop (SDB와 전기화학적 식각정지에 의한 매몰 cavity를 갖는 SOI구조의 제작)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2000.11a
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- pp.579-582
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- 2000