• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.1510-1512
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• 2000

Due to the shrinking of the chip size and increasing of the complexity in the modern electronic devices. the defect of wafer are so important to decide the yield in the device process. The engineers has studied the wafer defects and the characteristics. They published lots of the experimental methods. I did an experiment the gettering effect of the defects due to the high temperature and the long time diffusion. Actually, As the thickness of the wafer backside polysilicon is thicker and the diffusion time is faster. the defects on the wafer are decreased. The polysilicon gram boundaries of the wafer backside played an important part as the defect gettering site.

• Proceedings of the Korean Nuclear Society Conference
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• 2003.05a
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• pp.335.2-335.2
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• 2003

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.37-40
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• 2001

This paper presents the modeling methodology of Zinc diffusion process applied for high-speed avalanche photodiode fabrication using neural networks. Three process factors (sealing pressure, amount of Zn$_3$P$_2$ source per volume, and doping concentration of diffused layer) are examined by means of D-optimal design experiment. Then, diffusion rate and doping concentration of Zinc in diffused layer are characterized by a static response model generated by training fred-forward error back-propagation neural networks. It is observed that the process models developed here exhibit good agreement with experimental results.

• Communications of the Korean Mathematical Society
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• v.14 no.4
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• pp.815-832
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• 1999

High-order weighted difference schemes with uniform meshes are considered for the convection-diffusion problem depending on Reynolds numbers. For small Reynolds numbers, a weighed cen-tral difference scheme is suggested since there is no boundary layer. For large Reynolds numbers, we propose a modified up wind method with an artificial diffusion in order to overcome nonphysical oscilla-tion of central schemes and obtain good accuracy in the boundary later. Existence and corresponding error estimates of the solution for the difference scheme have been shown. Numerical experiments are provided to back up the analysis.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.2
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• pp.106-112
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• 2007

Advanced back-end processing requires the integration of low-k dielectrics and Cu. However, in the presence of an electric field and a temperature, positive Cu ions may drift rapidly through dielectric and causing reliability problems. Therefore, in this paper, Cu+ drift diffusion in two low-k materials and silicon oxide is evaluated. The drift diffusion is investigated by measuring shifts in the flat band voltage of capacitance-voltage measurements on Cu gate capacitors after bias thermal stressing. The Cu+ drift late in $SiO_{x}C_{y}\;(2.85{\pm}0.03)$ and Polyimide(2.7${\leq}k{\leq}3.0$) is Considerably lower than in thermal oxide.

• Journal of the Korean Institute of Telematics and Electronics
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• v.20 no.1
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• pp.22-26
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• 1983

P+N and P+NN+ solar cells with the area of 3.36 $\textrm{cm}^2$ were fabricated by thermal diffusion. Under the light intensity of 100 mW/$\textrm{cm}^2$, total area(active area) conversion efficiency was 13.4%(14.7%) for P+N cell fabricated by 15 min boron predeposition at 94$0^{\circ}C$ and 20 min annealing at 80$0^{\circ}C$, and 14.3%(15.6%) for P+NN+ cell processed by 15 min boron predeposition at 94$0^{\circ}C$ and 50 min annealing at 80$0^{\circ}C$ after 20 min back phosphorus diffusion at 1,05$0^{\circ}C$. The minority carrier lifetime in bulk of P+NN+ cells was increased about 2~3 times comparing with P+N cells because of guttering and BSF effect due to back phosphorus doping. The methods used for efficiency improvement were AR coating, Ag electroplating, back doping and fine grid pattern as well as the control of front doping profile.

• Corrosion Science and Technology
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• v.18 no.6
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• pp.267-276
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• 2019

The purpose of this study was to examine the influence of conditions for quenching and/or tempering on the corrosion and hydrogen diffusion behavior of ultra-strong automotive steel in terms of the localized plastic strain related to the dislocation density, and the precipitation of iron carbide. In this study, a range of analytical and experimental methods were deployed, such as field emission-scanning electron microscopy, electron back scatter diffraction, electrochemical permeation technique, slow-strain rate test (SSRT), and electrochemical polarization test. The results showed that the hydrogen diffusion parameters involving the diffusion kinetics and hydrogen solubility, obtained from the permeation experiment, could not be directly indicative of the resistance to hydrogen embrittlement (HE) occurring under the condition with low hydrogen concentration. The SSRT results showed that the partitioning process, leading to decrease in localized plastic strain and dislocation density in the sample, results in a high resistance to HE-induced by aqueous corrosion. Conversely, coarse iron carbide, precipitated during heat treatment, weakened the long-term corrosion resistance. This can also be a controlling factor for the development of ultra-strong steel with superior corrosion and HE resistance.

• Journal of the Korean Society of Combustion
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• v.15 no.3
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• pp.74-81
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• 2010

In this study, soot formation characteristics on the instability of laminar diffusion flames were investigated experimentally using a concentric co-flow burner. When a small amount of air was supplied through an inner nozzle, a stable propane laminar diffusion flame became unstable and began to oscillate mainly due to the dilution effect. The increase of air flow rate transformed an oscillating non-sooting flame into a stable nonsooting flame. When the air flow rate was continuously increased an inner flame was formed and the flame was changed to an oscillating sooting flame, an oscillating non-sooting flame and finally a stable non-sooting hollow flame. When the air flow rate was decreased, a non-sooting hollow flame was eventually changed back to a stable non-sooting flame. The presence of an inner flame, however, altered the soot formation characteristics of a flame. More soot production was observed with the presence of an inner flame. The increased or decreased soot formation/oxidation rates, the radiation heat loss, and the heating effect of inner flames are most likely to be responsible for the observed instability of laminar diffusion flames.

• 한국태양에너지학회:학술대회논문집
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• 2011.11a
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• pp.40-44
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• 2011

Recent studies in crystalline silicon solar cell fabrication have been focused on high efficiency and low cost. However, the rising of the cost results in additional processes to approach high efficiency. The fabrication process also becomes complicated with additional technologies. In this paper, we studied the selective emitter formation with phosphorous paste to improve the conversion efficiency. Selective emitter formations like two-step diffusion or etch-back method require at least one more step compared in the conventional line since heavily and lightly doped area was needed to form separately.However,one-step diffusion process is the method diffusing heavily and lightly doped area at the same time only with additional screen-printing step. This study lays the foundation for the simple way to form the selective emitter.

• Korean Journal of Soil Science and Fertilizer
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• v.28 no.3
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• pp.233-240
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• 1995

Fick's diffusion equation was transformed into algebraic subsidiary equation with its initial and boundary conditions through Laplace transformation, and the subsidiary equation was transformed back on the basis of Burington's table of inverse transformations so that it became the solution of Fick's equation. The initial and boundary condition was for upward diffusion of salts into flooding water of constant depth from uniform polder soil of infinite depth containing constant concentration of salt. The derived solution was tested through comparison for its conformability with other solutions of simpler initial and boundary conditions. The importance of shallow transplanting of rice seedlings and salt removing by growing rice was mentioned on the basis of very slow desalting rate by diffusion calculated from the derived solutions.