• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.3
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• pp.209-216
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• 2008

The application of focused ion beam (FIB) depends on the optimal interaction of the operation parameters between operating parameters which control beam and samples on the stage during the FIB deposition process. This deposition process was investigated systematically in C precursor gas. Under the fine beam conditions (30kV, 40nm beam size, etc), the effect of considered process parameters - dwell time, beam overlap, incident beam angle to tilted surface, minimum frame time and pattern size were investigated from deposition results by the design of experiment. For the process analysis, influence of the parameters on FIB-CVD process was examined with respect to dimensions and constructed shapes of single and multi- patterns. Throughout the single patterning process, optimal conditions were selected. Multi-patterning deposition were presented to show the effect of on-stage parameters. The analysis have provided the sequent beam scan method and the aspect-ratio had the most significant influence for the multi-patterning deposition in the FIB processing. The bitmapped scan method was more efficient than the one-by-one scan type method for obtaining high aspect-ratio (Width/Height > 1) patterns.

• Applied Microscopy
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• v.36 no.spc1
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• pp.25-33
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• 2006

Nanofabrication with finely focused ion and electron beams is reviewed, and position and size controlled fabrication of nano-metals and -semiconductors is demonstrated. A focused ion beam (FIB) interface attached to a column of 200keV transmission electron microscope (TEM) was developed. Parallel lines and dots arrays were patterned on GaAs, Si and $SiO_2$ substrates with a 25keV $Ga^+-FIB$ of 200nm beam diameter at room temperature. FIB nanofabrication to semiconductor specimens caused amorphization and Ga injection. For the electron beam induced chemical vapor deposition (EBI-CVD), we have discovered that nano-metal dots are formed depending upon the beam diameter and the exposure time when decomposable gases such as $W(CO)_6$ were introduced at the beam irradiated areas. The diameter of the dots was reduced to less than 2.0nm with the UHV-FE-TEM, while those were limited to about 15nm in diameter with the FE-SEM. Self-standing 3D nanostructures were also successfully fabricated.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.339-339
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• 2000

In this parer, a method of measuring the size of defects on the wall and restructing the defect image of 3-dimension is developed based on the tracking algorithm of a camera position which uses the inclination angle of line slit beam for overcoming the difficulty of the corresponding problem identifying the image point in the both image. In the experiments, an algorithm for estimating the horizontal angle of CCD camera is presented and validated by applying it to the measurement of area and length under the variations of both the distance and the angle of CCD camera. And its performance is compared to that of the rotating and mapping method of image which has the Euclidian distance.

• Steel and Composite Structures
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• v.20 no.5
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• pp.963-981
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• 2016

A nonlocal trigonometric shear deformation beam theory based on neutral surface position is developed for bending, buckling, and vibration of functionally graded (FG) nanobeams using the nonlocal differential constitutive relations of Eringen. The present model is capable of capturing both small scale effect and transverse shear deformation effects of FG nanobeams, and does not require shear correction factors. The material properties of the FG nanobeam are assumed to vary in the thickness direction. The equations of motion are derived by employing Hamilton's principle, and the physical neutral surface concept. Analytical solutions are presented for a simply supported FG nanobeam, and the obtained results compare well with those predicted by the nonlocal Timoshenko beam theory.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.9
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• pp.1220-1228
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• 2003

The mirage technique is proved to be powerful in measuring the thermal diffusivity of materials. In particular, its contactless nature makes it suitable for delicate samples and microscale structures. In this study, thermal-wave-coupling method is developed in a general form for both thermally thin and thick samples. In the suggested measuring scheme, the probe beam can be positioned close to the pump beam and the absolute position need not be measured. Therefore the new scheme provides a relatively simple yet effective way to determine the thermal diffusivity of thermally thick samples. Thermal diffusivities of bulk samples like Ni and Al were measured and the characteristics of mirage signal for a thin film were observed by using the mirage experimental setup. The apparent thermal diffusivity was measured by varying such parameters as probe beam height, size of pump beam, power of pump beam, and surface condition of sample. From the practical standpoint, it is shown that the size of the pump beam is the most important factor for accurate thermaldiffusivity measurement. Experiments using thin-film samples show that the thermal diffusivity of a substrate covered with thin film can be measured by photothermal mirage signals.

• Steel and Composite Structures
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• v.6 no.1
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• pp.15-31
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• 2006

Beams with web openings are an attractive system for multi-storey buildings where it is always desirable to have long spans. The openings in the web of steel beams enable building services to be integrated within the constructional depth of a floor, thus reducing the total floor depth. At the same time, the increased beam depth can give high bending moment capacity, thus allowing long spans. However, almost all of the research studies on web openings have been concentrated on beam behaviour at ambient temperature. In this paper, a preliminary numerical analysis using ABAQUS is conducted to develop a general understanding of the effect of the presence of web opening on the behaviour of steel beams at elevated temperatures. It is concluded that the presence of web openings will have substantial influence on the failure temperatures of axially unrestrained beams and the opening size at the critical position in the beam is the most important factor. For axially restrained beams, the effect of web openings on the beam's large deflection behaviour and catenary force is smaller and it is the maximum opening size that will affect the beam's response at very high temperatures. However, it is possible that catenary action develops in beams with web openings at temperatures much lower than the failure temperatures of the same beam without axial restraint that are often used as the basis of current design.

• Radiation Oncology Journal
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• v.7 no.2
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• pp.293-297
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• 1989

Electron contamination due to the interaction between radiation beam and material was analyzed for the factors such as source-skin distance (SSD), field size, tray characteristics and position of filter, which can affect the surface dose in Cobalt teletherapy. Surface dose in open beam was more influenced by SSD with increasing field size. Relative surface charge (RSC) increased with the use of tray (solid, circular hole, slotted), compared with open beam, which is thought to be due to increased electron contamination of the tray. To reduce the surface dose, 0.4mm thick Lipowitz metal filter was used. Compared with open beam, RSC decreased by 8.8%, 11.3%, 13.3%, 16.6%, 19.3% and 21.7% for the field size of $5{\times}5$, $10{\times}10$, $15{\times}15$, $20{\times}20$, $25{\times}25$ and $30{\times}30cm^2$, respectively. On the contrary, use of Lipowitz metal filter increased RSC at 60cm or less SSD. Surface dose was effectively reduced with Lpowitz metal filter placed right below solid tray in Cobalt teletherapy.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2014.10a
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• pp.693-695
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• 2014

Radioactive isotopes for radiation diagnosis is production by using Cyclotron like a PET. Radioactive isotopes is influenced product yield according to shape and size of the proton beam and target irradiation position by cyclotron. And to develop a device for measuring the distribution of the beam to increase the loss of the beam. Beam measuring device is measured vertically beam current according move the two wires. In this way, by using the beam current value in each position you are able to know the cross section and location information of the beam. By scanning cross-section for X-axis Y-axis of beam acquires data of beam. Print this into 2D graph, and analyze the result. You can save this result by documentation process.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.527-527
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• 2012

In the Pohang Light Source (PLS), a major upgrade (PLS-II) of existing machine had been performed in last 3 years. Big improvements in beam parameters are expected from this major upgrade and various diagnostic instruments were installed to measure them. These include beam position monitor, beam current monitor, tune monitor, scraper, beam loss monitor, photon beam monitor, beam size monitor, streak camera, and so on. In this work, we would like to briefly introduce diagnostic instruments of the PLS-II and present measurement results in the commissioning process of the PLS-II.

• Particle and aerosol research
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• v.8 no.1
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• pp.29-35
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• 2012

The Faraday cup electrode of different size has been developed and evaluated to investigate the diffusion effect of particles by Brownian motion in a particle beam mass spectrometer(PBMS). Particles which focused and accelerated by aerodynamic lens are charged to saturation in an electron beam, and then deflected electrostatically into a Faraday cup detector for measurement of the particle current. The concentration of particles is converted from currents detected by Faraday cup. Measurements of particle current as a function of deflection voltage are combined with measured relationships between particle velocity and diameter, charge and diameter, and mass and diameter, to determine the particle size distribution. The particle currents were measured using 5, 10, 20, 40 mm sized Faraday cup that can be move to one direction by motion shaft. The current difference for each sizes as a function of position was compared to figure out diffusion effect during transport. Polystyrene latex(PSL) 100, 200 nm sized standard particles were used for evaluation. The measurement using 5 mm sized Faraday cup has the highest resolution in a diffusion distance and the smaller particles had widely diffused.