• Particle and aerosol research
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• v.13 no.2
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• pp.65-77
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• 2017

In recent large-scale semiconductor manufacturing cleanrooms, the energy consumption in outdoor air conditioning (OAC) systems to heat, humidify, cool and dehumidify outdoor air(OA) represents about 40~50 % of the total cleanroom power consumption required to maintain cleanroom environment. Therefore, the assessment of energy consumption in outdoor air conditioning systems is essential for reducing the outdoor air conditioning load for a cleanroom. In the present study, an experiment with an outdoor air flow rate of $1,000m^3/h$ was conducted to compare the energy consumption in steam humidification, simple air washer, exhaust air heat recovery type air washer and dry cooling coil(DCC) return water heat recovery type air washer OAC systems. Besides, a numerical analysis was carried out to evaluate the annual energy consumption of the aforementioned four OAC systems. It was shown that the simple air washer, exhaust air heat recovery type air washer and DCC return water heat recovery type air washer OAC systems using water spray humidification were more energy-efficient than the steam humidification OAC system. Furthermore the DCC return water heat recovery type air washer OAC system was the most energy-efficient.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.24 no.4
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• pp.297-305
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• 2012

In recent large-scale semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems to heat, humidify, cool and dehumidify incoming outdoor air represents about 45% of the total air conditioning load required to maintain a clean room environment. Therefore, the energy performance evaluation and analysis of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of outdoor air conditioning systems with a simple air washer, an exhaust air heat recovery type air washer and a DCC return water heat recovery type air washer. It was shown from the present lab-scale experiment with an outdoor air flow of 1,000 $m^3/h$ that the exhaust air heat recovery type and DCC return water heat recovery type air washer outdoor air conditioning systems were more energy-efficient for the summer and winter operations than the simple air washer outdoor air conditioning system and furthermore, the DCC return water heat recovery type one was the most energy-efficient in the winter operation.

• Journal of Advanced Marine Engineering and Technology
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• v.20 no.3
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• pp.74-81
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• 1996

The wave washer springs are widely used in non-return valves of fluid, especially in air check valves to confirm the rapid shut-off of valve propers. The stiffness of wave washer springs used in suction and exhaust valves of reciprocating air compressor play an important role on efficiency of the compressor. If the stiffness of the spring is too high, the pressure differences necessary to open the valves become high and the volumetric efficiency of cylinder decreasse. If the stiffness of the spring too low, the valve can not be closed rapidly and the inverse flow of air can take place. So, the optimum stiffness of valve spring is very important and it will be very helpful that the stiffness of wave washer springs to be used in suction and exhaust valves can be calculated in design stage of air compressor. In this paper the formula for calculating the spring constant of wave washer spring is introduced using bending and torsion theory of frames. The experiments are also carried out to measure the spring constants of several samples. It is proven that the calculated spring constants of wave washer springs are coincided well with measured values and that the formula presented in this paper for calculating the spring constants of wave washer spring is very useful for design of valves used in reciprocating air compressor.

• Journal of Fisheries and Marine Sciences Education
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• v.22 no.4
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• pp.604-610
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• 2010

Busan subway transportation system has been established a key role in the society last 20 years. However many people are suffering from hot and humid environment at subway station and platform due to deteriorated ventilation system as well as insufficient air conditioning system in existing stations and platforms. As a result, these systems require revitalization. There is about 5400tons of low temperature underground water is generated from subway stations every day. By using this method and air washer we are trying to lower the temperature. Air washer is commonly used for removing humidity but in this experiment it will be used as air precooling. This research offers result of experiment using air washer system to lower the temperature in large spaces like subway station. The experiment result has shown when L/G was the same, at condition which water spray temperature at $18^{\circ}C$ resulting inlet and outlet temperature difference larger. Also, in the same water spray temperature conditions, larger L/G condition showed a greater temperature difference. LCC evaluation of both system were shown that air washer system of using underground water will save 53% of the initial cost than refrigeration system, and save 75% of operating cost.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3413-3417
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• 2007

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from the outdoor air introduced into clean room. In the present study, an experiment was carried out to examine the improvement of removal efficiency for the gaseous contaminants. In order to improve the gas removal efficiency, a hot water contact heat exchanger was installed upstream of the air washer to heat and humidify the incoming outdoor air before entering the air washer.

• Proceedings of the SAREK Conference
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• 2008.06a
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• pp.720-724
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• 2008

The purpose of this study is to evaluate the PM10 removal efficiencies of an Air-washer and an Ultrasonic humidifier by mock-up experiments. The concentrations of PM10 were measured at 5 minute intervals using $\beta$-Ray method. The average PM10 removal efficiency of the Air-washer was 79.8%, while the PM10 concentrations increased with the operation of Ultrasonic humidifier. In the case of operating the Air-washer, the R.H(Relative Humidity) level of the test room was maintained at around 45%, regardless of initial R.H condition. The R.H of the test room with Ultrasonic humidifier was influenced by the initial R.H condition.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.21 no.5
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• pp.273-281
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• 2009

In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45% of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore useful for reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a preheating coil, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of $1,000\;m^3/h$ that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.988-992
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• 2006

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3,\;SO_x$ and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate the heat recovery and gas removal efficiencies of a direct atomization type heat recovery air washer.

• Proceedings of the SAREK Conference
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• 2008.11a
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• pp.446-451
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• 2008

Air washer remove dust on the air and use for humidification. But the last should be applied to the semiconductor and FPD industry, air washer has focused on removing pollutants. In addition, air washer within the clean room remove the pollutants as well as use for humidification in Winter. However, there is no research in the country, and for research purposes, the evaluation was conducted by atomizing water temperature variation and L/G variation. Performance evaluation results are the same conditions as the entrance of air washers ($23^{\circ}C$, 45%RH). Cooling effect is enhanced when atomizing water temperature is lower. The larger the performance of humidification to L/G lower the temperature increases.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.442-447
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• 2006

In semiconductor manufacturing clean rooms, it becomes important to remove airborne molecular contaminants as well as particulate contaminant in outdoor air introduced into clean rooms. One suitable control technique for these chemical contaminants is air washing by water in an outdoor air handling unit. In order to enhance the removal efficiency of chemical contaminants the effect of adding a heating and humidifying process before an air washer was examined.