• Tribology and Lubricants
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• 제31권3호
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• pp.79-85
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• 2015

RC delay is a critical issue for achieving high performance of ULSI devices. In order to minimize the RC delay time, we uses the CMP process to introduce high-conductivity Cu and low-k materials on the damascene. The low-k materials are generally soft and fragile, resulting in structure collapse during the conventional high-pressure CMP process. One troubleshooting method is electrochemical mechanical polishing (ECMP) which has the advantages of high removal rate, and low polishing pressure, resulting in a well-polished surface because of high removal rate, low polishing pressure, and well-polished surface, due to the electrochemical acceleration of the copper dissolution. This study analyzes an electrochemical state (active, passive, transpassive state) on a potentiodynamic curve using a three-electrode cell consisting of a working electrode (WE), counter electrode (CE), and reference electrode (RE) in a potentiostat to verify an electrochemical removal mechanism. This study also tries to find optimum conditions for ECMP through experimentation. Furthermore, during the low-pressure ECMP process, we investigate the effect of current density on surface roughness and removal rate through anodic oxidation, dissolution, and reaction with a chelating agent. In addition, according to the Faraday’s law, as the current density increases, the amount of oxidized and dissolved copper increases. Finally, we confirm that the surface roughness improves with polishing time, and the current decreases in this process.

• 센서학회지
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• 제22권2호
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• pp.144-149
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• 2013

In this research, we developed a biosensor to detect lung cancer-specific biomarker using Anodic Aluminum Oxide (AAO) chip based on interference and nano surface plasmon resonance (nanoSPR). The nano-porous AAO chip was fabricated $2{\mu}m$ of pore-depth by two-step anodizing method for surface uniformity. NanoSPR has sensitivity to the refractive index (RI) of the surrounding medium and also provides simple and label-free detection when specific antibodies are immobilized to the Au-deposited surface of nano-porous AAO chip. To detect the lung cancer-specific biomarker, antibodies were immobilized on the surface of the chip by Self Assembled Monolayer (SAM) method. Since then lung cancer-specific biomarker was applied atop the antibodies immobilized layer. The specific reaction of the antigen-antibody contributed to the change in the refractive index that cause shift of resonance spectrum in the interference pattern. The Limit of Detection (LOD) was 1 fg/ml by using our nano-porous AAO biosensor chip.

• Journal of Electrochemical Science and Technology
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• 제8권2호
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• pp.155-161
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• 2017

Carbon felts were prepared under various thermal conditions to improve the electrochemical properties of vanadium redox flow batteries. The number of C-O and/or C-OH functional groups on the surface of the electrodes treated under airless conditions was much larger than that of the untreated and partially oxygen-treated electrodes. The carbon felt treated under airless conditions had the lowest surface area. The overall kinetic properties of the redox reaction were greatly improved for the carbon felt treated under airless conditions; i.e., the reversibility of the anodic and cathodic reactions associated with the $VO_2{^+}/VO^{2+}$ couple became more reversible. Single-cell tests indicated that the carbon felt exhibited an excellent discharge capacity of $3.1Ah{\cdot}g^{-1}$ at $40mA{\cdot}cm^{-2}$, and the corresponding Coulombic, voltage, and energy efficiencies were 89.5%, 91.8%, and 82.2%, respectively.

• Corrosion Science and Technology
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• 제5권6호
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• pp.218-221
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• 2006

Influence of microstructure on the corrosion property of Mg-Al-Zn alloy was investigated using potentiodynamic polarization experiments, galvanic coupling experiments, and scanning electron microscopy in sodium chloride solutions. Pitting was the most common form of attack in chloride solution, and filiform corrosion was also occurred in AZ91D-T4 alloy. On the contrary, filiform attack in the bulk matrix was predominant corrosion form in AZ91D-T6 alloy, and the number and size of pit were decreased than those of AZ91D-T4 alloy. Galvanic coupling effect between $Mg_{17}Al_{12}$ and matrix was existed, but the propagation of galvanic corrosion was localized only near the $Mg_{17}Al_{12}$ phase in AZ91D-6T alloy. The corrosion resistance of Mg-Al matrix increased with decreasing Al content in the matrix. And, it could be regarded that Al content in the matrix is decreased by precipitation of $Mg_{17}Al_{12}$ during the aging treatment and it decreases the anodic reaction rate of the matrix and galvanic effect in AZ91D-T6 alloy. It could be considered that the composition and microstructure of surface protective layer would be varied by precipitation of $Mg_{17}Al_{12}$ and subsequent decreasing of Al content in the matrix. And it would contribute the corrosion resistance of AZ91D-T6 aging alloy.

• 한국재료학회지
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• 제15권8호
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• pp.528-535
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• 2005

It is inclined to increase that use of hazardous substances such as lead(Pb), mercury (Hg), cadmium(Cd) etc. are prohibited in the electronics according to environmental friendly policies of an advanced nation for protecting environment of earth. As this reasons, many researches for ensuring the reliability were proceeding in Pb free soldering process. n the flux remains on the PCB(printed circuit board) in the soldering process or the electronics exposed to corrosive environment, it becomes the reasons of breakdown or malfunction of the electronics caused by corrosion. Therefore in this studies we researched the polarization and Tafel properties of Sn40Pb and SnCu system solders based on the electrochemical theory. The experimental polarization curves were measured in distilled ionized water and 1 mole $3.5 wt\%$ NaCl electrolyte of $40^{\circ}C$, pH 7.5. Ag/AgCl and graphite were utilized by reference and counter electrodes, respectively. To observe the electrochemical reaction, polarization test was conducted from -250mV to +250mV. From the polarization curves composed of anodic and cathodic curves, we obtained Tafel slop, reversible electrode potential(Ecorr) and exchange current density((cow). In these results, we compared the corrosion rate of SnPb and SnCu solders.

• 한국표면공학회지
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• 제18권4호
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• pp.153-163
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• 1985

In the electroless nickel plating bath which contained nickel sulfate, sodium hypophosphite, boric acid and triethanolamine, effect of their concentration on the rate of deposition was tested by gravimetric method and polarization method. The polarization method that polarize small range of voltage anodicaly and cathodicaly at the mixed potential in the electroless plating bath can calculate mixed current (depositing rate) from $i_{mp}=\frac {i}{\eta}\;\frac{RT}{nF}\;or\;i_{mp}=\frac{i}{\eta}\;\frac{1}{2.3}(\frac{b_a\;\;b_c}{b_c+b_a})$ Where $i_{mp}$ is the depositing current, i is the polarized current, ${\eta}$ is the polarized voltage, $b_a\;and\;b_c$ are the Tafel slop of anodic and cathodic polarization curves respectively. The calculated mixed current ($i_{mp}$) is proportional to the depositing rate obtained by gravimetric method and corresponded mostly to the real depositing rate by multifying supplementary constant. The polarization method can be used for founding inclination of reaction on various concentration of each composition. Decreasing or increasing concentration of triethanolaminc as a complexing agent , the depositing rate is decreased and when the bath contained 25-50mL/L of triethanoloamine, the depositing rate is increased. The depositing rate is increased with increasing the concentration of boric acid, and when the bath contained 0.5M of boric acid, the depositing rate is increased abruptly. The optimum composition of the electroless nickel bath was estimated 0.1M of nickel sulfate, 0.25M of sodium hypophosphite, 0.5M of boric acid, and 25-50mL/L of triethanalamine.

• 대한전자공학회논문지SD
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• 제40권5호
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• pp.285-289
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• 2003

본 논문에서는 실리콘 기판상의 전송선로 특성을 개선하기 위하여 표면 마이크로머시닝 기술과 새로운 산화법(H₂O/O₂ 분위기에서 500℃, 1시간 열산화와 1050℃, 2 분간 RTO(Rapid Thermal Oxidation) 공정)을 이용하여 10 ㎛ 두께의 다공질 실리콘 산화막(oxidized porous silicon:OPS) air-bridge 기판 위에 공면 전송선로(Coplanar Waveguide:CPW)를 제작하였다. 간격이 40 ㎛ 신호선이 20 ㎛ 전송선 길이가 2.2 mm인 CPW air-bridge 전송선의 삽입손실은 4 GH에서 -0.28 dB이며, 반사손실은 -22.3 유를 나타내었다. OPS air-bridge 위에 형성된 CPW의 손실이 OPS층 위에 형성된 CPW의 삽입손실보다 약 1 dB 정도 적은 것을 보여주었으며, 반사손실은 35 GHz 범위에서 약 -20 dB를 넘지 않고 있다. 이와 같은 결과로부터 두꺼운 다공질 실리콘 멤브레인 및 air-bridge 구조는 고 저항 실리콘 집적회로 공정에서 고성능, 저가의 마이크로파 및 밀리미터파 회로 응용에 충분히 활용 될 수 있으리라 기대된다.

• Journal of Electrochemical Science and Technology
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• 제8권1호
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• pp.7-14
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• 2017

This study aims to examine the influences of substrates/diffusion layers (DL) and oxygen reduction reaction catalysts ($M_{ORR}$) on the performance of $M_{ORR}/IrO_2$/DL-type bifunctional oxygen electrodes for use in polymer electrolyte membrane (PEM)-type unitized regenerative fuel cells (URFC). The $M_{ORR}/IrO_2$/DL electrodes were prepared via two sequential steps: anodic electrodeposition of $IrO_2$ on various DLs and fabrication of $M_{ORR}$ layers (Pt, Pd, and Pt-Ru) by spraying on $IrO_2/DL$. Experiments using different DLs, with Pt as the $M_{ORR}$, revealed that the roughness factor of the DL mainly determined the electrode performance for both water electrolyzer (WE) and fuel cell (FC) operations, while the contributions of porosity and substrate material were insignificant. When Pt-Ru was utilized as the $M_{ORR}$ instead of Pt, WE performance was enhanced and the electrode performance was assessed by analyzing round-trip efficiencies (${\varepsilon}_{RT}$) at current densities of 0.2 and $0.4A/cm^2$. As a result, using Pt-Ru instead of Pt alone provided better ${\varepsilon}_{RT}$ at both current densities, while Pd resulted in very low ${\varepsilon}_{RT}$. Improved efficiency was related to the additional catalytic action by Ru toward ORR during WE operation.

• 한국결정성장학회지
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• 제9권3호
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• pp.334-338
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• 1999

p형 단결정 규소 웨이퍼를 불화수소 용액속에서 전류밀도와 양극반응 시간을 변화시켜 다공질규소를 제작하고, 그 질량을 측정한 후 이 값으로부터 다공도와 쪽거리(fractal) 차원을 계산하였다. 그 결과 양극반응 시간이 일정한 경우 다공도는 전류밀도에 비례하였다. 그리고 전류밀도가 일정한 경우 여러 양극반응 시간의 데이터로부터 얻은 쪽거리 차원은 일정하였다. 또한 쪽거리 차원은 불화수소의 농도 증가에 따라 감소하였다. 이같은 실험결과를 퍼짐한계침전(diffusion limited depostion) 모형으로 계산된 2차원 컴퓨터 시늉내기(simulation) 결과와 비교 분석하였다. 시늉내기 결과 다공도는 퍼짐거리에 비례하였으며, 쪽거리 차원은 퍼짐거리와 반비례하였다. 이때 퍼짐거리는 전류밀도에 비례하고 불화수소의 농도에 반비례하는 물리량이므로 정성적으로 실험결과와 일치하였다. 그러나 쪽거리 차원이 증가함에 따라 다공도가 감소되는 결과는 실험결과와 상반되었다.

• Advances in environmental research
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• 제1권1호
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• pp.37-55
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• 2012

Here we show that perchlorate reduction during pitting corrosion of zero-valent titanium (ZVT) is likely caused by dissolved titanium species, especially Ti(II). Several possible mechanisms were suggested based on the literature and were evaluated based on experimental observations. Direct reduction of perchlorate on the bare metal of the ZVT electrode was thermodynamically infeasible due to the high anodic potential that was applied. Other potential mechanisms were considered such as reduction by small ZVT metal particles released from the electrode and direct reduction on the oxide layer of the electrode where potential was sufficiently reduced by a high ohmic potential drop. However, these mechanisms were not supported by experimental results. The most likely mechanism for perchlorate reduction was that during pitting corrosion, in which ZVT is partially oxidized to form dissolved ions such as Ti(II), which diffuse from the electrode surface and react with perchlorate in solution. This mechanism is supported by measurements of the dissolution valence and the molar ratio of ZVT consumed to perchlorate reduced (${\Delta}Ti(0)/{\Delta}ClO_4{^-}$). The results shown in this study demonstrate that ZVT undergoing pitting corrosion has the capability to chemically reduce perchlorate by producing dissolved Ti(II) and therefore, it has the potential to be applied in treatment systems. On the other hand, the results of this research imply that the application of ZVT undergoing pitting corrosion in treatment systems may not be feasible now due to several factors, including material and electricity costs and possible chloride oxidation.