• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1226-1233
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• 2003

Finish machining of a curved surface is often carried out by an NC system with curve interpolation in the field. This NURBS interpolation adopts a feedrate optimizing strategy based on both the geometrical information and dynamic properties. In case of a finish cut using a ball-end mill, the curve interpolator needs to take the machining process into account for more improved surface, while reducing the polishing time. In this study, the effect of low machinability at the bottom of a tool on surface roughness is also considered. A particular curve interpolation algorithm is proposed for generating feedrate commands which are able to control the roughness of a curved surface. The simulation of the machined surface by the proposed algorithm was carried out, and experimental results are presented.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.162-167
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• 2003

Finish machining of a curved surface is often carried out by an NC system with curve interpolation in the field. This NURBS interpolation adopts a feedrate optimizing strategy based on both the geometrical information and dynamic properties. In case of a finish cut using a ball-end mill. the curve interpolator needs to take the machining process into account for more improved surface, while reducing the polishing time. In this study, the effect of low machinability at the bottom of a tool on surface roughness is also considered. A particular curve interpolation algorithm is proposed for generating feedrate commands which are able to control the roughness of a curved surface. The simulation of the machined surface by the proposed algorithm was carried out, and experimental results are presented.

• 한국기계가공학회지
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• 제11권4호
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• pp.31-38
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• 2012

In this paper, we selected primary cutting parameters that influence on surface roughness of cut bottom surface in end-milling for SM25C material. Those are overhang, depth of cut, feed rate and spindle speed. And then performed orthogonal array experiment and ANOVA by Taguchi method to determine that improved level combination of cutting parameters for betterment of working efficiency and surface roughness one of quality characteristics. And we verified a advisability of prediction model by verification test about level combination. From the results, main cutting parameter influences on surface roughness is spindle speed and the next is feed rate.

• 반도체디스플레이기술학회지
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• 제10권3호
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• pp.15-19
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• 2011

The performance of the DRAM is strongly dependent on the purity and surface roughness of the TIT (TiN/Insulator/ TiN) capacitor electrodes. Hence, in the present study, we evaluate the effects of organic contamination and change of surface roughness on the cylindrical TIT capacitor electrodes during the wet cleaning process by various analytical techniques such as TDMS, AFM, XRD and V-SEM. Once the sacrificial oxide and PR (Photo Resist) are removed by HF, the organic contamination and surface oxide films on the bottom Ti/TiN electrode become visible. With prolonged HF process, the surface roughness of the electrode is increased, whereas the amount of oxidized Ti/TiN is reduced due to the HF chemicals. In the 80nm DRAM device fabrication, the organic contamination of the cylindrical TIT capacitor may cause defects like SBD (Storage node Bridge Defect). The SBD fail bit portion is increased as the surface roughness is increased by HF chemicals reactions.

• 한국음향학회지
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• 제22권1호
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• pp.78-87
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• 2003

고주파 (126-㎑) 음향 신호를 이용하여 퇴적층의 구성 매질 및 표면 형태에 따른 산란 신호 변화를 측정하였다. 퇴적층은 구성 매질에 따라 사니질 (sandy mud), 사질 (sand), 자갈 (gravel)의 세가지 경우와 이를 혼합한 경우로 하였으며, 표층 연흔 (ripple) 형태에 따라 연흔과 음파 진행방향이 직각을 이루는 경우 및 평행한 경우를 모의하였다. 평면입사각 변화 및 연흔 구성 형태에 따른 후방산란 강도는 평면입사각에 비례하여 증가하였으며, 연흔 형성 방향과 음파 진행 방향이 이루는 각이 작을수록 삼차원적인 측방산란이 강하게 나타났다. 연흔과 음파가 이루는 각이 증가할수록 후방산란은 증가하였으며, 지음향적 요소 외에도 연흔 형성과 방향에 음파 산란이 강하게 의존함을 알 수 있었다.

• 대한기계학회논문집B
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• 제34권5호
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• pp.539-546
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• 2010

본 연구에서는 격자볼츠만 방법(LBM)을 이용하여 미소채널 내의 유동이 완전 발달 층류유동일 때, 미소채널 내에서의 표면 거칠기 영향에 대하여 수치계산을 수행하였다. 미소채널 내에서 표면 거칠기의 영향을 분석하기 위하여 표면 거칠기의 높이($\varepsilon$), 폭(w), 간격(s)을 조절하여 미소채널에서의 마찰계수(f), 포와이즈수(Po)와 거시적 이론값과 비교하였다. 미소채널에서의 표면 거칠기의 높이가 증가함에 따라 거시적 이론값(Po=24)에 비해서 수치해석으로부터 예측된 값($25{\leq}Po{\leq}29$)이 높게 나타났으며, 표면 거칠기의 폭과 간격은 표면 거칠기의 높이에 비해 미소채널 내부 유동의 변화에 큰 영향을 주지 않는 것을 알 수 있었다. 이 결과로부터 미소채널 내부 유동에서는 표면 거칠기의 영향으로 거시적 층류유동과는 다른 유동현상이 나타난다는 것을 알 수 있었다.

• 한국재료학회지
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• 제13권2호
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• pp.69-73
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• 2003

In this work, $IrO_2$thin films as bottom electrode of ferroelectric capacitors were deposited and characterized. The $IrO_2$films deposited in the conditions of 25, 40 and 50% oxygen ambient by sputtering method were annealed at 600, 700 and $800^{\circ}C$, respectively. It was found that the crystallinity and the surface morphology of $IrO_2$films affected the surface properties and electrical properties of SBT thin films prepared by the MOD method. With increasing temperature, the crystallinity and the roughness of $IrO_2$films were also increasing. This increasing of roughness degraded the surface properties and electrical properties of SBT films. We found an optimum condition of $IrO_2$films as bottom electrode for ferroelectric capacitor at 50% oxygen ambient and $600^{\circ}C$ annealing temperature. Electrical characterizations were performed by using$ IrO_2$bottom electrodes grown at an optimum conditions. The remanent polarization ($P_{r}$) of the Pt/SBT/$IrO_2$/$SiO_2$/Si structure was 2.75 $\mu$C/$\textrm{cm}^2$ at an applied voltage of 3 V. The leakage current density was $1.06${\times}$10^{-3}$ A/$\textrm{cm}^2$ at an applied voltage of 3 V.

• Journal of Mechanical Science and Technology
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• 제15권5호
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• pp.639-645
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• 2001

Experimental investigations were conducted to study forced convection of fully developed turbulent flows in horizontal equilateral triangular ducts with different surface roughness pitch ratios (P/e) of 4, 8, and 16 on one side. The ducts bottom wall was heated uniformly and the other surfaces were thermally insulated. To understand heat transfer enhancement mechanism, heat transfer rates were measured. Smooth triangular ducts were also tested for benchmark purposes. The results were compared with previous results for similarly configured channels, at which they were roughened by regularly spaced transverse ribs in the rectangular and circular channels.

• 한국기계가공학회지
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• 제12권4호
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• pp.81-86
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• 2013

For a 2-dimensional(2D) vibration milling, an excitation work-table was developed using two piezoelectric materials orthogonally arranged, where the trochoidal trajectory of a milling tool is combined with 2 dimensional elliptical vibration of a work-table. Applying 3kHz excitation frequency and 7~8mm amplitude of vibration to micro milling process with brass and nickel materials, the roughness in both bottom and side surface is much more improved compared to the surface by conventional milling process, which is attributed to decreased frictional force, increased cutting speed, and rubbing effect of a 2 dimensional vibration.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.3-7
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• 1996

Metal Matrix Composite(MMC) material of 30% SiC particulate based on A1 matrix was machined by drilling and Electrical Discharge Machining (EDM) processes. When drilling process was executed, surface fracture due to brittle property near the bottom was found. It was also found the possiblity of difficult shape of EDM process for MMC material, but few the research about basic EDM characteristics. Material Removal Rate(MRR) was examined for different conditions and the surface morphology was evaluated by roughness values and Scanning Electron Microscopy(SEM) research. The higher the current is, the more MRR was obtained but the higher MRR was showed around 0.45 duty factor. The average roughness of EDMed surface was slightly changed with increased pulse current and increases with duty factor. The SEM photographs of EDMed surface showed recast region after melting.