• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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• pp.1066-1068
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• 1999

Magnetic field is commonly used in low temperature processing plasmas in order to obtain high density. E $\times$ B magnetron or surface multipole configuration were most popular. However, the properties of capacitively coupled rf plasma confined by axially applied static magnetic fields have rarely been studied. In this paper, the effects of magnetic field on the characteristics of 13.56MHz/40KHz argon plasma will be reported. Ion saturation current, electron temperature and plasma potential were measured by Langmuir probe and omissive probe. At low pressure region ($\sim$10mTorr), ion current was increased by a factor of 3 - 4 due to reduction of diffusion loss of charged particles to the wall. It was observed that magnetic field induces large time variation of the plasma potential. The experimental result was compared with particle-in-cell simulation. It was also observed that electron temperature tend to decrease with increasing magnetic induction level for 40KHz discharge.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 C
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• pp.1268-1270
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• 1994

Fine lithographic technology in a submicron design regime is necessary for the fabrication of VLSI circuits. In such lithography, fine pattern delineation is performed by electron beam, ion beam and X-ray lithography instead of photolithography. Therefore, the new resist materials and development method have been required. So, we are investigating another positive E-beam resists which have high sensitivity and dry etching resistance, Plasma co-polymerized resist was prepared using an interelectrode gas-flow-type reacter. Methymethacrylate, tetramethyltin and styrene were chosen as the monomer to be used. The delineated pattern in the resist was developed with gas-flow-type reactor using an argon and 02 as etching gas. We studied about the effects of discharge power and mixing rate of the co-polymerized thin :film. The molecular structure of thin film was investigated by ESCA and IR, and then was discussed in relation to its quality as a resist.

• 전기학회논문지
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• 제64권4호
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• pp.567-572
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• 2015

Discharge characteristics of linear microwave plasma were investigated by using fluid simulation of 2D axis-symmetry based on finite elements method. The microwave power was 2.45 GHz TEM mode and transmitted through linear antenna. Resistive power and pressure were considered simulation variables and argon was used for working gas. A decrease of electron density along the quartz tube was observed in low power condition but relatively uniform plasmas were generated in chamber by increasing the resistive power. The electron temperature was highly detected near the surface of quartz tube because the electron was heated only dielectric surface. The power transmission efficiency decreased and characteristics of surface plasma were observed in high electron density condition.

• 한국분말재료학회지
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• 제28권6호
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• pp.455-461
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• 2021

In this study, multilayered SnO nanoparticles are prepared using oleylamine as a surfactant at 165℃. The physical and chemical properties of the multilayered SnO nanoparticles are determined by transmission electron microscopy (TEM), scanning electron microscopy (SEM), energy-dispersive spectroscopy (EDS), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS). Interestingly, when the multilayered SnO nanoparticles are heated at 400℃ under argon for 2 h, they become more efficient anode materials, maintaining their morphology. Heat treatment of the multilayered SnO nanoparticles results in enhanced discharge capacities of up to 584 mAh/g in 70 cycles and cycle stability. These materials exhibit better coulombic efficiencies. Therefore, we believe that the heat treatment of multilayered SnO nanoparticles is a suitable approach to enable their application as anode materials for lithium-ion batteries.

• Carbon letters
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• 제1권2호
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• pp.53-59
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• 2000

The synthetic methods for high yield of multiwalled carbon nanotube (MWNT) and singlewalled carbon nanotube (SWNT) with high purity by arc discharge have been investigated. MWNTs were synthesized under different pressures of helium and the gas mixture of argon and hydrogen. Relatively high pressure of 300-400 torr was required for high yield MWNTs synthesis at low bias voltage of about 20 V and 55 A, whereas low pressure of about 100 torr was required for SWNTs. The introduction of hydrogen gases during the synthesis of MWNTs improved the yield and purity of the samples. The SWNTs were synthesized by the assistance of a small amount of mixture of transition metals, which played as a catalyst during the formation process. The purity and yield of SWNTs were higher at a lower pressure and enhanced by mixing more components of the transition metals.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 추계학술대회 논문집
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• pp.145-149
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• 2004

It is necessary for managing a perfect process for degasing aluminum molten metal according to the increase of a grade of aluminum and its alloy products. There are some methods that have been used to manage a degasing process in recent years, such as an injection method that uses aluminum molten metal powder and chemicals supplier and input method that supplies argon and nitrogen, or chlorine gas by using a gas blow-tube. However, these methods show some problems, and it shows that it is a difficult process to handle. pollution due to the producing a lot of toxic gases like chlorine and fluoride gas. irregular effects, and lowering work efficiency due to the excessive processing time. The problems that are the most fatal are the producing a lot of sludge due to the reaction of aluminum molten metal with chemicals. loss of metals, and decreasing the life of refractory materials. In order to solve these problems. this paper develops a technology that is related to aluminum continuous casting molten metal and monolithic degasing apparatus. A degasing apparatus developed in this study improved the exist ing methods and prevented environmental pollution wi th smokeless. odor less, and harmlessness by using a new method that applies argon and nitrogen gas in which the methods used in the West and Japan are eliminated. The developed method can significantly reduce product faults that are caused by the production of gas and oxidation because it uses a preprocessed molten metal with chemicals. In addition. the amount of the produced sludge can also be reduced by 60-80% maximum compared with the existing methods. Then. it makes it possible to minimize the loss of metals. Moreover. the molten metal processing and settling time is also shortened by comparing it with the existing methods that are applied by using chemicals. In addition, it does much to improve the workers' health, safety and environment because there is no pollution. The improvement of productivity and prevent ion effects of disaster from the results of the development can be summarized as follows. It will contribute to the process rationalization because it does not have any unnecessary processes that the molten metal will be moved to an agitator by using a ladle and returned to process for degasing like the existing process due to the monolithic configuration. There are no floating impurities due to the oxidation caused by the contact with the air as same as the existing process. In addition. it can protect the blending of precipitation impurities. Because it has a monolithic configuration. it can avoid the use of additional energy to compensate the temperature decreasing about 60t that is caused by the moving of molten metal. It is not necessary to invest an extra facilities in order to discharge the gas generated from a degasing process by using an agitator. The working environment can be improved by the hospitable air in the factory because the molten metal is almost not exposed in the interior of the area.

• Journal of Advanced Marine Engineering and Technology
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• 제35권5호
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• pp.675-681
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• 2011

본 논문에서는 선박평형수 처리시스템의 핵심부품인 중압 자외선 램프와 자기식 안정기의 설계 및 제작에 대하여 기술하였다. 자외선 램프의 최적 방전조건을 확보하기 위하여 봉입되는 아르곤 가스와 수은량 변화에 따른 전기 광학적 특성변화를 분석하였다. 시제작 램프의 전압은 490 [V], 전류는 8.6 [A], 전력은 4.0 [kW]이며, 자외선 세기는 현재 사용되고 동등한 제품과 비교해 15 [%] 이상 향상되었다. 자기식 안정기는 이론적 해석과 시뮬레이션을 통해 UI 코어를 사용한 단상 내철형으로 설계하였으며, 무부하 전압은 920 [V]이고 정격출력은 8.5 [kVA]이다. 시제작 자외선 램프 및 안정기를 적용한 350 [$m^3/h$]급 선박평형수 처리시스템에서 해수에 포함된 플랑크톤 사멸률을 평가한 결과 99.99 [%] 이상으로 IMO에서 정한 규정을 만족하였다.

• 전기화학회지
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• 제8권1호
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• pp.37-41
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• 2005

Ar공정 분압에 따라 스퍼터링된 $LiCoO_2$박막 양극의 $400^{\circ}C$저온 열처리를 통한 전기화학적 및 미세구조적 특성을 연구하였다. Ar분압이 변화함에 따라 양극 박막의 미세구조 및 조성이 변화하였으며, Ar분압이 증가할수록 $LiCoO_2$ 박막의 안정성 및 전기화학적 특성이 개선되었다. 순환전류전위법 및 정전류 충방전 시험에 의해 전극반응의 가역성 및 안정성 등을 고찰하였으며, 박막의 조성, 결정성, 표면 특성 등 물리적 특성은 ICP-AES, XRD, SEM 및 AFM을 통해 분석하였다.

• KEPCO Journal on Electric Power and Energy
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• 제1권1호
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• pp.135-140
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• 2015

유도 결합 플라즈마를 활용하여 $Ar/CO_2$ 혼합가스에서 이산화탄소를 분해하는 연구이다. 고밀도 플라즈마를 발생시키기 위해 Ar 가스를 첨가하였고 이산화탄소 분해율을 측정하기 위해 광학적 광량 측정법을 사용 하였다. 유도 결합 플라즈마를 방전시키고 인가 전력, 압력, 혼합가스 비율을 변경하가며 단일 랭뮤어 프로브를 이용해 플라즈마 변수를 얻고 방출 분광기로 얻은 빛의 스펙트럼을 이용하여 분해율을 측정하였다. 측정된 플라즈마 변수로부터 $CO_2$ 유도 결합 플라즈마의 소스 특성을 확인했고 $CO_2$ 분해 메커니즘은 플라즈마 변수에 직접적인 영향을 받기 때문에 그 상관관계를 분석하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.378-379
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• 2006

The carbon thin film was developed by the CVD method using the carbon source of toluene with the stream of argon gas at $800{\sim}1100^{\circ}C$ for 1 hour. Developed carbon thin films have the material loading of 0.27 mg($800^{\circ}C$), 0.80 mg($900^{\circ}C$), 2.3 mg($1000^{\circ}C$), and 2.9 mg($1100^{\circ}C$) for the disk of 15 mm diameter on single side. The characteristics of carbon thin film as the anode of thin film battery were evaluated using Li|C coin cell. Li|C($1100^{\circ}C$) coin cell has the first specific discharge and charge capacity of 953 mAh/g and 374 mAh/g, respectively, resulting the first Ah efficiency of 39.3 %. Capacity retention of the 5th cycle was 93.2 % indicating good cycleability. The carbon thin film prepared by CVD shows good specific capacity and cycleability, but low Ah efficiency.