• Transactions on Electrical and Electronic Materials
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• v.6 no.4
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• pp.135-139
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• 2005

In this paper, negative SU-8 photoresist processed at low temperature is characterized in terms of delamination. Based on a $3^3$ factorial designed experiment, 27 samples are fabricated, and the degree of delamination is measured for each. In addition, nine samples are fabricated for the purpose of verification. Employing the. neural network modeling technique, a process model is established, and response surfaces are generated to investigate degree of delamination associated with three process parameters: post exposure bake (PEB) temperature, PEB time, and exposure energy. From the response surfaces generated, two significant parameters associated with delamination are identified, and their effects on delamination are analyzed. Higher PEB temperature at a fixed PEB time results in a greater degree of delamination. In addition, a higher dose of exposure energy lowers the temperature at which the delamination begins and also results in a larger degree of delamination. These results identify acceptable ranges of the three process variables to avoid delamination of SU-8 film, which in turn might lead to potential defects in MEMS device fabrication.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.25 no.12
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• pp.1844-1852
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• 2001

Recent developments in microfluidic devices based on microelectromechanical systems (MEMS) technique find many practical applications, which include electronic chip cooling devices, power MEMS devices, micro sensors, and bio-medical devices among others. For the design of such micro devices, flows characteristics inside a microchannel have to be clarified which exhibit somewhat different characteristics compared to conventional flows in a macrochannel. In the present study microchannels of various hydraulic diameters are fabricated on a silicon wafer to study the pressure drop characteristics. The effect of abrupt contraction and expansion is also studied. It is found from the results that the friction factor in a straight microchannel is about 15% higher than that in a conventional macrochannel, and the loss coefficients in abrupt expansion and contraction are about 10% higher than that obtained through conventional flow analysis.

• Journal of the Korean Physical Society
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• v.73 no.10
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• pp.1473-1478
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• 2018

In this study, we have developed a simple and cost-effective method to prevent edge bead formation by covering the edge of a chip-level substrate with heat-resistant tape during patterning using SU-8. Edge beads are a fundamental problem in photoresists and are particularly notable in high-viscosity fluids and thick coatings. Edge beads can give rise to an air gap between the substrate and the patterning mask during UV exposure, which results in non-uniform patterns. Furthermore, the sample may break since the edge bead is in contact with the mask. In particular, the SU-8 coating thickness of the chip-level substrates used in MEMS or BioMEMS may not be properly controlled because of the presence of edge beads. The proposed method to solve the edge bead problem can be easily and economically utilized without the need for a special device or chemicals. This method is simple and prevents edge bead formation on the sample substrate. Despite the small loss in the taping area, the uniformity of the SU-8 coating is improved from 50.9% to 5.6%.

• KSTLE International Journal
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• v.9 no.1_2
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• pp.10-12
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• 2008

Silicon micro-patterns were fabricated on Si (100) wafers using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and micro-channels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating Z-DOL (perfluoropolyether, PFPE) thin films. The surfaces were then evaluated for their micro-friction behavior in comparison with those of bare Si (100) flat, Z-DOL coated Si (100) flat and uncoated Si patterns. Experimental results showed that the chemically treated (Z-DOL coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the test materials. The results indicate that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro/Nano-Electro-Mechanical-Systems (MEMS/NEMS).

• Journal of KIISE:Computing Practices and Letters
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• v.13 no.7
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• pp.433-441
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• 2007

The bio-Sensors, which are sensing the vital signs of human bodies, are largely used by the medical equipment. Recently, the sensor network technology, which composes of the sensor interface for small-seize hardware, processor, the wireless communication module and battery in small sized hardware, has been extended to the area of bio-senor network systems due to the advances of the MEMS technology. In this paper we have suggested a design and implementation of a health care information system(called u-EMS) using a bio-sensor network technology that is a combination of the bio-sensor and the sensor network technology. In proposed system, we have used the following vital body sensors such as EKG sensor, the blood pressure sensor, the heart rate sensor, the pulse oximeter sensor and the glucose sensor. We have collected various vital sign data through the sensor network module and processed the data to implement a health care measurement system. Such measured data can be displayed by the wireless terminal(PDA, Cell phone) and the digital-frame display device. Finally, we have conducted a series of tests which considered both patient's vital sign and context-awared information in order to improve the effectiveness of the u-EMS.

• Polymer Science and Technology
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• v.15 no.2
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• pp.173-183
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• 2004

노벨 물리학상을 수상한 파인만 (Richard p. Feynman) 교수는 1959년 한 강연회에서 "There's Plenty of Room at the Bottom"이라는 내용을 발표한 바 있다. 이는 나노 세계의 가치를 처음으로 알린 계기가 되었으며, 21세기를 이끌어가는 대표적인 과학기술로 자리 잡게 만드는 시발점이 되었다. 20세기 후반부터 나노기술에 대한 관심과 투자는 신기술의 개발뿐만 아니라 종래 기술의 단점 개선과 기술의 향상을 도모하였다. 이로 인하여 기술간의 융합이 이루어졌으며, 학문간의 벽은 점차 사라져 가고 있다. 즉 바이오기술과 나노 (예, BioMEMS), 나노소재를 이용한 환경기술 등 기술융합은 진보된 새로운 기술들을 이끌어가고 있다.(중략)

• Journal of the Korean Society for Precision Engineering
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• v.25 no.11
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• pp.22-29
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• 2008

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.3.2-3.2
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• 2009

Microfluidics and BioMEMStechnology has increasingly been used as a tool for studying small volumes oftissue and even individual cells. One of the most important benefits ofmicrofluidic technology is the potential to build devices that analyze and sortmammalian cells. The "sorting problem" typically requires that a fewcells be selected and isolated from a larger population of hundreds, thousandsor even millions of other cells. For example, cancer tumor cells may resideamong a large population of healthy cells, but it would be of great interest toidentify, isolate and study only the cancer cells. In another application, onemay want to determine the number of white blood cells within a sample of blood.We have developed microfluidic devices that enable researchers to select cellsfrom a population by a variety of methods, including antibody staining,dielectrophoretic selection, and physical size selection. These devices haveapplications in cancer research where cancer cells must be identified fromnormal tissue, but where only small samples of tissue are available. In thistalk, we will present some of our microfluidic cell sorting devices, discusstheir physical principles, and their use in biological applications.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.1 s.244
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• pp.1-7
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• 2006

A system for the electrical bio signal detection for a microchip is proposed. Gold nanoparticles were selected for the system for their bio-compatibility and potential for higher sensitivity with large surface areas. For the estimation of the conductivity of gold nanoparticles, microchips with interdigitated microelectrodes of 3,5,7 and $9\;{\mu}m$ spacing were fabricated. In addition, a simulation program was developed to estimate the electrical resistance of the fabricated microchip. The results of conduction simulation for the nanoparticles show good agreements with experimental data, which validate the proposed system.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.10
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• pp.583-588
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• 2000

This paper presents the design and fabrication of micro electromagnetic vibration silicon elastic body characterized with small size, high efficiency and selective frequency bandwidth for Bio-MENS applications, such as implantable middle ear hearing aid. The presented electromagnetic vibration transducer that composed of wounded coil, permanent magnet and 4-beam cross type elastic body is fabricated by using of micromachining technology. The fabricated transducer has experimental characteristics, that is 5 nm/mA of an energy trasfer rate at the frequency range of 100∼2800 Hz. It has a size of $2{\times}2{\times}2.5\;mm^3$.