The Effects of Organic Contamination and Surface Roughness on Cylindrical Capacitors of DRAM during Wet Cleaning Process |
Ahn, Young-Ki
(School of Mechanical Engineering)
Ahn, Duk-Min (Samsung Electronics) Yang, Ji-Chul (Samsung Electronics) Kulkarni, Atul (School of Mechanical Engineering) Choi, Hoo-Mi (SKKU Advanced Institute of Nanotechnology) Kim, Tae-Sung (School of Mechanical Engineering) |
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