Characteristics of Hillock Formation in the Al-1%Si Film by the Effect of Ion Implantation and Substrate Temperature
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Choi, Chang-Auk
(Nano Convergence Sensor Research Section, ETRI)
Lee, Yong-Bong (Convergence Components & Materials Research Laboratory, ETRI) Kim, Jeong-Ho (Department of Computer Engineering, Dean of Graduate School of Information & Communication, Hanbat National University) |
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