Growth and Characteristics of IrO2 Thin Films for Application as Bottom Electrodes of Ferroelectric Capacitors |
Hur, Jae-Sung
(Department of Materials Science & Engineering, Korea University)
Choi, Hoon-Sang (Department of Materials Science & Engineering, Korea University) Kim, Do-Young (Department of Materials Science & Engineering, Korea University) Jang, Yu-Min (Department of Materials Science & Engineering, Korea University) Lee, Jang-Hyeok (Department of Materials Science & Engineering, Korea University) Choi, In-Hoon (Department of Materials Science & Engineering, Korea University) |
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