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Selectively Oxidized Porous Silicon (SOPS) Substrate for Packaging
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박사학위논문, 한국과학기술원
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남충모 'Selectively Oxidized Porous Silicon (SOPS) Substrate for Packaging', 박사학위논문, 한국과학기술원, 1998
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Y. M. Kim, K. Y. Noh, J. Y. Park, J. H. Lee, Y. D. Kim, I. S. Yu, and C. S. Cho, 'Fabrication of Oxidized Porous Silicon(OPS) Air-Bridge for RF Application Using Micromachining Technology', JKPS, Vol. 39, Dec. 2001, pp. S268-S270
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