• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.239-240
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• 2008

As semiconductor devices are scaled down for better performance and more functionality, the Cu-based interconnects suffer from the increase of the resistivity of the Cu wires. The resistivity increase, which is attributed to the electron scattering from grain boundaries and interfaces, needs to be addressed in order to further scale down semiconductor devices [1]. The increase in the resistivity of the interconnect can be alleviated by increasing the grain size of electroplating (EP)-Cu or by modifying the Cu surface [1]. Another possible solution is to maximize the portion of the EP-Cu volume in the vias or damascene structures with the conformal diffusion barrier and seed layer by optimizing their deposition processes during Cu interconnect fabrication, which are currently ionized physical vapor deposition (IPVD)-based Ta/TaN bilayer and IPVD-Cu, respectively. The use of in-situ etching, during IPVD of the barrier or the seed layer, has been effective in enlarging the trench volume where the Cu is filled, resulting in improved reliability and performance of the Cu-based interconnect. However, the application of IPVD technology is expected to be limited eventually because of poor sidewall step coverage and the narrow top part of the damascene structures. Recently, Ru has been suggested as a diffusion barrier that is compatible with the direct plating of Cu [2-3]. A single-layer diffusion barrier for the direct plating of Cu is desirable to optimize the resistance of the Cu interconnects because it eliminates the Cu-seed layer. However, previous studies have shown that the Ru by itself is not a suitable diffusion barrier for Cu metallization [4-6]. Thus, the diffusion barrier performance of the Ru film should be improved in order for it to be successfully incorporated as a seed layer/barrier layer for the direct plating of Cu. The improvement of its barrier performance, by modifying the Ru microstructure from columnar to amorphous (by incorporating the N into Ru during PVD), has been previously reported [7]. Another approach for improving the barrier performance of the Ru film is to use Ru as a just seed layer and combine it with superior materials to function as a diffusion barrier against the Cu. A RulTaN bilayer prepared by PVD has recently been suggested as a seed layer/diffusion barrier for Cu. This bilayer was stable between the Cu and Si after annealing at $700^{\circ}C$ for I min [8]. Although these reports dealt with the possible applications of Ru for Cu metallization, cases where the Ru film was prepared by atomic layer deposition (ALD) have not been identified. These are important because of ALD's excellent conformality. In this study, a bilayer diffusion barrier of Ru/TaCN prepared by ALD was investigated. As the addition of the third element into the transition metal nitride disrupts the crystal lattice and leads to the formation of a stable ternary amorphous material, as indicated by Nicolet [9], ALD-TaCN is expected to improve the diffusion barrier performance of the ALD-Ru against Cu. Ru was deposited by a sequential supply of bis(ethylcyclopentadienyl)ruthenium [Ru$(EtCp)_2$] and $NH_3$plasma and TaCN by a sequential supply of $(NEt_2)_3Ta=Nbu^t$ (tert-butylimido-trisdiethylamido-tantalum, TBTDET) and $H_2$ plasma. Sheet resistance measurements, X-ray diffractometry (XRD), and Auger electron spectroscopy (AES) analysis showed that the bilayer diffusion barriers of ALD-Ru (12 nm)/ALD-TaCN (2 nm) and ALD-Ru (4nm)/ALD-TaCN (2 nm) prevented the Cu diffusion up to annealing temperatures of 600 and $550^{\circ}C$ for 30 min, respectively. This is found to be due to the excellent diffusion barrier performance of the ALD-TaCN film against the Cu, due to it having an amorphous structure. A 5-nm-thick ALD-TaCN film was even stable up to annealing at $650^{\circ}C$ between Cu and Si. Transmission electron microscopy (TEM) investigation combined with energy dispersive spectroscopy (EDS) analysis revealed that the ALD-Ru/ALD-TaCN diffusion barrier failed by the Cu diffusion through the bilayer into the Si substrate. This is due to the ALD-TaCN interlayer preventing the interfacial reaction between the Ru and Si.

• Korean Chemical Engineering Research
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• v.55 no.2
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• pp.242-246
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• 2017

The application of composite cathode materials including $LiFePO_4$ (lithium iron phosphate) of olivine crystal structure, which has high thermal stability, were investigated as alternatives for hybrid battery-capacitors with a $LiMn_2O_4$ (spinel crystal structure) cathode, which exhibits decreased performance at high temperatures due to Mn-dissolution. However, these composite cathode materials have been shown to have a reduction in capacity by conducting life cycle experiments in which a $LiFePO_4$/activated carbon cell was charged and discharged between 1.0 V and 2.3 V at two temperatures, $25^{\circ}C$ and $60^{\circ}C$, which caused a degradation of the anode due to the lowered voltage in the anode. To avoid the degradation of the anode, composite cathodes of $LiFePO_4/LiMn_2O_4$ (50:50 wt%), $LiFePO_4$/activated carbon (50:50 wt%) and $LiNi_{1/3}Co_{1/3}Mn_{1/3}O_2$ (50:50 wt%) were prepared and the life cycle experiments were conducted on these cells. The composite cathode including $LiNi_{1/3}Co_{1/3}Mn_{1/3}O_2$ of layered crystal structure showed stable voltage behavior. The discharge capacity retention ratio of $LiNi_{1/3}Co_{1/3}Mn_{1/3}O_2$ was about twice as high as that of a $LiFePO_4/LiMn_2O_4$ cell at thermal stability experiment for a duration of 1,000 hours charged at 2.3 V and a temperature of $80^{\circ}C$.

• Management & Information Systems Review
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• v.31 no.3
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• pp.223-248
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• 2012

This study analyses support policy and structural change of textile industry in Daegu Kyungbuk region, and suggests major issues for textile industry's innovation. In Daegu Kyungbuk, it was 1999 that a policy, so called Milano Project, in order to promote a textile industry was devised. In 2004, the Regional Industrial Promotion Plan was devised. The plan was born from a view point of establishing a regional innovation system and of promoting the innovative clusters under a knowledge based economy. After then, the Regional Industry Promotion Project or Regional Strategic Industry Promotion Project became a core of regional textile industrial policy. Research results indicated that the first stage Milano project (1999-2003) showed both positive and negative effects. There were no long-term development plan, clear vision and strategy. But, core industrial infrastructure for differentiated product development, such as New product Development Support Center and Dyeing Design Practical Application Center, was constructed. The second stage Daegu Textile Industry Promotion Plan (2004-2008) displayed a significant technological performance and new product sales with the assistance of Kyungbuk province. Also, textile industry revealed positive fruits such as financial structure, productivity, and profitability as a result of strong restructuring. In industrial structure, there was a important change from clothe textile material to industry textile material. Most of textile companies did not showed high capability in CEO's technology innovation intention, entrepreneurship, R&D and human resource competency in compare with other industry. We suggested that Daegu Kyungbuk has to select and concentrate on the high-tech textile material and living textile for sustainable development and competitiveness. We also proposed a confidence and cooperation based innovation network and company oriented innovation cluster.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.26 no.12
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• pp.605-619
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• 2014

This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2013. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) The research works on the thermal and fluid engineering have been reviewed as groups of fluid machinery, pipes and relative parts including orifices, dampers and ducts, fuel cells and power plants, cooling and air-conditioning, heat and mass transfer, two phase flow, and the flow around buildings and structures. Research issues dealing with home appliances, flows around buildings, nuclear power plant, and manufacturing processes are newly added in thermal and fluid engineering research area. (2) Research works on heat transfer area have been reviewed in the categories of heat transfer characteristics, pool boiling and condensing heat transfer and industrial heat exchangers. Researches on heat transfer characteristics included the results for general analytical model for desiccant wheels, the effects of water absorption on the thermal conductivity of insulation materials, thermal properties of Octadecane/xGnP shape-stabilized phase change materials and $CO_2$ and $CO_2$-Hydrate mixture, effect of ground source heat pump system, the heat flux meter location for the performance test of a refrigerator vacuum insulation panel, a parallel flow evaporator for a heat pump dryer, the condensation risk assessment of vacuum multi-layer glass and triple glass, optimization of a forced convection type PCM refrigeration module, surface temperature sensor using fluorescent nanoporous thin film. In the area of pool boiling and condensing heat transfer, researches on ammonia inside horizontal smooth small tube, R1234yf on various enhanced surfaces, HFC32/HFC152a on a plain surface, spray cooling up to critical heat flux on a low-fin enhanced surface were actively carried out. In the area of industrial heat exchangers, researches on a fin tube type adsorber, the mass-transfer kinetics of a fin-tube-type adsorption bed, fin-and-tube heat exchangers having sine wave fins and oval tubes, louvered fin heat exchanger were performed. (3) In the field of refrigeration, studies are categorized into three groups namely refrigeration cycle, refrigerant and modeling and control. In the category of refrigeration cycle, studies were focused on the enhancement or optimization of experimental or commercial systems including a R410a VRF(Various Refrigerant Flow) heat pump, a R134a 2-stage screw heat pump and a R134a double-heat source automotive air-conditioner system. In the category of refrigerant, studies were carried out for the application of alternative refrigerants or refrigeration technologies including $CO_2$ water heaters, a R1234yf automotive air-conditioner, a R436b water cooler and a thermoelectric refrigerator. In the category of modeling and control, theoretical and experimental studies were carried out to predict the performance of various thermal and control systems including the long-term energy analysis of a geo-thermal heat pump system coupled to cast-in-place energy piles, the dynamic simulation of a water heater-coupled hybrid heat pump and the numerical simulation of an integral optimum regulating controller for a system heat pump. (4) In building mechanical system research fields, twenty one studies were conducted to achieve effective design of the mechanical systems, and also to maximize the energy efficiency of buildings. The topics of the studies included heating and cooling, HVAC system, ventilation, and renewable energies in the buildings. Proposed designs, performance tests using numerical methods and experiments provide useful information and key data which can improve the energy efficiency of the buildings. (5) The field of architectural environment is mostly focused on indoor environment and building energy. The main researches of indoor environment are related to infiltration, ventilation, leak flow and airtightness performance in residential building. The subjects of building energy are worked on energy saving, operation method and optimum operation of building energy systems. The remained studies are related to the special facility such as cleanroom, internet data center and biosafety laboratory. water supply and drain system, defining standard input variables of BIM (Building Information Modeling) for facility management system, estimating capability and providing operation guidelines of subway station as shelter for refuge and evaluation of pollutant emissions from furniture-like products.

• Geophysics and Geophysical Exploration
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• v.21 no.3
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• pp.150-161
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• 2018

Recently, unmanned aircraft EM (electromagnetic) survey based on ICT (Information and Communication Technology) has been widely utilized because of the efficiency in regional survey. We performed the theoretical study on the unmanned airship EM system developed by KIGAM (Korea Institute of Geoscience and Mineral resources) as part of the practical application of unmanned aircraft EM survey. Since this system has different configurations of transmitting and receiving loops compared to the conventional aircraft EM systems, a new technique is required for the appropriate interpretation of measured responses. Therefore, we proposed a method to calculate the EM field for the arbitrary shaped transmitter and verified its validity through the comparison with analytic solution for circular loop. In addition, to simulate the magnetic responses by three-dimensionally (3D) distributed anomalies, we have adapted our algorithm to 3D frequency-domain EM modeling algorithm based on the edge-FEM (finite element method). Though the analysis on magnetic field responses from a subsurface anomaly, it was found that the response decreases as the depth of the anomaly increases or the flight altitude increases. Also, it was confirmed that the response became smaller as the resistivity of the anomaly increases. However, a nonlinear trend of the out-of-phase component is shown depending on the depth of the anomaly and the used frequency, that makes it difficult to apply simple analysis based on the mapping of the magnitude of the responses and can cause the non-uniqueness problem in calculating the apparent resistivity. Thus, it is a prerequisite to analyze the appropriate frequency band and flight altitude considering the purpose of the survey and the site conditions when conducting a survey using the unmanned aircraft EM system.

• Clinical and Experimental Reproductive Medicine
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• v.26 no.1
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• pp.9-20
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• 1999

The genetic defects in human gametes and embryos can cause adverse effects on overall reproductive events. Biopsy of embryos for preimplantation genetic diagnosis (PGD) offers a new possibility of having children free of the genetic disease. In addition, advanced embryo culture method may enhance the effectiveness of embryo biopsy for the practical application of PGD. This experimental study was undertaken to evaluate the effects of coculture on the development in vitro of biopsied mouse embryos as a preclinical model for PGD of human embryos. Embryos were obtained after in vitro fertilization (IVF) from F1 hybrid mice (C57BLfemale/CBAmale). Using micromanipulation, 1, 2, 3 or 4 blastomeres of 8-cell stage embryos were aspirated through a hole made in the zona pellucida by zona drilling (ZD) with acidic Tyrode's solution (ATS). After biopsy of blastomeres, embryos were cultured in vitro for 110 hours in Ham's F-10 supplemented with 0.4% BSA or cocultured on the monolayer of Vero cells in the same medium. The frequence of blastocyst formation were recorded, and the embryos beyond blastocyst stage were stained with 10% Giemsa to count the total number of nuclei in each embryo. There was no significant difference in the blastocyst formation between the zona intact control group and the zona drilling (ZD) only, or biopsied groups. The hatching rate of all the treatment groups except 4/8 group was significantly higher than that of control group. In all the treatment groups, there was a significant reduction in the mean cell number of embryos beyond blastocyst stage ($50.2{\pm}14.0$ in control group vs. $41.2{\pm}7.9$ in ZD, $39.3{\pm}8.8$ in 7/8, $29.7{\pm}6.4$ in 6/8, $25.1{\pm}5.7$ in 5/8, and $22.1{\pm}4.3$ in 4/8 groups, p<0.05). When the same treatments were followed by coculture with Vero cells, a similar pattern was seen in the blastocyst formation and the hatching rate. However, in all the treatment groups, there was a significant increase in the mean cell number of embryos beyond blastocyst stage with coculture, compared with the parallel groups without coculture. In the cleavage rate of biopsied blastomeres cultured for 110 hours after IVF, there was no significant difference between coculture and non-coculture groups (87.2% vs. 78.7%). However, the mean cell number of embryos developed from the biopsied blastomeres was significantly higher in coculture group ($11.5{\pm}4.7\;vs.\;5.9{\pm}1.9$, p<0.05). In conclusion, biopsy of mouse embryos after ZD with ATS is a safe and highly efficient method for PGD, and coculture with Vero cells showed a positive effect on the development in vitro of biopsied mouse embryos and blastomeres as a preclinical model for PGD of human embryos.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.12 no.12
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• pp.1098-1125
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• 2000

A review on the papers published in the Korean Journal of Air-Conditioning and Refrigerating Engineering in 1998 and 1999 has been done. Focus has been put on current status of research in the aspect of heating, cooling, ventilation, sanitation and building environment. The conclusions are as follows. 1) A review of the recent studies on fluid flow, turbomachinery and pipe-network shows that many experimental investigations are conducted in applications of impingement jets. Researches on turbulent flows, pipe flows, pipe-networks are focused on analyses of practical systems and prediction of system performance. The results of noise reduction in the turbomachinery are also reported. 2) A review of the recent studies on heat transfer analysis and heat exchanger shows that there were many papers on the channel flow with the application to the design of heat exchanger in the heat transfer analysis. Various experimental and numerical papers on heat exchanger were also published, however, there were few papers available for the analysis of whole system including heat exchanger. 3) A review of the recent studies on heat pump system have focused on the multi-type system and the heat pump cycle to utilize treated sewage as the heat source. The defrosting and the frosting behaviors in the fin-tube heat exchanger is experimentally examined by several authors. Several papers on the ice storage cooling system are presented to show the dynamic simulation program and optimal operation conditions. The study on the micro heat pipes for the cooling of high power electronic components is carried out to examine the characteristics of heat and mass transfer processed. In addition to these, new type of separate thermosyphon is studied experimentally. 4) The recent studies on refrigeration/air conditioning system have focused on the system performance and efficiency for new alternative refrigerants. New systems operating with natural refrigerants are drawing lots of attention. In addition to these, evaporation and condensation heat transfer characteristics of traditional and new refrigerants are investigated for plain tubes and also for microfin tubes. Capillary tubes and orifice are main topics of research as expansion devices and studies on thermophysical properties of new refrigerants and refrigerant/oil mixtures are widely carried out. 5) A review of the recent studies on absorption cooling system shows that numerous experimental and analytical studies on the improvement of absorber performance have been presented. Dynamic analysis of compressor have been performed to understand its vibration characteristics. However research works on tow-phase flow and heat transfer, which could be encountered in the refrigeration system and various phase-change heat exchanger, were seemed to be insufficient. 6) A review of recent studies on duct system shows that the methods for circuit analysis, and flow balancing have been presented. Researches on ventilation are focused on the measurement of ventilation efficiency, and variation of ventilation efficiency with ventilation methods by numerous experimental and numerical studies. Furthermore, many studies have been conducted in real building in order to estimate indoor thermal environments. Many research works to get some information for cooling tower design have been performed but are insufficient. 7) A review on the recent studies on architectural thermal environment and building mechanical systems design shows that thermal comfort analysis is sitting environment, thermal performance analysis of Korean traditional building structures., and evaluation of building environmental load have been performed. However research works to improve the performance of mechanical system design and construction technology were seemed to be insufficient.

• Journal of Cadastre & Land InformatiX
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• v.50 no.1
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• pp.107-123
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• 2020

With stabilization of the recent multi-GNSS infrastructure, and as multi-GNSS has been proven to be effective in improving the accuracy of the positioning performance in various industrial sectors. In this study, in view that SF(Single frequency) GNSS receivers are widely used due to the low costs, evaluate effectiveness of SF Real Time Point Positioning(SF-RT-PP) based on four multi-GNSS surveying methods with RTCM-SSR correction streams in static and kinematic modes, and also derive response challenges. Results of applying SSR correction streams, CNES presented good results compared to other SSR streams in 2D coordinate. Looking at the results of the SF-RT-PP surveying using SF signals from multi-GNSS, were able to identify the common cause of large deviations in the altitude components, as well as confirm the importance of signal bias correction according to combinations of different types of satellite signals and ionospheric delay compensation algorithm using undifferenced and uncombined observations. In addition, confirmed that the improvement of the infrastructure of Multi-GNSS allows SF-RT-SPP surveying with only one of the four GNSS satellites. In particular, in the case of code-based SF-RT-SPP measurements using SF signals from GPS satellites only, the difference in the application effect between broadcast ephemeris and SSR correction for satellite orbits/clocks was small, but in the case of ionospheric delay compensation, the use of SBAS correction information provided more than twice the accuracy compared to result of the Klobuchar model. With GPS and GLONASS, both the BDS and GALILEO constellations will be fully deployed in the end of 2020, and the greater benefits from the multi-GNSS integration can be expected. Specially, If RT-ionospheric correction services reflecting regional characteristics and SSR correction information reflecting atmospheric characteristics are carried out in real-time, expected that the utilization of SF-RT-PPP survey technology by multi-GNSS and various demands will be created in various industrial sectors.

• Korean Journal of Plant Resources
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• v.25 no.1
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• pp.156-168
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• 2012

Chrysanthemum is a cut flower species that normally lasts for 1 to 2 weeks, in some cases 3-4 weeks. This has been attributed to low ethylene production during senescence. Reduction in cut flower quality has been attributed to the formation of air embolisms that partially or completely blocks the water transport from the vase solution to the rest of the cut flower stem, increasing hydraulic resistance which may cause severe water stress, yellowing, wilting of leaf, and chlorophyll degradation. Standard type chrysanthemum can be harvested when buds were still tightly closed and then fully opened with the simple bud-opening solution. Standard type chrysanthemum can also be harvested when the minimum size of the inflorescence is about 5-6 cm bud which opened into the first flower full-sized flower. While spray varieties can be harvested when 2-4 most mature flowers have opened (40% opening). Cut flowers are sorted by stem length, weight, condition, and so on. Standard chrysanthemum is 80 cm length for standard type and 70cm for spray type. Pre-treatment with a STS, plant regulator such as GA, BA, 1-MCP, chrysal, germicide, and sucrose, significantly improved the vase life and quality of cut flowers. It is well established that vase solutions containing sugar can improve the vase life of cut chrysanthemum. Chrysanthemum is normally packed in standard horizontal fiberboard boxes. Chrysanthemum should normally be stored at $5{\sim}7^{\circ}C$. Precooling resulted in reduction in respiration, decomposition, and transpiration activities as well as decoloration retardation. There was significant difference between "wet" storage in 3 weeks and "dry" storage in 2 weeks. In separate pulsing solution trials, various germicides were tested, as well as PGRs to maintain the green color of leaves and turgidity. Prolonging vase life was attained with the application of optimal solution such as HQS, $AgNO_3$, GA, BA and sucrose. This also retarded senescence in leaves of cut flower stems. Fresh cut chrysanthemum can be transported using a refrigerated van with $5{\sim}7^{\circ}C$. Increasing consumption and usage of cut chrysanthemum of various cultivars would require efficient transport system, and effective information exchange among producer, wholesaler, and consumer.

• Journal of the Korean Geographical Society
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• v.28 no.2
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• pp.148-162
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• 1993

There is much speculation that modern capi-talist society is undergoing fundamental and qualitative chnge towards flexible specialization. The purpose of this study is to examine this hypothesis. This paper focusses on: the idea of flexible specialization; the significance of this transition; industrial district; and the implicati-ons of this new production system for Korean industrial space. Main arguments of this study are as follows: First, as all different groups of researchers apply the idea of flexible specialization according to their own specifications, the current debate on this topic is not much fruitful. Not surpri-singly, the concept of flexible specialization has overlapped with subocontracting. This intergration of subcontracting into flexible specialization systems, however, is inappropriate because the two concepts have different historical contexts. The other cause of this controversy is its inherent weekness, conceptual ambiguity. Thus, today's flexibility becomes tomorrow's rigidity. Secondly, transition towards flexible speciali-zation has only been partially achieved even in advanced capitalist countries. The application of dualistic explanatory framework, such as rigidity versus flexibiity, mass production versus small-lot multi-product production, and de-skilling versus re-skilling, has resulted in great exaggeration of the transformation, from Fordism to post-Fordism. There is no intermediary part between two places. Considering that the workers allocated to the Fordist mass production assembly line are not as large as one might imagine, the shift from mass to flexible production has only limited implications for the transformation of capitalist economy. Thirdly, 'industrial district' contorversy has contributed to highlighting the importance of small firms and areas as production space. The agglomeration of small firms in specific areas is common in Korea, but it is quite different from the industrial district based on flexible specialization. The Korean phenomenon stems from close interactions with its major parent firm rather than interactions between flexible, specialized, autonomous and technology-intensive smll firms. Most Korean subcontractors are still low-skilled, labour-intensive, and heavily dependent on their mojor parent firms. Thus, the assertion that the Seoul Metropolitan Area adopts flexible specialization has no base. Fourthly, the main concern of flexible speciali zation is small firms. However, the corporate organization that needs product diversification and technological specialization is oligopolistic large corporations typified by multinational corporations. It is because of this that most of these organizations are adoptiong Fordist mass production methods. The problem of product diversification will be resolved naturally if economic internationalization progresses further. What is more important for business success is the quality and price competitiveness of firms rather than product diversification. Lastly, in order to dispel further misunderst-anding on this issue, it is imparative that the conceptual ambiguity is resolved most urgently. This study recommends adoption of more speci-fied and direct terminology (such as, factory automation, computer design, out-sourcing, the exploitation of part-time labor, job redesign) rather than that of ideological ones (such as, Taylorism, Fordism, neo-Taylorism, neo-Fordism, post-fordism, flexible specialization, peripheral post-Fordism). As the debates on this topic just started, we still have long way to go until consensus is reached.