• Title/Summary/Keyword: Atomic Oxygen

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Influence of Oxygen Annealing on Temperature Dependent Electrical Characteristics of Ga2O3/4H-SiC Heterojunction Diodes (산소 후열처리가 Ga2O3/4H-SiC 이종접합 다이오드의 온도에 따른 전기적 특성에 미치는 영향 분석)

  • Chung, Seung Hwan;Lee, Hyung Jin;Lee, Hee Jae;Byun, Dong Wook;Koo, Sang Mo
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.4
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    • pp.138-143
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    • 2022
  • We analyzed the influence of post-annealing on Ga2O3/n-type 4H-SiC heterojunction diode. Gallium oxide (Ga2O3) thin films were deposited by radio frequency (RF) sputtering. Post-deposition annealing at 950℃ in an Oxygen atmosphere was performed. The material properties of Ga2O3 and the electrical properties of the diodes were investigated. Atomic Force Microscopy (AFM), X-Ray Diffraction and Scanning Electron Microscope (SEM) images show a significant increase in the roughness and crystallinity of the O2-annealed films. After Oxygen annealing X-ray Photoelectron Spectroscopy (XPS) shows that the atomic ratio of oxygen increases which is related to a decrease in oxygen vacancy within the Ga2O3 film. The O2-annealed diodes exhibited higher on-current and lower leakage current. Moreover, the ideality factor, barrier height, and thermal activation energy were derived from the current-voltage curve by increasing the temperature from 298 - 434K.

Characteristic of Oxidation Reaction of Lanthanide Chlorides in Oxygen-Eutectic Salt Bubble Column (산소-공융염 기포탑에서 희토류염화물의 산화반응 특성)

  • Cho, Yung-Zun;Yang, Hee-Chul;Lee, Han-Soo;Kim, In-Tae
    • Korean Chemical Engineering Research
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    • v.47 no.4
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    • pp.465-469
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    • 2009
  • Characteristics of oxidation reaction of four lanthanide chlorides(Ce, Nd, Pr and $EuCl_3$) in a oxygen-eutectic(LiCl-KCl) salt bubble column was investigated. From the results obtained from the thermochemical calculations by HSC chemistry software, the most stable lanthanide compounds in the oxygen-used rare earth chlorides system were oxychlorides(EuOCl, NdOCl, PrOCl) and oxides($CeO_2$, $PrO_2$), which coincide well with results of the Gibbs free energy of the reaction. In this study, similar to the thermochemical results, regardless of the sparging time and molten salt temperature, oxychlorides for Eu, Nd and Pr and oxides for Ce and Pr were formed as a precipitant by a reaction with oxygen. The structure of the rare earth precipitates was divided into two shapes : small cubic(oxide) and large tetragonal (oxychloride) structures. The conversion efficiencies of the lanthanide elements to their molten salt-insoluble precipitates(or compound) were increased with the sparging time and temperature, and Ce showed the best reactivity. In the conditions of $650^{\circ}C$ of the molten salt temperature and 420 min of the sparging time, the conversion efficiencies were over 99% for all the investigated lanthanide chlorides.

Measurement of oxygen isotope ratio using tunable diode laser absorption spectroscopy (다이오드 레이저 흡수분광법을 이용한 산소 동위원소의 성분비 측정)

  • Park, Sang-Eon;Jung, Do-Young;Kim, Jae-Woo;Ko, Kwang-Hoon;Im, Kwon;Jung, Eui-Chang;Kim, Chul-Joong
    • Korean Journal of Optics and Photonics
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    • v.15 no.1
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    • pp.1-5
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    • 2004
  • Tunable diode laser absorption spectroscopy was performed for analysis of the H$_2$$^{18}$ O/H$_2$$^{16}$ O isotope ratio of a water sample which was enriched by the membrane distillation method. In order to improve the signal-to-noise ratio, the wavelength modulation spectroscopic method was used with a lock-in amplifier. The fringe noise could be suppressed by using the FFT (Fast Fourier Transform) lowpass filter and the optimization of the modulation depth of the laser frequency. The maximum deviation of $\delta$-value was measured to be$\pm$4$\textperthousand$.

Physicochemical Characterization of Mo Films at Various Oxygen Ratio

  • Bin, Jun-Hyeong;Park, Ju-Yeon;Gang, Yong-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.88-88
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    • 2010
  • We synthesized molybdenum thin films deposited by RF magnetron sputtering and physicochemical analysis was performed. The physical and chemical properties of these films were examined with X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The obtained film at the oxygen ratio of 0% showed crystallinity of cubic Mo(110) phase. After the oxygen ratio increased more than 5% in the sputter gas, the molybdenum films were formed as an amorphous phase. The thickness of the Mo thin film was drastically decreased from 1000 nm to ca 70 nm after introduction of oxygen in the sputter gas confirmed by spectroscopic ellipsometer (SE) and scanning electron spectroscopy (SEM). The calculated band gap of the film deduced from SE data increased from 3.17 to 3.63 eV by addition of oxygen in the sputter gas. The roughness of the Mo film was examined with atomic force microscopy (AFM) and it was dramatically decreased by introducing of oxygen during sputtering. XPS results revealed that the ratio of metallic Mo species in the film decreased by the contents of Mo(VI) species increased at the ratio of oxygen increased in the sputter gas and fully oxidized at low content of oxygen in the sputter gas.

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Interaction of Gas-phase Atomic Hydrogen with Chemisorbed Oxygen Atoms on a Silicon Surface

  • Lee, Sang-Kwon;Ree, Jong-Baik;Kim, Yoo-Hang;Shin, Hyung-Kyu
    • Bulletin of the Korean Chemical Society
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    • v.32 no.5
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    • pp.1527-1533
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    • 2011
  • The reaction of gas-phase atomic hydrogen with oxygen atoms chemisorbed on a silicon surface is studied by use of the classical trajectory approach. We have calculated the probability of the OH formation and energy deposit of the reaction exothermicity in the newly formed OH in the gas-surface reaction H(g) + O(ad)/Si${\rightarrow}$ OH(g) + Si. All reactive events occur in a single impact collision on a subpicosecond scale, following the Eley-Rideal mechanism. These events occur in a localized region around the adatom site on the surface. The reaction probability is dependent upon the gas temperature and shows the maximum near 1000 K, but it is essentially independent of the surface temperature. The reaction probability is also independent upon the initial excitation of the O-Si vibration. The reaction energy available for the product state is carried away by the desorbing OH in its translational and vibrational motions. When the initial excitation of the O-Si vibration increases, translational and vibrational energies of OH rise accordingly, while the energy shared by rotational motion varies only slightly. Flow of energy between the reaction zone and the solid has been incorporated in trajectory calculations, but the amount of energy propagated into the solid is only a few percent of the available energy released in the OH formation.

근 지구 우주환경이 위성에 미치는 영향

  • Lee, Chang-Ho;Han, Dong-In
    • Aerospace Engineering and Technology
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    • v.3 no.1
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    • pp.86-96
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    • 2004
  • Space environment has various hazard effects on satellite. These effects can not be experienced in earth ambient condition. In terrestrial space, plasma or atomic oxygen could erode satellite surface. Also ultra violet or particle radiation may damage surface materials or electronic parts which constitute satellite. So, in designing satellite, the natural environment of operational orbit should be investigated and appropriate mitigation should be prepared.

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ABRASIVE BLASTING TECHNOLOGY FOR DECONTAMINATION OF THE INNER SURFACE OF STEAM GENERATOR TUBES

  • Kim, Gye-Nam;Lee, Min-Woo;Park, Hye-Min;Choi, Wang-Kyu;Lee, Kune-Woo
    • Nuclear Engineering and Technology
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    • v.43 no.5
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    • pp.469-476
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    • 2011
  • The inner surfaces of bundled inconel tubes from steam generators in South Korean nuclear power plants are contaminated with cobalt and abrasive blasting equipment has been developed to efficiently remove the cobalt. The principal parameters related to the efficient removal using this equipment are the type of abrasive, the distance from the nozzle, and the blasting time. Preliminary tests were performed using oxidized inconel samples which enabled the simulation of cobalt removal from the radioactive inconel samples. The oxygen in the oxidized samples and the cobalt in the radioactive inconel were removed more effectively using the blasting distance, blasting time, and a silicon carbide abrasive. Using the developed abrasive blasting equipment, the optimum decontamination conditions for radioactive inconel samples were blasting for more than 6 minutes using silicon carbides under 5 atmospheric pressures.

Dynamic Boric Acid Corrosion of Low Alloy Steel for Reactor Pressure Vessel of PWR using Mockup Test (가압형 경수로 압력용기 재료인 저합금강의 동적 붕산 부식 실증 연구)

  • Kim, Sung-Woo;Kim, Hong-Pyo;Hwang, Seong-Sik
    • Corrosion Science and Technology
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    • v.12 no.2
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    • pp.85-92
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    • 2013
  • This work is concerned with an evaluation of dynamic boric acid corrosion (BAC) of low alloy steel for reactor pressure vessel of a pressurized water reactor (PWR). Mockup test method was newly established to investigate dynamic BAC of the low alloy steel under various conditions simulating a primary water leakage incident. The average corrosion rate was measured from the weight loss of the low alloy steel specimen, and the maximum corrosion rate was obtained by the surface profilometry after the mockup test. The corrosion rates increased with the rise of the leakage rate of the primary water containing boric acid, and the presence of oxygen dissolved in the primary water also accelerated the corrosion. From the specimen surface analysis, it was found that typical flow-accelerated corrosion and jet-impingement occurred under two-phase fluid of water droplet and steam environment. The maximum corrosion rate was determined as 5.97 mm/year at the leakage rate of 20 cc/min of the primary water with a saturated content of oxygen within the range of experimental condition of this work.

Corrosion Behavior of Stainless Steel 316 for Carbon Anode Oxide Reduction Application

  • Jeon, Min Ku;Kim, Sung-Wook;Choi, Eun-Young
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.18 no.2
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    • pp.169-177
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    • 2020
  • Here, the stability of stainless steel 316 (SS-316) was investigated to identify its applicability in the oxide reduction process, as a component in related equipment, to produce a complicated gas mixture composed of O2 and Cl2 under an argon (Ar) atmosphere. The effects of the mixed gas composition were investigated at flow rates of 30 mL/min O2, 20 mL/min O2 + 10 mL/min Cl2, 10 mL/min O2 + 20 mL/min Cl2, and 30 mL/min Cl2, each at 600℃, during a constant argon flow rate of 170 mL/min. It was found that the corrosion of SS-316 by the chlorine gas was suppressed by the presence of oxygen, while the reaction proceeded linearly with the reaction time regardless of gas composition. Surface observation results revealed an uneven surface with circular pits in the samples that were fed mixed gases. Thermodynamic calculations proposed the combination of Fe and Ni chlorination reactions as an explanation for this pit formation phenomenon. An exponential increase in the corrosion rate was observed with an increase in the reaction temperature in a range of 300 ~ 600℃ under a flow of 30 mL/min Cl2 + 170 mL/min Ar.