Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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Flow Characteristics in a Microchannel Fabricated on a Silicon Wafer

실리콘 웨이퍼 상에 제작된 미소 유로에서의 유동특성

  • Kim, Hyeong-U (Dept.of Mechanical Engineering, Graduate School of Sogang University) ;
  • Won, Chan-Sik (Dept.of Mechanical Engineering, Graduate School of Sogang University) ;
  • Jeong, Si-Yeong (Dept.of Mechanical Engineering, Sogang University) ;
  • Heo, Nam-Geon (Dept.of Mechanical Engineering, Sogang University)
  • 김형우 (서강대학교 대학원 기계공학과) ;
  • 원찬식 (서강대학교 대학원 기계공학과) ;
  • 정시영 (서강대학교 기계공학과) ;
  • 허남건 (서강대학교 기계공학과)
  • Published : 2001.12.01
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Abstract

Recent developments in microfluidic devices based on microelectromechanical systems (MEMS) technique find many practical applications, which include electronic chip cooling devices, power MEMS devices, micro sensors, and bio-medical devices among others. For the design of such micro devices, flows characteristics inside a microchannel have to be clarified which exhibit somewhat different characteristics compared to conventional flows in a macrochannel. In the present study microchannels of various hydraulic diameters are fabricated on a silicon wafer to study the pressure drop characteristics. The effect of abrupt contraction and expansion is also studied. It is found from the results that the friction factor in a straight microchannel is about 15% higher than that in a conventional macrochannel, and the loss coefficients in abrupt expansion and contraction are about 10% higher than that obtained through conventional flow analysis.

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References

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