• Title/Summary/Keyword: Buffer-layer

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Effect of Annealing Temperature on the Properties of ITO/TiO2 Films Deposited with RF Magnetron Sputtering (RF 마그네트론 스퍼터링에 의해 증착된 ITO/TiO2 적층 박막의 어닐링 효과)

  • Lee, Young-Jin;Heo, Sung-Bo;Lee, Hak-Min;Kim, Yu-Sung;Kim, Daeil
    • Journal of the Korean Society for Heat Treatment
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    • v.25 no.5
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    • pp.244-248
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    • 2012
  • ITO/$TiO_2$ films were deposited by RF magnetron sputtering on glass substrates and then the effect of vacuum annealing on the structural, optical and electrical properties of the films was investigated. The structural, optical and electrical properties are strongly related to annealing temperature. The films annealed at $300^{\circ}C$ showed a grain size of 40.9 nm, which was larger than as-deposited amorphous films. The optical transmittance in the visible wavelength region also increased, while the electrical resistivity decreased. The ITO/$TiO_2$ films annealed at $300^{\circ}C$ showed the highest optical transmittance of 81% and also showed the lowest electrical resistivity of $3.05{\times}10^{-4}{\Omega}cm$, in this study.

Characterization of YBCO do SQUID fabricated on sapphire substrate for biomagnetic applications (생체자기 응용을 위한 사파이어 기판 위에 제작된 YBCO dc SQUID 의 특성)

  • Lim, Hae-Ryong;Kim, In-Seon;Kim, Dong-Ho;Park, Yong-Ki;Park, Jong-Chul
    • 한국초전도학회:학술대회논문집
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    • v.10
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    • pp.155-159
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    • 2000
  • YBCO step-edge dc SQUID magnetometers on sapphire substrates have been fabricated. CeO2 buffer layer and YBCO films were deposited in situ on the low angle (${\sim}$35$^{\circ}$) steps formed on the sapphire substrates. Typical 5-${\mu}$m-wide junction has R$_n$ of 5 ${\omega}$ and I$_c$ of 50 ${\mu}$A with large I$_c$R$_n$ product of 250 ${\mu}$V at 77K. According to applied bias current, depth of voltage modulation was changed and maximum voltage was measured 16 ${\mu}$V. Field noise of do SQUID was measured 100${\sim}$300 fT/${\surd}^{Hz}$ in the 1 $^{kHz}$, and about 1.5 pT/${\surd}^{Hz}$ in the 1/f region. For ac bias reversal method, field noise was decreased in the 1/f region. The QRS peak of magnetocardiogram was measured 50 pT in the magnetically shielded room.

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YBCO step-edge junction dc SQUID magnetometers with multi-loop pickup coil fabricated on sapphire substrates (사파이어 기판을 사용한 병렬 검출코일 구조의 계단형 모서리 접합 SQUID 자력계)

  • 황태종;김인선;김동호;박용기
    • Progress in Superconductivity
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    • v.5 no.2
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    • pp.94-97
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    • 2004
  • Step-edge Josephson junctions (SEJ) have been fabricated on sapphire substrates with in situ deposited films of CeO$_2$ buffer layer and YBa$_2$Cu$_3$O$_{7}$ films on the low angle steps. Direct coupled SQUID magnetometers with the SEJ were formed on 1 cm X 1 cm R-plane sapphire substrates. Typical 5-${\mu}{\textrm}{m}$-wide Josephson junctions have R$_{N}$ of 3 Ω and I$_{c}$ of 50 $mutextrm{A}$ at 77 K. The direct coupled SQUID magnetometers were designed to have pickup coils of 50-${\mu}{\textrm}{m}$-wide 16 parallel loops on the 1 cm X 1 cm substrates with outer dimension of 8.8 mm X 8.8 mm. The SEJ SQUID magnetometers exhibit relatively low 1/f noise even with dc bias control, and could be stably controlled by flux-locked loops in the magnetically disturbed environment. Field noise of the do SQUID was measured to be 200∼300 fT/Hz$^{1}$2/in the white noise region and about 2 pT/Hz$^{1}$2/ at 1 Hz when measured with dc bias method.hod.d.

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Meter-long coated conductor by R2R PVD methods on RABiTS template

  • Ko, Rock-Kil;Kim, Ho-Sup;Ha, Hong-Soo;Chung, Jun-Ki;Yang, Joo-Saing;Park, Yu-Mi;Shi, Dong-Qi;Song, Kyu-Jeong;Park, Chan;Yoo, Sang-Im;Moon, Seung-Hyun;Kim, Young-Cheol
    • Progress in Superconductivity and Cryogenics
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    • v.6 no.4
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    • pp.13-16
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    • 2004
  • Three film deposition systems (pulsed laser deposition, sputtering, and evaporation) equipped with reel-to-reel metal tape moving apparatus were installed and used to make meter-long coated conductor. Buffer architecture of $CeO_2/YSZ/Y_2O_3$ was deposited on Ni alloy using sputtering, evaporation, and PLD. YBCO superconducting layer was continuously deposited on buffered metal tape by PLD. End-to-end critical current ($I_c$) of 107 A at 77 K, self-field has been achieved in 1 em-wide tape (thickness 0.6∼1.0${\mu}{\textrm}{m}$, tape moving speed 54∼72 cm/hr) over 1 meter length.

EXPERIMENTAL STUDY ON THE EFFECT OF X-IRRADIATION IN THE RAT PERIODONTAL LIGAMENT (X선조사가 발육치근막에 미치는 영향에 관한 실험적 연구)

  • Cho Won Pyo
    • Journal of Korean Academy of Oral and Maxillofacial Radiology
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    • v.10 no.1
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    • pp.9-14
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    • 1980
  • The author studied on the effects of X-ray irradiation to the development of periodontal ligament in gestation rats. They were irradiated in their abdomen with 100, 200 and 300 rads respectively in one shot irradiation with deep radiation therapy equipment (MAXIMAR 250-Ⅲ), In 7th, 14th, 21th and 28th day after delivery, those new born rats were respectively sacrificed with ether anesthesia and removed of their mandibles. After removal, those mandibles were fixed in 10% neutral buffer formalin, decalcified with 5% trichloroacetic acid for 5 days and embedded with paraffine. Staining was performed with H-E, Van Gieson, Mallory azan, Bielshowsky-Gomori silver stain and Halmi's oxytalan fiber stain. The results were as follows: 1. Before tooth eruption, all the fiber: components in dental sac were almost always oriented near the outer enamel epithelial \layer. But in irradiated new born rats, those collagen fiber orientation was more irregular than those of control groups, and this phenomenon was more severe in proportion to the amount of irradiation in the gestation period. 2. Before tooth eruption, the connective tissue fibers in periodontal ligament were stained with lighter in the irradiated groups than those of control groups. Oxytalan fibers of irradiated groups were thin and splitting pattern of their fiber morphology to compare with those of control groups. 3. After tooth eruption, the periodontal ligament fibers of irradiated groups were oriented functionally and their morphology was thick, fine and heavy staining. Oxytalan fibers were revealed with oblique parallel arrangement in the periodontal ligament of irradiated groups.

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Preparation of Novel Magnesium Precursors and MgO Thin Films Growth by Atomic Layer Deposition (ALD)

  • Kim, Hyo-Suk;park, Bo Keun;Kim, Chang Gyoun;Son, Seung Uk;Chung, Taek-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.364.2-364.2
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    • 2014
  • Magnesium oxide (MgO) thin films have attracted great scientific and technological interest in recent decades. Because of its distinguished properties such as a wide band gap (7.2 eV), a low dielectric constant (9.8), a low refractive index, an excellent chemical, and thermal stability (melting point=$2900^{\circ}C$), it is widely used as inorganic material in diverse areas such as fire resistant construction materials, optical materials, protective layers in plasma display panels, buffer layers of multilayer electronic/photonic devices, and perovskite ferroelectric thin films. Precursor used in the ALD requires volatility, stability, and low deposition temperature. Precursors using a heteroleptic ligands with different reactivity have advantage of selective reaction of the heteroleptic ligands on substrate during ALD process. In this study, we have synethesized new heteroleptic magnesium precursors ${\beta}$-diketonate and aminoalkoxide which have been widely used for the development of precursor because of the excellent volatility, chelating effects by increasing the coordination number of the metal, and advantages to synthesize a single precursor. A newly-synthesized Mg(II) precursor was adopted for growing MgO thin films using ALD.

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Duplication-Aware Garbage Collection for Flash Memory-Based Virtual Memory Systems (플래시 메모리 기반의 가상 메모리 시스템을 위한 중복성을 고려한 GC 기법)

  • Ji, Seung-Gu;Shin, Dong-Kun
    • Journal of KIISE:Computer Systems and Theory
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    • v.37 no.3
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    • pp.161-171
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    • 2010
  • As embedded systems adopt monolithic kernels, NAND flash memory is used for swap space of virtual memory systems. While flash memory has the advantages of low-power consumption, shock-resistance and non-volatility, it requires garbage collections due to its erase-before-write characteristic. The efficiency of garbage collection scheme largely affects the performance of flash memory. This paper proposes a novel garbage collection technique which exploits data redundancy between the main memory and flash memory in flash memory-based virtual memory systems. The proposed scheme takes the locality of data into consideration to minimize the garbage collection overhead. Experimental results demonstrate that the proposed garbage collection scheme improves performance by 37% on average compared to previous schemes.

Fabrication and characterization of $YBa_2Cu_3O_7$ step-edge Josephson junctions prepared on sapphire substrates

  • Lim, Hae-Ryong;Kim, In-Seon;Kim, Dong-Ho;Park, Yong-Ki;Park, Jong-Chul
    • Progress in Superconductivity
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    • v.1 no.2
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    • pp.146-150
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    • 2000
  • Step edge Josephson junctions in c-axis oriented $YBa_2Cu_3O_7$ films were fabricated on $CeO_2$ buffered sapphire substrates. The step angle was controlled in the wide range of $20^{\circ}\sim75^{\circ}$ by the Ar ion milling technique. I-V curves of junction fabricated on the thickness ratio of $\sim$0.8 and the step angle of $35^{\circ}$ were exhibited RSJ-like behavior with $I_CR_N$ product of $\sim250{\mu}A$ and critical current density of $\sim2\times10^4A/cm^2$ at 77 K. Critical current of step edge junction was increased linearly with decreasing temperature but the normal resistance was almost constant. Total samples of step edge Josephson junction was satisfied a scaling behavior of $I_CR_N{\propto}(J_C)^{0.5}$.

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Study on the Design and Fabrication of Traveling-Wave Ti:LiNbO$_3$Phase Optical Modulators (진행파형 Ti:LiNbO$_3$위상 광변조기 설계 및 제작에 관한 연구)

  • 정홍식;서정하;엄진섭
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.19 no.9
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    • pp.1782-1792
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    • 1994
  • Ti : $LiNbO_3$ traveling-wave phase optical modulators at wavelength 1.3㎛ have been designed and fabricated, focusing on the optical waveguide and asymmetric coplanar electrode structure. To improve the phase-mismatch of traveling-wave ACPS electrode, the characteristic impedance, effective microwave index, and electrode loss have been presented as a function of geometric parameters including electrode and buffer layer thickness. Low-loss channel optical waveguides on $LiNbO_3$ were fabricated by the Ti diffusion method with $O_2$ water-vapor environment. $2.5{\mu}m$ thick electrode was successfully fabricated by double-spin image reversal process. Modulation bandwidth was limited by a resonance at 2.9 GHz and modulation bandwidth up to 2.5GHz was approxirnately measured.

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플라즈마 전처리를 통한 Inconel 600 합금 위 CNT 합성 수율 증대

  • Sin, Ui-Cheol;Jeong, Gu-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.455-455
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    • 2011
  • 탄소나노튜브(CNT)는 우수한 전기적, 화학적, 기계적 특성으로 인해 전자기술 분야에 있어서 많은 응용이 가능한 나노소재로 각광을 받고 있으며, 실질적으로 CNT를 이용하여 트렌지스터, 전계방출원, 이차 전지 등으로의 응용연구가 진행되고 있다. 일반적으로 CNT 합성을 위해 전이금속의 촉매가 필요하며 또한 촉매가 나노입자로 형성이 되어야 CNT 합성이 가능하다. 기존에는 CNT 합성기판으로 실리콘 웨이퍼 위에 완충층(buffer layer)과 촉매층을 증착하여 사용하였다. 완충층은 촉매가 기판의 내부로 확산하는 것을 막아주며, 촉매의 나노입자 형성을 원활히 함으로 고효율 합성과 구조제어를 가능하게 한다. 그러나 사용되는 완충층은 알루미나 또는 실리콘 산화막과 같은 절연막이기 때문에 CNT 고유의 우수한 전기전도도를 그대로 이용할 수 없다는 문제가 있다. 그러므로 보다 폭넓은 응용을 위해서는, 완충층의 사용없이 전기전도도가 좋은 금속기판에서 CNT를 직접 합성시키는 것이 중요하며, 이때 적절한 크기의 촉매 나노입자를 형성시키기 위한 각종 표면처리법 등이 현재까지 연구되어 왔다. 본 연구에서는 Inconel 600 합금을 합성기판으로 하여 CNT의 고효율 합성에 대하여 연구하였다. 촉매의 나노입자 형성을 위하여 고온 산화처리 및 플라즈마 이온조사처리 등을 실시하였으며, CNT의 고효율 합성에 미치는 영향을 조사하였다. 결과로서, 두 종류의 전처리를 혼합하여 처리한 Inconel 600 기판에서 높은 밀도의 미세한 나노입자가 형성되었고, CNT의 고효율 합성까지 얻을 수 있었다. 이는 Inconel 600 고유의 표면산화특성 및 플라즈마 이온조사에 따른 표면구조 변화가 그 원인으로 사료된다. 발표에서는 고효율 합성결과 및 합성기전에 대하여 보다 자세히 토의하고자 한다.

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