• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1226-1233
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• 2003

Finish machining of a curved surface is often carried out by an NC system with curve interpolation in the field. This NURBS interpolation adopts a feedrate optimizing strategy based on both the geometrical information and dynamic properties. In case of a finish cut using a ball-end mill, the curve interpolator needs to take the machining process into account for more improved surface, while reducing the polishing time. In this study, the effect of low machinability at the bottom of a tool on surface roughness is also considered. A particular curve interpolation algorithm is proposed for generating feedrate commands which are able to control the roughness of a curved surface. The simulation of the machined surface by the proposed algorithm was carried out, and experimental results are presented.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.162-167
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• 2003

Finish machining of a curved surface is often carried out by an NC system with curve interpolation in the field. This NURBS interpolation adopts a feedrate optimizing strategy based on both the geometrical information and dynamic properties. In case of a finish cut using a ball-end mill. the curve interpolator needs to take the machining process into account for more improved surface, while reducing the polishing time. In this study, the effect of low machinability at the bottom of a tool on surface roughness is also considered. A particular curve interpolation algorithm is proposed for generating feedrate commands which are able to control the roughness of a curved surface. The simulation of the machined surface by the proposed algorithm was carried out, and experimental results are presented.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.4
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• pp.31-38
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• 2012

In this paper, we selected primary cutting parameters that influence on surface roughness of cut bottom surface in end-milling for SM25C material. Those are overhang, depth of cut, feed rate and spindle speed. And then performed orthogonal array experiment and ANOVA by Taguchi method to determine that improved level combination of cutting parameters for betterment of working efficiency and surface roughness one of quality characteristics. And we verified a advisability of prediction model by verification test about level combination. From the results, main cutting parameter influences on surface roughness is spindle speed and the next is feed rate.

• Journal of the Semiconductor & Display Technology
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• v.10 no.3
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• pp.15-19
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• 2011

The performance of the DRAM is strongly dependent on the purity and surface roughness of the TIT (TiN/Insulator/ TiN) capacitor electrodes. Hence, in the present study, we evaluate the effects of organic contamination and change of surface roughness on the cylindrical TIT capacitor electrodes during the wet cleaning process by various analytical techniques such as TDMS, AFM, XRD and V-SEM. Once the sacrificial oxide and PR (Photo Resist) are removed by HF, the organic contamination and surface oxide films on the bottom Ti/TiN electrode become visible. With prolonged HF process, the surface roughness of the electrode is increased, whereas the amount of oxidized Ti/TiN is reduced due to the HF chemicals. In the 80nm DRAM device fabrication, the organic contamination of the cylindrical TIT capacitor may cause defects like SBD (Storage node Bridge Defect). The SBD fail bit portion is increased as the surface roughness is increased by HF chemicals reactions.

• The Journal of the Acoustical Society of Korea
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• v.22 no.1
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• pp.78-87
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• 2003

High-frequency (126-㎑) bottom backscattering measurements with various bottom types were conducted at the water tank in Ocean Acoustic Laboratory, Hanyang University. For the purpose of investigating the energy distribution of bottom scattering with various bottom types, the sediment was varied with gravel, sand, sandy mud and mixed bottoms. To examine the anisotropic nature of the scattering due to the orientations of bottom ripple, the footprints were made transverse and longitudinal to the direction of incident wave. The total scattering characteristics are that the larger grazing angles the larger backscattering strengths become and backscattering strengths for a transverse ripple case are higher than those of longitudinal ripple case. finally, the variations of scattering strength depend mainly on the ripple's orientation.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.5
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• pp.539-546
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• 2010

In this paper, lattice Boltzmann method(LBM) results for a laminar flow in a microchannel with rough surface are presented. The surface roughness is modeled as an array of rectangular modules placed on the top and bottom surface of a parallel-plate channel. The effects of relative surface roughness, roughness distribution, and roughness size are presented in terms of the Poiseuille number. The roughness distribution characterized by the ratio of the roughness height to the spacing between the modules has a negligible effect on the flow and friction factors. Finally, a significant increase in the Poiseuille number is observed when the surface roughness is considered, and the effects of roughness on the microflow field mainly depend on the surface roughness.

• Korean Journal of Materials Research
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• v.13 no.2
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• pp.69-73
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• 2003

In this work, $IrO_2$thin films as bottom electrode of ferroelectric capacitors were deposited and characterized. The $IrO_2$films deposited in the conditions of 25, 40 and 50% oxygen ambient by sputtering method were annealed at 600, 700 and $800^{\circ}C$, respectively. It was found that the crystallinity and the surface morphology of $IrO_2$films affected the surface properties and electrical properties of SBT thin films prepared by the MOD method. With increasing temperature, the crystallinity and the roughness of $IrO_2$films were also increasing. This increasing of roughness degraded the surface properties and electrical properties of SBT films. We found an optimum condition of $IrO_2$films as bottom electrode for ferroelectric capacitor at 50% oxygen ambient and $600^{\circ}C$ annealing temperature. Electrical characterizations were performed by using$ IrO_2$bottom electrodes grown at an optimum conditions. The remanent polarization ($P_{r}$) of the Pt/SBT/$IrO_2$/$SiO_2$/Si structure was 2.75 $\mu$C/$\textrm{cm}^2$ at an applied voltage of 3 V. The leakage current density was $1.06${\times}$10^{-3}$ A/$\textrm{cm}^2$ at an applied voltage of 3 V.

• Journal of Mechanical Science and Technology
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• v.15 no.5
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• pp.639-645
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• 2001

Experimental investigations were conducted to study forced convection of fully developed turbulent flows in horizontal equilateral triangular ducts with different surface roughness pitch ratios (P/e) of 4, 8, and 16 on one side. The ducts bottom wall was heated uniformly and the other surfaces were thermally insulated. To understand heat transfer enhancement mechanism, heat transfer rates were measured. Smooth triangular ducts were also tested for benchmark purposes. The results were compared with previous results for similarly configured channels, at which they were roughened by regularly spaced transverse ribs in the rectangular and circular channels.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.4
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• pp.81-86
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• 2013

For a 2-dimensional(2D) vibration milling, an excitation work-table was developed using two piezoelectric materials orthogonally arranged, where the trochoidal trajectory of a milling tool is combined with 2 dimensional elliptical vibration of a work-table. Applying 3kHz excitation frequency and 7~8mm amplitude of vibration to micro milling process with brass and nickel materials, the roughness in both bottom and side surface is much more improved compared to the surface by conventional milling process, which is attributed to decreased frictional force, increased cutting speed, and rubbing effect of a 2 dimensional vibration.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.3-7
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• 1996

Metal Matrix Composite(MMC) material of 30% SiC particulate based on A1 matrix was machined by drilling and Electrical Discharge Machining (EDM) processes. When drilling process was executed, surface fracture due to brittle property near the bottom was found. It was also found the possiblity of difficult shape of EDM process for MMC material, but few the research about basic EDM characteristics. Material Removal Rate(MRR) was examined for different conditions and the surface morphology was evaluated by roughness values and Scanning Electron Microscopy(SEM) research. The higher the current is, the more MRR was obtained but the higher MRR was showed around 0.45 duty factor. The average roughness of EDMed surface was slightly changed with increased pulse current and increases with duty factor. The SEM photographs of EDMed surface showed recast region after melting.