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http://dx.doi.org/10.11629/jpaar.2017.6.30.065

A Study on Energy Reduction in an Outdoor Air Conditioning System for Semiconductor Manufacturing Cleanrooms Using Water Spray Humidification  

Song, Won-Il (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH))
Kim, Ki-Cheol (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH))
Yoo, Kyung-Hoon (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH))
Shin, Dae-Kun (Daehan PNC Co.)
Tae, Kyung-Eung (Eunsung-chemical Co.)
Kim, Yong-Sik (Samwoo System Co.)
Park, Dug-Jun (Sinsung ENG Co.)
Publication Information
Particle and aerosol research / v.13, no.2, 2017 , pp. 65-77 More about this Journal
Abstract
In recent large-scale semiconductor manufacturing cleanrooms, the energy consumption in outdoor air conditioning (OAC) systems to heat, humidify, cool and dehumidify outdoor air(OA) represents about 40~50 % of the total cleanroom power consumption required to maintain cleanroom environment. Therefore, the assessment of energy consumption in outdoor air conditioning systems is essential for reducing the outdoor air conditioning load for a cleanroom. In the present study, an experiment with an outdoor air flow rate of $1,000m^3/h$ was conducted to compare the energy consumption in steam humidification, simple air washer, exhaust air heat recovery type air washer and dry cooling coil(DCC) return water heat recovery type air washer OAC systems. Besides, a numerical analysis was carried out to evaluate the annual energy consumption of the aforementioned four OAC systems. It was shown that the simple air washer, exhaust air heat recovery type air washer and DCC return water heat recovery type air washer OAC systems using water spray humidification were more energy-efficient than the steam humidification OAC system. Furthermore the DCC return water heat recovery type air washer OAC system was the most energy-efficient.
Keywords
Cleanroom; Outdoor Air Conditioning; Energy Consumption; Water Spray Humidification; Air Washer; Heat Recovery;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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1 Ebine, T., Yoshida, H., Nishikawa, M. and Taura, H. (2005). Precision humidity control system by wetted-element humidifier and the cost reduction effect-( Part 2) Study on the system which used low temperature water, Proc. of the 23st Annual Technical Meeting on Air Cleaning and Contamination Control, 190-193.
2 Fujisawa, L., Moriya, M., Yosa, K., Ikuta, M., Yamamoto H. and Nabeshima, Y. (2001). Removal of chemical contaminants as well as heat recovery by air washer (part 1), Proc. of the 19th Annual Technical Meeting on Air Cleaning and Contamination Control, 166-168.
3 Fujisawa, S., Moriya, M., Yosa, K., Nishiwaki, S., Yamamoto H., Katsuki, T., Nabeshima, Y. and Oda, H. (2002). Removal of gaseous chemical contaminants as well as heat recovery by air washer (Part 2), Proc. of the 20th Annual Technical Meeting on Air Cleaning and Contamination Control, 162-165.
4 Hu, S.C., Wu, J.S., Chan, D.Y.L., Hsu, R.T.C. and Lee, J.C.C. (2008). Power consumption benchmark for a semiconductor cleanroom facility system, Energy and Buildings, 40, 1765-1770.   DOI
5 John, B. (1998). Cleanroom of the Future : An Assessment of HVAC Energy Savings Potential In a Semiconductor Industry Facility, LBNL Report No. 41356.
6 Kim, H.T., Song, G.S., Kim, K.C., Yoo, K.H., Son, S.W., Shin, D.K., Park, D.J. and Kwon, O.M. (2011). Comparative study on energy consumption of steam humidification type and water spray humidification type outdoor air conditioning systems for semiconductor manufacturing clean rooms, Trans. of the KSME (B), 35, 1249-1255.
7 Kim, K.C., Kim, H.T., Song, G.S., Yoo, K.H., Son, S.W., Shin, D.K., Park, D.J. (2012). An Experimental Study on Energy Consumption of Air Washer Outdoor Air Conditioning Systems for Semiconductor Manufacturing Clean Rooms, Journal of The Society of Air-Conditioning and Refrigerating Engineers of Korea, 24, 297-305.   DOI
8 Kim, K. C., Song, G.S., Kim, H.T., Yoo, K.H., Shin, D.K. and Park, D. J. (2013). An Assessment of Energy Consumption in Steam-Humidification- and Water-Spray-Humidification-Type Outdoor Air Conditioning Systems for Semiconductor Manufacturing Clean Rooms, Korean Journal of Air-Conditioning and Refrigeration Engineering, 25, 055-063.   DOI
9 Song, G. H., Yoo, K. H. and Son, S. W. (2008). A study on ammonia removal performance improvement of an air washer for semiconductor manufacturing clean rooms, Journal of Korean Society for Indoor Environment, 5, 151-157.
10 Song, G.S., Yoo, K.H., Kang, S.Y. and Son, S.W. (2009) An experimental study on energy reduction of an exhaust air heat recovery type outdoor air conditioning system for semiconductor manufacturing clean rooms, Korean Journal of Air-Conditioning and Refrigeration Engineering, 21, 273-281.
11 Song, G.S., Kim, H.T., Yoo, K.H., Son, S.W., Shin, D.K. and Kim, Y.I. (2010). Numerical analysis on energy reduction of an exhaust-air-heat-recovery type air washer system for semiconductor manufacturing clean rooms, Korean Journal of Air-Conditioning and Refrigeration Engineering, 22, 697-703.
12 Tsao, J.-M., Hu, S.-C., Chan, D. Y.-L., Hsu, R. T.-C. and Lee, J. C.-C. (2008). Saving energy in the make-up air unit (MAU) for semiconductor clean in subtropical areas, Energy and Buildings, 40, 1387-1393.   DOI
13 Yeo, K. H and Yoo K. H. (2006). An experiment on the characteristics of heat recovery, particle collection and gas removal in an air washer system for semiconductor clean rooms, Journal of Korean Society for Indoor Environment, 3, 131-140.
14 Tsao, J.-M., Hu, S.-C., Xu, T. and Chan, D. Y. L. (2010). Capturing energy-saving opportunities in make-up air systems for cleanrooms of high-technology fabrication plant in subtropical climate, Energy and Buildings, 42, 2005-2013.   DOI
15 Watanabe, T., Fujii, T., Murata, K. and Wada, T. (1998). Removal of chemical components in air by air washer, Proc. of the 16th Annual Technical Meeting on Air Cleaning and Contamination Control, 1-4.
16 Yamamoto H., Katsuki, T., Fujisawa, S., Yosa, K., Nishiwaki, S., Nabeshima, Y. and Oda, H. (2003). Removal of gaseous chemical contaminants as well as heat recovery by air washer (Part 3), Proc. of the 21st Annual Technical Meeting on Air Cleaning and Contamination Control, 151-154.
17 Yoshizaki, S., Hasegawa, T., Fujii, M. and Iijima, K. (1999). Removal of chemical compounds from outside air by air washer (part 3) The influence of the temperature and humidity of inlet air on removal efficiency, Proc. of the 17th Annual Technical Meeting on Air Cleaning and Contamination Control, 1-4.