• Proceedings of the KIEE Conference
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• 1993.07b
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• pp.612-614
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• 1993

Sputtering requires a way to bombard the target with sufficient momentum. Positive ions are the most convenient source since their energy and momentum can be controlled by applying a potential to the target. Although many types of discharges have been used for sputtering, magnetrons are now the most widely used because of the high ion current densities. Namely, plasma near the target electrode is confined by magnetic field using permanent magnet, so that the collision probability is increased. It is important to develop RF magnetron sputtering system which has many excellent merits compared with conventional methods. Our study aims to develop 1 kW RF source(13.56 MHz, TR type) and to accumulate the design and construction technology of RF magnetron sputter-deposition system. We developed 1 kW RF sputtering system to deposit thin film. These films are deposited by this RF source matched by auto-matching system using primarily argon gas. Target of Au, Ni, Al, and $SiO_2$ was well deposited on the argon pressure of 5-10 mTorr.

• Korean Journal of Optics and Photonics
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• v.24 no.1
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• pp.39-44
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• 2013

In this study, we assessed the hydrophilic characteristics of the surface of toughened glass used in smartphones by investigating the optical properties and contact angle characteristics of the plasma device. In this study, the characteristics were different depending on the partial pressure of the gas, input voltage, and degree of ionization of argon gas. In this study, the surface of the toughened glass became more hydrophilic, as indicated by contact angle and light spectrum, after plasma treatment than before the treatment.

• Korean Journal of Materials Research
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• v.14 no.7
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• pp.511-515
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• 2004

Fe nano powders were synthesized by plasma arc discharge (PAD) process and studied by means of X-ray Diffraction (XRD), Transmission Electron Microscopy (TEM) and X-ray Photoelectron Spectroscopy (XPS). Pure Fe rod($99.9\%$) was used as a source of metallic vapor under argon and hydrogen mixed atmosphere. The synthesized Fe nano powders had nearly spherical shapes and core-shell type structures. The influence of process parameters on the structure and size was investigated. The powder size increased with increasing of the chamber pressure and input current. High hydrogen gas ratio in chamber atmosphere affected the particle size and amount of Fe nanopowder.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11b
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• pp.693-698
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• 2002

For the evaluation of the plasma display panel (PDP)'s noise, vibration and sound characteristics of fanless PDP are measured and investigated. PDP is a type of two-electrode vacuum tube which operates on the same principle as a household fluorescent light. An inert gas such as argon or neon is injected between two glass plates on which transparent electrodes have been formed, and the glass is illuminated by generating discharge. For this discharge, both high voltage and currents are needed and cause an acoustic noise. We investigated the noise characteristics connected with both a electromagnetic elements from SMPS to panel through X, Y and logic board, and a mechanical elements form panel to case through transfer path which related with vibration and heat. To reduce the noise of PDP, a discharge pulse memory design related with both higher brightness and lower power consumption is important and mechanical characteristics connected with dissipation process of both heat and vibration generated by panel discharge must be investigated.

• Journal of Welding and Joining
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• v.33 no.3
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• pp.68-74
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• 2015

Superduplex stainless steels are important materials to the oil and gas industry, especially for off-shore production. TIG welding of super duplex stainless steels to obtain the optimal phase balance between austenite and ferrite is mainly achieved by controlling the cooling rate and the weld chemistry. The latter depends on the filler wire chosen and the shielding gas used. If TIG welding of superduplex stainless steels is performed with argon shielding gas only, then nitrogen gets lost from the weld pool, which can result in a ferrite-rich weld metal, with an inferior corrosion resistance than parent metal. In the present study, nitrogen permeation model from the shield gas which gets into the weld metal in DCEN-TIG welding has suggested. This plasma stream model shows characteristics of permeation of nitrogen ions into the molten metal due to the strong physical effect of plasma stream which formed by the arc pressure rather than the permeation of nitrogen ions caused by electric effect.

• Journal of the Korean Ceramic Society
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• v.33 no.11
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• pp.1285-1291
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• 1996

Using Cr2O3 Al and graphite powders as starting materials Cr3C2 was synthesized by combustion synthesis process according to the following reaction : 3Cr3C2 +4C+6Allongrightarrow2Cr3C2 +3Al2O3. The synthesis was conducted at 2 atm in an argon atmosphere. in this study main-product was monolithic phase of Cr3C2 /Cr7C3 mixture and sub-product was slag state of $\alpha$-Al2O3. Single phase of Cr3C2 was obtained when crushed main-product was heat-treated at 120$0^{\circ}C$ for 3h in vacuum state with addition of 2.5wt% C. The obtained Cr3C2 powder can be used as plasma-arc deposit material because the flowability index of powder with the size of 9-50${\mu}{\textrm}{m}$ was 66.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.24 no.4
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• pp.400-406
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• 2015

This study researched the structure of the source of an ion milling machine used to fabricate a scanning electron microscope (SEM) sample. An ion source is used to mill out samples of over 1 mm dimension using a broad ion beam to generate plasma between the anode and cathode using a permanent magnet. To mill the sample in the vacuum chamber, the ion source should be greater than 6 kV for a positive ion current over $200{\mu}A$. To discover the optimum operating conditions for the ion miller, the diameter of the extractor, anode shape, and strength of the permanent magnet were varied in the experiments. A silicon wafer was used as the sample. The sputter yield was measured on the milled surface, which was analyzed using the SEM. The wafer was milled by injecting 1 sccm of argon gas into the 0.5 mTorr vacuum chamber.

• Journal of Korean Ophthalmic Optics Society
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• v.11 no.4
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• pp.311-315
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• 2006

We investigated X-ray radiated from the pulsed Plasma Focus device that translated from electric energy into electromagnetic wave by electric discharge. X-ray radiation is analysed by using pin photodiode and 0.5mm pinhole camera shielded by $25{\mu}m$ Be. The condition of X-ray radiation was that the discharging voltage was 15 kV and the working gas were 0.12 torr Argon. Reproducibility of X-ray radiation is investigated and X-ray temperature is calculated above 3keV.

• Journal of the Korean institute of surface engineering
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• v.41 no.2
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• pp.43-47
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• 2008

Cubic boron nitride(c-BN) films were deposited on tungsten carbide insert tool by microwave plasma enhanced chemical vapor deposition(MPECVD) from a gas mixture of triethyl borate$(B(C_2H_5O)_3)$, ammonia $(NH_3)$, hydrogen$(H_2)$ and argon(Ar). The qualities of deposited thin film were investigated by x-ray diffrac-tion(XRD), field emission scanning electron microscopy(FE-SEM) and micro Raman spectroscope. The surface morphologies of the synthesised BN as well as crystallinity appear to be highly dependent on the flow rate of $B(C_2H_5O)_3$ and $(NH_3)$ gases. The deposited film had more crystallized phases with 5 scem of $B(C_2H_5O)_3$ and $(NH_3)$ gases than with 2 sccm, and the phase was identified as c-BN by micro Raman spectroscope and XRD. The adhesion strength were also increased with increasing flow rates of $B(C_2H_5O)_3$ and $(NH_3)$ gases.

• Bulletin of the Korean Chemical Society
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• v.24 no.3
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• pp.285-290
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• 2003

An analytical method for the simultaneous determination of trace Ge, As and Se in biological samples by inductively coupled plasma/mass spectrometry has been investigated. The effects of added organic gas into the coolant argon gas on the analyte signal were studied to improve the detection limit, accuracy and precision. The addition of a small amount of methane (10 mL/min.) into the coolant gas channel improved the ionization of Ge, As and Se. The analytical sensitivity of the proposed Ar/CH₄system was superior by at least two-fold to that of the conventional Ar method. In the present method, the detection limits obtained for Ge, As and Se were 0.014, 0.012 and 0.064 ㎍/L, respectively. The analytical reliability of the proposed method was evaluated by analyzing the certified standard reference materials (SRM). Recoveries of 99.9% for Ge, 103% for As, 96.5% for Se were obtained for NIST SRM of freeze dried urine sample. The proposed method was also applied to the biological samples.