Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

Development of Photothermal Mirage Technique for Measuring Thermal Diffusivity

열확산도 측정을 위한 광열 신기루 기법 개발

  • 최선락 (포항공과대학교 기계공학과) ;
  • 이주철 (포항공과대학교 기계공학과) ;
  • 김동식 (포항공과대학교 기계공학과)
  • Published : 2003.09.01
Download PDF
⟨ Previous Next ⟩

Abstract

The mirage technique is proved to be powerful in measuring the thermal diffusivity of materials. In particular, its contactless nature makes it suitable for delicate samples and microscale structures. In this study, thermal-wave-coupling method is developed in a general form for both thermally thin and thick samples. In the suggested measuring scheme, the probe beam can be positioned close to the pump beam and the absolute position need not be measured. Therefore the new scheme provides a relatively simple yet effective way to determine the thermal diffusivity of thermally thick samples. Thermal diffusivities of bulk samples like Ni and Al were measured and the characteristics of mirage signal for a thin film were observed by using the mirage experimental setup. The apparent thermal diffusivity was measured by varying such parameters as probe beam height, size of pump beam, power of pump beam, and surface condition of sample. From the practical standpoint, it is shown that the size of the pump beam is the most important factor for accurate thermaldiffusivity measurement. Experiments using thin-film samples show that the thermal diffusivity of a substrate covered with thin film can be measured by photothermal mirage signals.

Keywords

References

  1. Cahill, D.G, 1990, 'Thermal Conductivity Measurement from 30 to 750 K: the 3 Omega Method,' Review of Scientific Instruments, Vol. 61, pp. 802-808 https://doi.org/10.1063/1.1141498
  2. Lee, S.M. and Cahill, D.G, 1997, 'Heat Transport in Thin Dielectric films,' Journal of Applied Physics, Vol. 81, pp. 2590-2595 https://doi.org/10.1063/1.363923
  3. Park, H.K., Grigoropoulos, C.P. and Tam, A.C., 1995, 'Optical Measurements of Thermal Diffusivity of a Material,' International Journal of Thermophysics, Vol. 16, pp. 973-995 https://doi.org/10.1007/BF02093477
  4. Kading, O., Skurk, H. and Goodson, K.E., 1994, 'Thermal Conduction in Metallized Silicon-Dioxide Layers on Silicon,' Applied Physics Letters, Vol. 65, pp. 1629-1631 https://doi.org/10.1063/1.112933
  5. Bincheng, Li., Pottier, L., Roger, J.P., Fournier, D. and Welsch, E., 2000, 'Thermal Characterization of Film-on-Substrate Systems with Modulated Thermoreflectance Microscopy,' Review of Scientific Instruments, Vol. 71, pp. 2154-2160 https://doi.org/10.1063/1.1150598
  6. Bhusari, D.M., Teng, C.W., Chen, K.H., Wei, S.L. and Chen, L.C., 1997, 'Traveling Wave Method for Measurement of Thermal Conductivity of Thin Films,' Review of Scientific Instruments, Vol. 68, pp. 4180-4183 https://doi.org/10.1063/1.1148364
  7. Dezhong, Zhu., Dongming, He., Mingqing, Zheng. and Yuqin, Gu., 1999, Measurement of the Thermal Diffusivity of Thin Materials Using an Infrared Thermal Wave Imaging Technique, Heat Transfer Asian Research, Vol. 28, pp. 89-94 https://doi.org/10.1002/(SICI)1523-149X(1999)28:2<89::AID-HTJ2>3.3.CO;2-D
  8. Cheng, J.C., Wu, L. and Zhang, S.Y., 1994, 'Thermoelastic Response of Pulsed Photothermal Deformation of Thin Plates,' Journal of Applied Physics, Vol. 76, pp. 716-722 https://doi.org/10.1063/1.357815
  9. Bennis, G.L., Vyas, R., Gupta, R., Ang, S. and Brown, W.D., 1998, Thermal Diffusivity Measurement of Solid Materials by the Pulsed Photothermal Displacement Technique,' Journal of Applied Physics, Vol. 84, pp. 3602-3610 https://doi.org/10.1063/1.368535
  10. Olmstead, M.A., Amer, N.M., Kohn, S., Fournier, D. and Boccara, A.C., 1983, 'Photothermal Displacement Spectroscopy: An Optical Probe for Solids and Surfaces,' Applied Physics A-Solids & Surfaces, Vol. A32, pp. 141-154 https://doi.org/10.1007/BF00616610
  11. Li, B.C., 1990, 'Three-Dimensionl Theory of Pulsed Photohermal Deformation,' Journal of Applied Physics, Vol. 68, pp. 482-487 https://doi.org/10.1063/1.346817
  12. Ogawa, E.T., Chuan, H.U. and Ho, P.S., 1999, 'Thermal Diffusivity Measurement of Polymeric Thin Films Using the Photothermal Displacement Technique. I. Free-Standing Film Case,' Journal of Applied Physics, Vol. 86, pp. 6018-6027 https://doi.org/10.1063/1.371649
  13. Chuan, H.U., Ogawaa, E.T. and Ho, P.S., 1999, 'Thermal Diffusivity Measurement of Polymeric Thin Films Using the Photothermal Displacement Technique. II. On-Wafer Measurement,' Journal of Applied Physics, Vol. 86, pp. 6028-6038 https://doi.org/10.1063/1.371650
  14. Salazar, A., Sanchez-Lavega, A. and Fernandez, J., 1989, 'Theory of Thermal Diffusivity Determination by the Mirage Technique in Solids,' Journal of Applied Physics, Vol. 65, pp. 4150-4156 https://doi.org/10.1063/1.343320
  15. Salazar, A., Sanchez-Lavega, A. and Fernandez, J., 1991, 'Thermal Diffusivity Measurements in solids by the Mirage Technique: Experimental Results,' Journal of Applied Physics, Vol. 69, pp. 1216-1223 https://doi.org/10.1063/1.347306
  16. Rantala, J., Jaarinen, J. and P.K. Kuo, P.K., 1992, Photoacoustic and Photothermal Phenomena III, Springer, Berlin, p. 189
  17. Rantala, J., Wei, L., Kuo, P.K., Jaarinen, J. Luukkala, M. and Thomas, R.L., 1993, 'Determination of Thermal Diffusivity of Low-Diffusivity Materials Using the Mirage Method with Multiparameter Fitting,' Journal of Applied Physics, Vol. 73, pp. 2714-2733 https://doi.org/10.1063/1.353044
  18. Wong, P.K., Fung, P.C.W., Tam, H.L. and Gao, J., 1995, 'Thermal Diffusivity Measurements of an Oriented Superconducting-Film-Substrate Composite Using the Mirage Technique,' Physical Review B, Vol. 51, pp. 523-533 https://doi.org/10.1103/PhysRevB.51.523
  19. Sanchez-Lavega, A., Salazar, A., Ocariz, A., Pottier, L., Gomez, E., Villar, L.M. and Macho, E., 1997, 'Thermal Diffusivity Measurements in Porous Ceramics by Photothermal Methods,' Applied Physics a (Materials Science Processing), Vol. A65, pp. 15-22 https://doi.org/10.1007/s003390050534
  20. Wong, P.K., Fung, P.C.W. and Tam, H.L., 1998, 'Low Thermal Diffusivity Measurements of Thin Films Using Mirage Technique,' Journal of Applied Physics, Vol. 84, pp. 6623-6627 https://doi.org/10.1063/1.369036
  21. Suber, G., Bertolotti, M., Sibilia, C., Ferrari, A. and Ricciardiello, F.G., 1987, 'Transverse Photothermal Deflection Spectroscopy Applied to Thermal Diffusivity Measurements,' Journal of Thermal Analysis, Vol. 32, pp. 1039-1041 https://doi.org/10.1007/BF01905159
  22. Suber, G., Bertolotti, M., Sibilia, C. and Ferrari, A., 1988, 'Test Measurements of the Photothermal Deflection Method to Determine the Thermal Diffusivity of Solids,' Applied Optics, Vol. 27, pp. 1807-1810 https://doi.org/10.1364/AO.27.001807
  23. Incropera, F.P. and DeWitt, D.P., 1996, Fundamentals of Heat and Mass Transfer, Fourth Ed, John Wiley and Sons, Inc., Appendix A