• 마이크로전자및패키징학회지
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• 제25권3호
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• pp.67-74
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• 2018

두께 $2.5{\sim}10{\mu}m$인 n형 $Bi_2Te_3$와 p형 $Sb_2Te_3$ 레그 8쌍으로 구성되어 있는 in-plane형 열전박막소자를 전기도금법으로 Si submounts에 형성하고, LED 칩의 구동에 의해 발생하는 겉보기 온도차 ${\Delta}T$와 레그 두께에 따른 발전특성을 분석하였다. LED 방출열에 의해 인가된 ${\Delta}T$가 7.4K일 때 각기 두께 $2.5{\mu}m$, $5{\mu}m$ 및 $10{\mu}m$의 p-n 레그들로 구성된 열전박막소자는 6.1 mV, 7.4 mV 및 11.8 mV의 open circuit 전압을 나타내었으며, 6.6 nW, 12.8 nW 및 41.9 nW의 최대 출력전력을 나타내었다.

• 대한전자공학회논문지
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• 제25권4호
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• pp.422-429
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• 1988

The photoconductive multilayer of Se-As(hole blocking layer)/Se-As-Te (photoconductive layer) /Se-As (layer for supporiting hole transport)/Se-As(layer or controlling total capacitance)/Sb2S3(electron blocking layer) was fabricated and its electrical and optical properties were investigated. The photoconductive multilayer is made of evaporated a-Se as the base material, doped with As and Te to prevent the crystallization of a-Se and to enhance red sensitivity, respectively. The multilayer with good image reproducibility has the following deposition condition. The first layer has the thickness of 250\ulcornerat the deposition rate of 250\ulcornersec. The second layer has the thickness of 800\ulcornerat the deposition rate of 250\ulcornersec. The third layer has the thickness of 125\ulcornerat the deposition rate of 250\ulcornersec. The fourth layer has the thickness of 1700\ulcornerunder the Ar gas ambient of 50x10**-3torr. The image pick-up tube, employing this multilayer demonstrates the following characteristics. The photosensitivity is 0.8, the resolution limit is above 300TV line, and the decay lag is about 7%. And spectral response convers the whole visible range. Therfore the application to color TV camera is expected.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.15-16
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• 2005

Chalcogenide phase change memory has high performance to be next generation memory, because it is a nonvolatile memory processing high programming speed, low programming voltage, high sensing margin, low consumption and long cycle duration. We have developed a new material of PRAM with $Ge_1Se_1Te_2$. This material has been propose to solve the high energy consumption and high programming current. We have investigated the phase transition behaviors in function of various process factor including contact size, cell size, and annealing time. As a result, we have observed that programming voltage and writing current of $Ge_1Se_1Te_2$ are more improved than $Ge_2Sb_2Te_5$ material.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.304.2-304.2
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• 2014

Chalcogenides (Te,Se) and pnictogens(Bi,Sb) materials have been widely investigated as thermoelectric materials. Especially, Bi2Te3 (Bismuth telluride) compound thermoelectric materials in thin film and nanowires are known to have the highest thermoelectric figure of merit ZT at room temperature. Currently, the thermoelectric material research is mostly driven in two directions: (1) enhancing the Seebeck coefficient, electrical conductivity using quantum confinement effects and (2) decreasing thermal conductivity using phonon scattering effect. Herein we demonstrated influence of annealing temperature on structural and thermoelectrical properties of Bismuth-telluride-selenide ternary compound thin film. Te-rich Bismuth-telluride-selenide ternary compound thin film prepared co-deposited by thermal evaporation techniques. After annealing treatment, co-deposited thin film was transformed amorphous phase to Bi2Te3-Bi2Te2Se1 polycrystalline thin film. In the experiment, to investigate the structural and thermoelectric characteristics of Bi2Te3-i2Te2Se1 films, we measured Rutherford Backscattering spectrometry (RBS), X-ray diffraction (XRD), Raman spectroscopy, Scanning eletron microscopy (SEM), Transmission electron microscopy (TEM), Seebeck coefficient measurement and Hall measurement. After annealing treatment, electrical conductivity and Seebeck coefficient was increased by defect states dominated by selenium vacant sites. These charged selenium vacancies behave as electron donors, resulting in carrier concentration was increased. Moreover, Thermal conductivity was significantly decreased because phonon scattering was enhanced through the grain boundary in Bi2Te3-Bi2Te2Se1 polycrystalline compound. As a result, The enhancement of thermoelectric figure-of-merit could be obtained by optimal annealing treatment.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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• pp.65-66
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• 2005

Etching characteristics of $Ge_2Sb_2Te_5$ (GST) films were investigated using $Cl_2$/Ar inductively coupled plasma.We examined the etching characteristics such as etching rate and selectivity over oxide films of GST films using inductively coupled plasma (ICP) with various etching parameters such as $Cl_2$/Ar gas mixing ratios, ICP source power, pressure, and bias power. The maximum etch rate of GST film was $2,815{\AA}$/min and the selectivity higher than 12:1 over the oxide films was also obtained at the $Cl_2$ flow rates of 40 sccm.

• 마이크로전자및패키징학회지
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• 제24권2호
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• pp.17-21
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• 2017

본 연구에서는 수평형 열전 냉각 소자의 열전 냉각 성능 극대화를 위해 모사 해석을 수행하였다. ANSYS Workbench의 Thermal-Electric 프로그램을 활용한 모사 해석을 진행하였으며 해당 프로그램은 열전 효과에 초점이 맞춰 있어 보다 정확하고 효과적인 모사 해석이 가능하다. 수평형 열전 냉각 소자는 n-type의 $Bi_2Te_3$와 p-type의 $Sb_2Te_3$ 및 Au 금속 전극으로 가정하였으며, Joule 발열이 소자 중앙 하부에서 발생되는 것으로 가정하였다. 모사 해석을 통해 최대 $13^{\circ}C$의 냉각 효과를 확인하였으며, 이런 기하학적인 변수들로부터 냉각 성능을 최적화 할 수 있는 디자인을 제시하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.282-282
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• 2011

Low power consuming operation of phase-change random access memory (PRAM) can be achieved by confining the switching volume of phase change media into nanometer scale. Ge2Sb2Te5 (GST) is one of the best materials for the phase change random access memory (PRAM) because the GST has two stable states, namely, high and low resistance values, which correspond to the amorphous and crystalline phases of GST, respectively. However, achieving the fast operation speed at lower current requires an alternative chalcogenide material to replace the GST and shrinking the dimension of programmable volume. In this paper, we have fabricated nanoscale contact area on Ge2Sb2Te5 thin films with trimming process. The GST material was fabricated by melt quenching method and the GST thin films were deposited with thickness of 100 nm by the electron beam evaporation system. As a result, the reset current can be safely scaled down by reducing the device contact area and we could confirmed the phase-change characteristics by applying voltage pulses.

• 한국분말재료학회지
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• 제24권2호
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• pp.108-114
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• 2017

We fabricate fine (<$20{\mu}m$) powders of $Bi_{0.5}Sb_{1.5}Te_3$ alloys using a large-scale production method and subsequently consolidate them at temperatures of 573, 623, and 673 K using a spark plasma sintering process. The microstructure, mechanical properties, and thermoelectric properties are investigated for each sintering temperature. The microstructural features of both the powders and bulks are characterized by scanning electron microscopy, and the crystal structures are analyzed by X-ray diffraction analysis. The grain size increases with increasing sintering temperature from 573 to 673 K. In addition, the mechanical properties increase significantly with decreasing sintering temperature owing to an increase in grain boundaries. The results indicate that the electrical conductivity and Seebeck coefficient ($217{\mu}V/K$) of the sample sintered at 673 K increase simultaneously owing to decreased carrier concentration and increased mobility. As a result, a high ZT value of 0.92 at 300 K is achieved. According to the results, a sintering temperature of 673 K is preferable for consolidation of fine (<$20{\mu}m$) powders.

• 한국광학회지
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• 제14권1호
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• pp.23-32
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• 2003

타원법(ellipsometry)을 사용하여 광기록 매체용 Ge$_2$ Sb$_2$ Te$^{5}$ (GST) 박막의 성장과정에 따른 타원상수 Ψ와 $\Delta$를 측정하여. GST 박막의 최적성장조건을 연구하였다. 아르곤기체압력과 DC 출력 그리고 기판의 온도를 변화시키면서 GST 박막을 성장시켰다. 제작된 시료들의 분광타원 데이터를 모델링 분석하여 GST박막의 밀도분포를 구하고 한편으로는 GST 박막이 성장하는 동안 측정한 in situ 타원 성장곡선을 분석하여 박막의 밀도분포의 변화를 추적하였다. 아르곤기체압력이 7 mTorr일 때 박막의 상대적인 밀도분포가 고르게 되었고 DC출력이 증가함에 따라 그리고 기판의 온도가 증가함에 따라 GST 박막의 밀도 균일성은 크게 향상되었다. 주사형전자현미경(SEM)을 사용하여 최적 밀도 균일성을 가지는 성장조건(7 mTorr, 45 W, 15$0^{\circ}C$)에서 제작된 GST 시료가 가장 균일한 구조를 보여줌을 확인하였다. 균일한 밀도 분포를 가지는 GST 박막의 성장조건 확립을 통하여 여러번 기록/재생할 때 광기록 박막의 안정성을 유지하는데 크게 기여할 것이다.

• 자원환경지질
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• 제21권4호
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• pp.389-400
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• 1988

Minor elements such as Ag, As, Au, Bi, Cd, Cu, Co, Ni, Pb, Rb, Sb, Sr and Te were analyzed by atomic absorption spectrophotometry and induced coupled plasma spectrophotometry in order to investigate pathfinders for gold in quartz porphyry, granite porphyry and vein materials in Jeonjuil gold - silver mine, and in altered biotite granites and vein materials in Dukum gold - silver mine. In Dukum gold - silver mine, it is observed that Au contents have positive relation with As, Co, and Rb contents, but negative relation with Bi contents in altered biotite granites. Au contents have positive relation with Ag, As, Co and Te contents in vein materials. In Jeonjuil gold - silver mine, it is observed that Cd, Rb, Sr and Te are enriched near ore vein in quartz porphyry and granite porphyry. Au contents have positive relation with As, Cd, Cu, $Fe_2O_3$ and $K_2O$ in vein materials.