• 제목/요약/키워드: Al-alloying

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이온 주입과 기판 온도 효과에 의한 Al-1%Si 박막의 Hillock 형성 특성 (Characteristics of Hillock Formation in the Al-1%Si Film by the Effect of Ion Implantation and Substrate Temperature)

  • 최창억;이용봉;김정호
    • 한국전기전자재료학회논문지
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    • 제27권1호
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    • pp.8-13
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    • 2014
  • As packing density in integrated circuits increases, multilevel metallization process has been widely used. But hillock formed in the bottom layers of aluminum are well known to make interlayer short in multilevel metallization. In this study, the effects of ion implantation to the metal film and deposition temperature on the hillock formation were investigated. The Al-1%Si thin film of $1{\mu}m$ thickness was DC sputtered with substrate ($SiO_2/Si$) temperature of $20^{\circ}C$, $200^{\circ}C$, and $400^{\circ}C$, respectively. Ar ions ($1{\times}10^{15}cm^{-2}$: 150 keV) and B ions ($1{\times}10^{15}cm^{-2}$, 30 keV, 150 keV) were implanted to the Al-Si thin film. The deposited films were evaluated by SEM, surface profiler and resistance measuring system. As a results, Ar implanting to Al-Si film is very effective to reduce hillock size in the metal deposition temperature below than $200^{\circ}C$, and B implanting to an Al-Si film is effective to reduce hillock density in the high temperature deposition conditions around $400^{\circ}C$. Line width less than $3{\mu}m$ was free of hillock after alloying.

3차원 적층 제조 공정(DED) 기반 Al-6061+Al-12Si 합금 조합 실험 (Combinatorial Experiment for Al-6061 and Al-12Si alloy Based on Directed Energy Deposition (DED) Process)

  • 전서연;박수원;송용욱;박지원;박현영;이보람;최현주
    • 한국분말재료학회지
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    • 제30권6호
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    • pp.463-469
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    • 2023
  • Aluminum alloys, known for their high strength-to-weight ratios and impressive electrical and thermal conductivities, are extensively used in numerous engineering sectors, such as aerospace, automotive, and construction. Recently, significant efforts have been made to develop novel aluminum alloys specifically tailored for additive manufacturing. These new alloys aim to provide an optimal balance between mechanical properties and thermal/electrical conductivities. In this study, nine combinatorial samples with various alloy compositions were fabricated using direct energy deposition (DED) additive manufacturing by adjusting the feeding speeds of Al6061 alloy and Al-12Si alloy powders. The effects of the alloying elements on the microstructure, electrical conductivity, and hardness were investigated. Generally, as the Si and Cu contents decreased, electrical conductivity increased and hardness decreased, exhibiting trade-off characteristics. However, electrical conductivity and hardness showed an optimal combination when the Si content was adjusted to below 4.5 wt%, which can sufficiently suppress the grain boundary segregation of the α-Si precipitates, and the Cu content was controlled to induce the formation of Al2Cu precipitates.

Ni 기지 초내열합금의 고온산화 저항성에 미치는 Ti의 영향 (Effects of Ti on High Temperature Oxidation of Ni-Based Superalloys)

  • 박시준;서성문;유영수;정희원;장희진
    • Corrosion Science and Technology
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    • 제15권3호
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    • pp.129-134
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    • 2016
  • The effects of Ti on the high temperature oxidation of Ni-based superalloys were investigated by cyclic oxidation at $850^{\circ}C$ and $1000^{\circ}C$. The oxide scale formed at $850^{\circ}C$ consists of $Cr_2O_3$, $Al_2O_3$, and $NiCr_2O_4$ layers, while a continuous $Al_2O_3$ layer was formed at $1000^{\circ}C$. The oxidation rate of the alloy with higher Ti content was higher than the alloy with less Ti content at $850^{\circ}C$, possibly due to the increase in the metal vacancy concentration in the $Cr_2O_3$ layer involved by incorporation of $Ti^{4+}$. However, Ti improved the oxidation resistance of the superalloy at $1000^{\circ}C$ by reducing oxygen vacancy concentration in $Al_2O_3$ layer.

고온 부식환경에 대한 Fe-Cr-X 합금의 열역학적 반응경로에 관한 연구 (A Study of Thermodynamical Reaction Path in Fe-Cr-X Alloys at High Temperature Corrosion Environments)

  • 이병우;김우열
    • 수산해양기술연구
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    • 제32권4호
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    • pp.411-420
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    • 1996
  • The structure of the scale formed on the surface of Fe - Cr - X alloys exposed to 1143K high sulfidation($Ps_2$ = 1.11$\times$$10^-7$ atm, $Po_2$ = 3.11$\times$$10^-20$ atm) or sulfidation/oxidation(($Ps_2$= 1.06$\times$$10^-7$ atm, ($Po_2$ = 3.11$\times$$10^-18$ atm) environment has been observed and analysed using XRD, SEM/EDS. To investigate the possibility of protective film formed on the surface of the alloys, Aluminium, Nickel were selected as alloying elements. Thermodynamic phase stability diagram was used to predict the reaction path of scale formed on Fe - Cr - X alloys. Parabolic rate constant($K_p$) value with 6wt% Al in Fe - 25Cr alloy decreased significantly compared with the Fe - 25Cr alloy without 6wt% Al. Since thin layer of defect free sulfide film, (Al, Cr)Sx, was formed at the alloy/scale interface. Fe - rich sulfide scale at outer layer and Cr - rich sulfide scale containing porosity at inner layer of Fe - 25Cr alloy have been observed. The reaction path for these scales could be predicted by the thermodynamic stability diagram.

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Hydrogen Evolution Ability of Selected Pure Metals and Galvanic Corrosion Behavior between the Metals and Magnesium

  • Luo, Zhen;Song, Kaili;Li, Guijuan;Yang, Lei
    • Journal of Electrochemical Science and Technology
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    • 제11권4호
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    • pp.323-329
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    • 2020
  • The cathodic hydrogen evolution ability of different pure metals and their long term galvanic corrosion behavior with pure Mg were investigated. The hydrogen evolution ability of pure Ti, Al, Sn and Zr is weak, while that of Fe, W, Cr, and Co is very strong. Initial polarization test could not completely reveal the cathodic behavior of the tested metals during long term corrosion. The cathodic hydrogen evolution ability may vary significantly in the long term galvanic tests for different metals, especially for Al whose cathodic current density reduced to 1/50 of the initial value. The anodic polarization shows that Al and Sn as alloying elements are supposed to provide relatively good passive effect for Mg alloy, while Ag can provide a slight passive effect and Zn has little passive effect.

Mg-Al 합금의 크리프 거동에 미치는 합금원소의 영향 (Effect of Alloying Elements on Creep Behavior of Mg-Al Alloys)

  • 임현규;김세광;김도향
    • 한국주조공학회지
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    • 제32권1호
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    • pp.44-49
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    • 2012
  • In this study, three magnesium alloys were investigated; those are 1.5wt.% CaO added AM80, 1.0wt.% CaO added AM60, and conventional MRI153 alloys. Test specimens of three alloys were prepared by re-melting and casting into steel mold with ingots and machining. The mechanical properties and the creep behavior at 150 degrees Celsius of these specimens were determined and their microstructures were characterized using OM and SEM. For the application to die-casting, fluidity test were carried out with spiral mold. Compared with 1.0wt.% CaO added AM60 alloy, 1.5wt.% CaO added AM80 alloy exhibited good creep properties in all test conditions. Moreover, CaO added alloys showed better creep properties than MRI153 alloy at lower load condition. It is proposed that 1.5wt.% CaO added AM80 alloy is useful to apply to power-train parts such as transmission case in vehicles.

금속수소화물전극의 부식특성에 미치는 합금원소와 결합제의 영향 (Effects of Alloying Elements and Binding Materials on the Corrosion Behavior of Metal Hydride Electrodes)

  • 이양범;최한철;박지윤;김관휴
    • 한국수소및신에너지학회논문집
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    • 제9권4호
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    • pp.161-167
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    • 1998
  • Ni/MH 2차전지의 음극용 금속간화합물전극의 부식특성에 미치는 합금원소와 결합제의 영향을 조사하였다. 전극의 재료는 $(LM)Ni_{4.49}Co_{0.1}Mn_{0.205}Al_{0.205}$$(LM)Ni_{3.6}Co_{0.7}Mn_{0.3}Al_{0.4}$$AB_5$ type합금을 모재로 하였다. 여기에 Si sealant 또는 PTFE를 결합제로 첨가한 것과 원재료 분말에 구리를 20% 무전해도금한 것을 냉간 압착하여 전극을 제조하였다. 부식특성을 조사하기위해 탈공기된 6M의 KOH 용액에서 동전위법과 순환전위법을 이용하여 부식전류와 전류밀도를 측정하였다. 모재에 Co가 많이 함유되면 전극의 내식성을 향상시키고 Ni이 많이 함유되면 충전과 방전을 반복하는 동안에 전극의 안정성을 저하시켰다. 부식전류밀도는 Si sealant를 결합제로 사용한 전극의 경우가 PTFE를 사용한 전극의 경우보다 낮았고 Cu가 도금된 전극은 내식성에서 가장 우수하게 나타났다.

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기계적 합금화된 Ni-36at.%Al 합금의 상변태에 미치는 결정립 크기 및 냉각속도의 영향 (The Effect of Grain Size and Cooling Rate on Phase Transformation for Mechanically Alloyed Ni-36at.%Al Alloy)

  • 김성욱;김대건;김지순;안인섭;김영도
    • 한국재료학회지
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    • 제10권9호
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    • pp.642-647
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    • 2000
  • Ni-36at.%Al을 함유하는 나도 결정립의 NiAl 합금이 기계적 합금화법에 의해 제조되었다. 제조된 분말은 방전 플라즈마 소결법에 의해 만들어졌다. 상변테에 영향을 주는 인자는 냉각속도와 열처리 시간의 조건으로 논의되었다. 소결체의 상변태 거동은 시차 열분석(DSC)과 X-선 회절(XRD) 분석법에 의해 조사되었다. 미세구조는 주사전자현미경(SEM)으로 관찰되었다. 마르텐사이트 격사상수와 체적 분율은 X-선 회절분석법 중 직접비교법에 의해 계산되었다.

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SiCp입자강화 Al 복합재료에 대한 합금원소의 영향과 시효특성에 관한 연구 (A Study on Ageing Characteristics and Alloy Elements of SiCp Reinforced Al Matrix Composites)

  • 김석원;이의종;우기도;김동건
    • 한국주조공학회지
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    • 제21권1호
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    • pp.7-14
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    • 2001
  • The research on new DRA(discontinuous reinforced alloy) and CRA(continous reinforced alloy) composites has been carried out to improve the properties of ceramic fiber and particle reinforced metal matrix composites(MMCs). Effects of alloying elements and aging conditions on the microstructures and aging behavior of Al-Si-Cu-Mg-(Ni)-SiCp composite have been examined. The specimens used in this study were manufactured by duplex process. The first squeeze casting is the process to make precomposite and the second squeeze casting is the process to make final composite. The hardening behavior was accelerated with decreasing the size of SiCp particle in the composites. It is considered that the dislocation density increased with increasing SiCp size, due to the different thermal deformation between Al matrix and SiCp during quenching after the solution treatment. Peak aging time to obtain the maximum hardness in 3 ${\mu}m$ SiCp reinforced Al composite was reduced than that in large size(5, 10 ${\mu}m$) of SiCp because of difference in dislocation density. Aging hardening responce(${\Delta}H$ = $H_{Max}.-H_{S.T}$) of composites was greater than that of unreinforced Al alloy because of higher density of second phases in matrix.

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원료분말과 금속간화합물 분말로 기계적 합금화한 $Al_3$(${Nb_{1-x}}{Zn_x}$) 합금의 미세구조특성 (Microstructural Characterization of $Al_3$(${Nb_{1-x}}{Zn_x}$) Alloy Prepared by Elemental Powder and Intermetallic Powder)

  • 이광민;이지성;안인섭
    • 한국재료학회지
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    • 제11권5호
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    • pp.345-353
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    • 2001
  • 본 연구에서는 MA 방법을 사용하여 $Al_3$Nb 금속간화합물의 조성에 Zr을 첨가하여 $Al_3$(Nb$_{1-x}$ )Zr$_{x}$ 합금분말을 제조한 후 이에 따른 상변화 거동 및 미세구조특성을 분석하였다. MA는Al$_3$(Nb$_{1-x}$ )Zr$_{x}$의 조성으로 Al, Nb, Zr 원료분말과 arc meltinly된 $Al_3$Nb, $Al_3$Zr 금속간화합물 분말을 사용하여 300rpm의 회전속도로 20시간 동안 MA하였다. 이때의 정상상태의 원료분말은 약 4$\mu\textrm{m}$의 평균입도와 약 12~18nm의 결정립크기를 가졌으며, arc melting된 분말은 약 2$\mu\textrm{m}$의 평균입도와 약 14nm의 결정립크기를 가지는 분말을 얻을 수 있었다 원료분말과 금속간화합물 분말의 MA 기구는 상이한 거동을 나타내었으며, 분말의 내부변형량은 원료분말이 금속간화합 분말보다 내부변형량이 더 많이 축적되었다. 이는 원료분말의 MA 경우 냉간 압접과 파괴가 반복적으로 진행되었지만 금속간화합물 분말은 취약한 화합물상이어서 냉간압접 보다는 파괴가 지배적으로 진행되었기 때문이다. 원료분말을 MA하였을 경우에는 Al (Nb.Zr)$_2$상이 형성되었으나 금속간화합물 분말로 MA하였을 경우에는 3원계 화합물상이나 비정질상으로 상변태 되지 않고 단지 두 합금상이 분쇄되어 나노복합화 되었다. 후속 열처리에 의해 원료분말인 경우에는 $Al_3$(Nb.Zr)의 화합물상이 쉽게 형성되었으나, 금속간화합물 분말의 경우에는 새로운 상 생성은 얼었고 단지 열처리 전의 분말내부에 쌓여있던 내부변형에너지가 약 60% 정도 감소하였다.

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